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Journal: Proceedings, 2024
Volume: 97
Number: 155
Article:
High-Frequency Grating-Based Microelectromechanical Systems Actuator
Authors:
by
Inês Pires, Inês S. Garcia, João Vieira, Zeev Zalevsky, Carlos Calaza, Filipe S. Alves and Rosana A. Dias
Link:
https://www.mdpi.com/2504-3900/97/1/155
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