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Prospect of RF MEMS Devices and Applications

This special issue belongs to the section “A:Physics“.

Special Issue Information

Keywords

  • RF MEMS devices
  • tunable filters
  • reconfigurable antennas
  • MEMS switches (ohmic and capacitive)
  • CMOS-MEMS integration
  • millimeter-wave systems
  • 5G/6G communication technologies
  • wafer-level packaging
  • multiphysics modeling and simulation
  • reliability in harsh environments

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Published Papers

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Micromachines - ISSN 2072-666X