Emerging Smart Materials for Microelectromechanical Systems

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: closed (30 June 2024) | Viewed by 848

Special Issue Editor


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Guest Editor
Nanoscience and Microsystems Engineering and Mechanical Engineering, University of New Mexico, Albuquerque, NM 87106, USA
Interests: piezoelectrics; energy harvesting; acoustic resonators; flexible/stretchable electronics; stimuli responsive polymers
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Special Issue Information

Dear Colleagues,

The development of functional and multifunctional materials for the application of microelectromechanical systems (MEMS) is needed to enhance performance and create new transduction mechanisms for sensors and actuators. Enhancing material properties and developing methods of integrating and fabricating materials is the cornerstone to developing new MEMS devices. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on the development of emerging functional and multifunctional materials for MEMS devices. This includes, but is not limited to, the development of new materials, enhancing material properties, developing new transduction mechanisms for materials, the integration of materials, new deposition techniques, or increasing manufacturing compatibility with MEMS. The Special Issue is interested in all types of functional materials, including 2D and thin films.

Dr. Nathan Jackson
Guest Editor

Manuscript Submission Information

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Keywords

  • smart materials
  • multifunctional materials
  • thin films
  • MEMS

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Published Papers (1 paper)

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Research

15 pages, 9105 KiB  
Article
Integration of Sm2Co17 Micromagnets in a Ferromagnetic Multipolar Microrotor to Enhance MEMS and Micromotor Performance
by Efren Diez-Jimenez, Alberto Bollero, Ignacio Valiente-Blanco, Ester M. Palmero, Miguel Fernandez-Munoz, Diego Lopez-Pascual and Gabriel Villalba-Alumbreros
Micromachines 2024, 15(7), 875; https://doi.org/10.3390/mi15070875 - 1 Jul 2024
Viewed by 557
Abstract
MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple Sm2Co17 micromagnets in a ferromagnetic core is presented. We [...] Read more.
MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple Sm2Co17 micromagnets in a ferromagnetic core is presented. We experimentally demonstrate the feasibility of a multipolar micrometric magnetic rotor with 11 magnetic dipoles made of N35 Sm2Co17 micromagnets (length below 250 μm and thickness of 65 μm), integrated on a ferromagnetic core. We explain the micromanufacturing methods and the multistep microassembly process. The core is manufactured on ferromagnetic alloy Fe49Co49V2 and has an external diameter of 800 μm and a thickness of 200 μm. Magnetic and geometric measurements show good geometric fitting and planarity. The manufactured microrotor also shows good agreement among the magnetic measurements and the magnetic simulations which means that there is no magnetic degradation of the permanent magnet during the manufacturing and assembly process. This technique enables new design possibilities to significantly increase the performance of micromotors or MEMS. Full article
(This article belongs to the Special Issue Emerging Smart Materials for Microelectromechanical Systems)
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