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Actuators
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Piezoelectric Actuators in MEMS
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Piezoelectric Actuators in MEMS

A special issue of Actuators (ISSN 2076-0825). This special issue belongs to the section "Miniaturized and Micro Actuators".

Deadline for manuscript submissions: 31 December 2024 | Viewed by 856

Special Issue Editor

Dr. Anqing Li

E-Mail Website
Guest Editor
School of Mechanical and Automotive Engineering, Qilu University of Technology, Jinan 250353, China
Interests: piezoelectric effects; flexoelectric effects; smart materials; organ on a chip

Special Issue Information

Dear Colleagues,

Piezoelectric actuators are indispensable key components in MEMS, playing a vital role in realizing the precise motion and control of microdevices, as well as promoting the continuous development and innovation of MEMS technology. The main advantage of piezoelectric actuators is their ability to achieve small and precise displacement and rotation. Because of their simple structure, fast reaction speed, high energy conversion efficiency, low heating, and lack of electromagnetic interference, among other characteristics, piezoelectric actuators are especially suitable for micro devices requiring high precision, high speed, and stable performance. In the practical application of MEMS, piezoelectric actuators are widely used to realize the precise motion control of micro pumps and micro valves, to name a few. For example, in micro pumps, piezoelectric actuators enable precise fluid delivery by precisely controlling mechanical deformation. The recent literature has provided a myriad of contributions related to the basic characterization of such devices, whilst ongoing research is devoted to various applications of piezoelectric actuators, addressing specific needs and issues. The aim of the present Special Issue is to collect original papers concerned with the application of various types of piezoelectric actuators in MEMS, without any limitation on the specific application field. Theoretical, numerical, and experimental contributions are all welcome.

Dr. Anqing Li
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Actuators is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • piezoelectric actuator
  • MEMS
  • precise motion and control
  • micro devices

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Published Papers (1 paper)

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Research

33 pages, 13377 KiB  
Article
Research on Output Characteristics of a Non-Contact Piezoelectric Actuator’s Micro-Displacement Amplifying Mechanism
by Huaiyong Li, Dongya Zhang, Yusheng Lin, Zhong Chen, Zhiwei Shi, Chong Li and Liang Zhao
Actuators 2024, 13(8), 309; https://doi.org/10.3390/act13080309 - 10 Aug 2024
Viewed by 647
Abstract
A non-contact piezoelectric actuator is proposed. The non-contact power transfer between stator and rotor is realized by pneumatic transmission, characterized by fast response, long life, compact structure, and easy miniaturization and control. The structure of the non-contact piezoelectric actuator is designed and its [...] Read more.
A non-contact piezoelectric actuator is proposed. The non-contact power transfer between stator and rotor is realized by pneumatic transmission, characterized by fast response, long life, compact structure, and easy miniaturization and control. The structure of the non-contact piezoelectric actuator is designed and its working principle is elucidated. The equation of the relationship between the output displacements of the non-contact piezoelectric actuator’s micro-displacement amplifying mechanism and the input displacements of piezoelectric stack is deduced, and the simulation analysis method of output displacement of the micro-displacement amplifying mechanism is established. Using the equation and the simulation analysis, the output characteristics of micro-displacement amplifying mechanism for the non-contact piezoelectric actuator and their changes along with the system parameters are investigated. The detailed process of optimal design of the micro-displacement amplifying mechanism is given by means of mathematical statistics. The prototype is made and the performance test is carried out. The correctness of the theoretical calculation and simulation analysis is verified by comparing the experimental values with the theoretical and simulated values of the output displacement of the micro-displacement amplifying mechanism. The results show that the initial angle of bridge structure I has an obvious effect on the output characteristics of the micro-displacement amplifying mechanism in the range of 5°–15°. When the lever’s rod length is 13 mm–15 mm, the bridge structure II’s rod length is 6 mm–7 mm, and the power arm length of bridge structure I’s driving lever is 5 mm–7 mm, the bridge structure II’s rod horizontal projection length is 5 mm–6 mm and the output displacement of the micro-displacement amplifying mechanism is larger. Through the optimal design, it is obtained that the bridge structure I’s initial angle is 8°, the lever’s rod length is 15 mm, the bridge structure II’s rod length is 7 mm, and the power arm length of bridge structure I driving lever is 5 mm, the bridge structure II’s rod horizontal projection length is 6 mm, and the simulated output displacement of the micro-displacement amplifying mechanism is 0.1415 mm. The prototype test reveals that as the input excitation displacement decreases, the error increases, while as the input excitation displacement increases, the error decreases. Specifically, when the input excitation displacement is 0.005 mm, the measured output displacement of the micro-displacement amplifying mechanism is 0.1239 mm, resulting in a 19.8% deviation from the theoretical value and a 12.44% deviation from the simulated value. The research work in this paper enriches the research achievements of non-contact piezoelectric actuators, and also provides a reference for designing small structure and large travel micro-displacement amplifying mechanisms of this type of actuator. Full article
(This article belongs to the Special Issue Piezoelectric Actuators in MEMS)
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