MEMS Actuators and Their Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 30 November 2024 | Viewed by 857

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Guest Editor
Department of Microelectronics and Nanoelectronics, Faculty of Information and Communications Technology, University of Malta, MSD 2080 Msida, Malta
Interests: microelectronics; micro-electromechanical systems; accelerator technology; sensors; systems and interfacing; precision measurement; magnetic measurement
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Special Issue Information

Dear Colleagues,

The advancements in MEMS actuators and their applications in the past years have considerably accelerated and continue to do so at the forefront of technology. New advancements in diverse applications, ranging from physics to medicine, continue to climb the technology readiness ladder, with very promising fundamental advancements leading to exciting technical applications.    

The aim of this Special Issue is to provide a forum for colleagues to publish recent research results related to the frontiers of MEMS actuators and their applications. These include topics such as the following:   

  • Fundamental advances in microactuator technologies. 
  • Material used for microactuation.
  • Innovative microactuation methods and advances in current actuation methods.
  • Advances in process and fabrication technologies for microactuators.
  • Simulation and modeling of microactuators.
  • Control issues and mechatronics in microactuators.
  • Smart circuits for microactuators.
  • Advances in optical, chemical, and biomicroactuators.
  • Advancements and novel methods in the characterization, calibration, and testing of microactuators.
  • Innovative instrumentation for the characterization, calibration, and testing of microactuators.  
  • Improvements in the repeatability, reliability, and lifetime of microactuators.
  • New applications of microactuators.
  • Any other topics related to microactuators. 

Dr. Nicholas Sammut
Guest Editor

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Keywords

  • MEMS actuators
  • microactuators

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Published Papers (1 paper)

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Research

16 pages, 2353 KiB  
Article
Dynamic Analysis of a Uniform Microbeam Resting on a Nonlinear Foundation Considering Its Curvature Subjected to a Mechanical Impact and Electromagnetic Actuation
by Nicolae Herisanu, Bogdan Marinca and Vasile Marinca
Micromachines 2024, 15(8), 969; https://doi.org/10.3390/mi15080969 - 29 Jul 2024
Viewed by 330
Abstract
This study proposes an investigation into the nonlinear vibration of a simply supported, flexible, uniform microbeam associated with its curvature considering the mechanical impact, the electromagnetic actuation, the nonlinear Winkler–Pasternak foundation, and the longitudinal magnetic field. The governing differential equations and the boundary [...] Read more.
This study proposes an investigation into the nonlinear vibration of a simply supported, flexible, uniform microbeam associated with its curvature considering the mechanical impact, the electromagnetic actuation, the nonlinear Winkler–Pasternak foundation, and the longitudinal magnetic field. The governing differential equations and the boundary conditions are modeled within the framework of a Euler–Bernoulli beam considering an element of the length of the beam at rest and using the second-order approximation of the deflected beam and the Galerkin–Bubnov procedure. In this work, we present a novel characterization of the microbeam and a novel method to solve the nonlinear vibration of the microactuator. The resulting equation of this complex problem is studied using the Optimal Homotopy Asymptotic Method, employing some auxiliary functions derived from the terms that appear in the equation of motion. An explicit closed-form analytical solution is proposed, proving that our procedure is a powerful tool for solving a nonlinear problem without the presence of small or large parameters. The presence of some convergence-control parameters assures the rapid convergence of the solutions. These parameters are evaluated using some rigorous mathematical procedures. The present approach is very accurate and easy to implement, even for complicated nonlinear problems. The local stability near the primary resonance is studied. Full article
(This article belongs to the Special Issue MEMS Actuators and Their Applications)
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