Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings

Mamaeva, Axaule; Kenzhegulov, Aidar; Panichkin, Aleksandr; Alibekov, Zhasulan; Wieleba, Wojciech

doi:10.3390/coatings12020193

Open AccessArticle

Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings

by

Axaule Mamaeva

¹,

Aidar Kenzhegulov

^1,*

,

Aleksandr Panichkin

¹

,

Zhasulan Alibekov

¹ and

Wojciech Wieleba

²

¹

The Institute of Metallurgy and Ore Beneficiation, Satbayev University, Almaty 050013, Kazakhstan

²

Faculty of Mechanical Engineering, Wroclaw University of Science and Technology, 50-370 Wroclaw, Poland

^*

Author to whom correspondence should be addressed.

Coatings 2022, 12(2), 193; https://doi.org/10.3390/coatings12020193

Submission received: 30 December 2021 / Revised: 19 January 2022 / Accepted: 28 January 2022 / Published: 2 February 2022

(This article belongs to the Special Issue Surface Engineering and Tribology)

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Abstract

In the present work, the titanium carbonitride coatings were deposited by the reactive magnetron sputtering method at different substrate bias: 0, −70 V, and −100 V. The effect of the substrate bias on the structure, composition, and mechanical and tribological properties of titanium carbonitride coatings was studied. Scanning electron microscopy, nanoindentation, sliding wear test (ball-on-disk method), X-ray phase, and elemental analysis methods were used to evaluate the tribological properties and microstructure of the thin coatings. The dependencies obtained resulted in the determination of the most preferred mode of deposition by magnetron sputtering at a negative substrate bias in an atmosphere of argon–acetylene–nitrogen.

Keywords: titanium carbonitride; magnetron sputtering; substrate bias; wear resistance; wear rate; friction coefficient; nanohardness; coating; substrate

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MDPI and ACS Style

Mamaeva, A.; Kenzhegulov, A.; Panichkin, A.; Alibekov, Z.; Wieleba, W. Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings. Coatings 2022, 12, 193. https://doi.org/10.3390/coatings12020193

AMA Style

Mamaeva A, Kenzhegulov A, Panichkin A, Alibekov Z, Wieleba W. Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings. Coatings. 2022; 12(2):193. https://doi.org/10.3390/coatings12020193

Chicago/Turabian Style

Mamaeva, Axaule, Aidar Kenzhegulov, Aleksandr Panichkin, Zhasulan Alibekov, and Wojciech Wieleba. 2022. "Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings" Coatings 12, no. 2: 193. https://doi.org/10.3390/coatings12020193

APA Style

Mamaeva, A., Kenzhegulov, A., Panichkin, A., Alibekov, Z., & Wieleba, W. (2022). Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings. Coatings, 12(2), 193. https://doi.org/10.3390/coatings12020193

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

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Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings

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