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MEMS/NEMS for Sensing: Array, Integration, Intelligence and Application

This special issue belongs to the section “E:Engineering and Technology“.

Special Issue Information

Keywords

  • MEMS/NEMS for sensing: physical sensing
  • chemical sensing
  • biological sensing
  • MEMS/NEMS arrays
  • MEMS/NEMS integration, design, and fabrication
  • MEMS/NEMS theory and modeling
  • Applications of MEMS/NEMS in intelligent systems

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Published Papers

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Micromachines - ISSN 2072-666X