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Journal: Coatings, 2022
Volume: 12
Number: 508

Article: Structural and Mechanical Properties of Fluorine-Containing TaCxNy Thin Films Deposited by Reactive Magnetron Sputtering
Authors: by Jang-Hsing Hsieh, Chuan Li, Weite Wu and Shan-Lun Liu
Link: https://www.mdpi.com/2079-6412/12/4/508

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