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Journal: Coatings, 2022
Volume: 12
Number: 508
Article:
Structural and Mechanical Properties of Fluorine-Containing TaCxNy Thin Films Deposited by Reactive Magnetron Sputtering
Authors:
by
Jang-Hsing Hsieh, Chuan Li, Weite Wu and Shan-Lun Liu
Link:
https://www.mdpi.com/2079-6412/12/4/508
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