Micromachines, Volume 16, Issue 11

Ba_0.6Sr_0.4TiO₃ (BST) thin films were deposited on ITO substrates via rf magnetron sputtering, followed by structural and morphological characterization using XRD and FE-SEM. Metal–insulator–metal (MIM) RRAM devices were fabricated by depo...

Sub-resolution assist feature (SRAF) is a widely used resolution enhancement technology for improving image contrast and the common process window in advanced lithography processes. However, both model-based SRAF and rule-based SRAF methods suffer fr...

Shape Memory Alloys (SMAs) have unique thermomechanical properties, including superelasticity and the shape memory effect, which has led them to be used in a wide range of applications, from biomedical devices to aerospace and civil engineering struc...

In₂O₃ nanoparticles were obtained by annealing precursors that had been hydrothermally/solvothermally synthesized at 200 °C using In(NO₃)₃·4.5H₂O as the starting material. Three solvents were used for the synthesis, namely water, alcohol a...

Multi-beam and beam-scanning antennas enable extensive communication coverage while mitigating multipath fading and enhancing spectrum utilization efficiency. This paper presents a transmissive metasurface antenna design, which utilizes a microstrip...

This paper presents a comprehensive review of integrated terahertz (THz) and free-space optical (FSO) communication systems, focusing on their potential to address the escalating demands for high-capacity, long-distance, and ultra-reliable transmissi...

Ultrasound transducers are fundamental components in medical imaging systems, impacting resolution, sensitivity, and penetration depth. A key challenge in designing high-performance ultrasound transducers is balancing bandwidth and sensitivity. This...

Photoelectrochemical (PEC) biosensors have emerged as a significant research focus in the fields of bioanalysis and medical diagnostics in recent years due to their high sensitivity, low background noise, and ease of miniaturization. This review summ...

This work presents a comparative study on the ageing of supercapacitors and a method for monitoring their state of health (SoH) through mechanical deformation. This study aims to evaluate the accelerated ageing behaviours of these systems under speci...

This research presents a novel dual-mode filter design that offers significant advantages in terms of frequency agility and miniaturization compared to conventional fixed multi-resonator filters. The design and implementation of a compact tunable ban...

Ruggedized computers are the core of modern communication, guidance, control, and data-processing systems, and typically operate under extreme environmental conditions. However, under extreme service conditions such as temperature cycling, vibration,...

This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 μm CMOS-MEMS process, incorporated with additional post-processing steps su...

A super-wideband transparent antenna (SWTA) with wide axial ratio bandwidth (ARBW) featuring an enhanced ground plane and microstrip feeding is proposed. The antenna has planar dimensions of 0.20${\lambda }_0$ × 0.20${\lambda }_0$ × 0.003${\lambda }_0$...

Phase engineering has emerged as a powerful method for manipulating the structural and electrical characteristics of nanomaterials, resulting in significant enhancements in their electrochemical performance. This paper examines the correlation among...

The ability to precisely prepare microfluids with targeted concentrations is critical for numerous applications, including protein crystallization and drug efficacy evaluation. This study presents an efficient microfluidic method for the continuous p...

In this work, the effect of aqueous dispersions of graphene oxide (GO) and nanosized graphene oxide (nGO) on the enzymatic polymerization of polyaniline (PANI) was studied. The enzymatic polymerization of PANI was carried out in aqueous medium using...

Inflammatory cytokines and proteins are essential indicators of immune status and disease progression; however, conventional assays rely on invasive sampling and complex processing, restricting their use in real-time monitoring. Here, we present a 3D...

Electrostatic technology has emerged as a crucial tool for sustainable agricultural development due to its multifunctional characteristics. However, systematic and specialized investigations into its mechanism of action and application principles acr...

This paper presents a novel temperature compensation approach for dual-axis Micro–Electro–Mechanical System (MEMS) accelerometers, integrating Adaptive Mode Decomposition (AMD) with Grey Wolf Optimization (GWO) and Hybrid Convolutional&nd...

The study investigated the material removal process during precision milling of AZ91D magnesium alloy. A high-speed camera enabling high-frequency image recording was used to observe the cutting zone. In effect, it was possible to observe the mechani...

This study addresses the high-precision requirements for liquid-level detection of propellants in aerospace rockets and optimizes the design parameters of an ultrasonic liquid-level measurement system based on the response surface method (RSM). Meanw...

In recent years, the development of stretchable electronic devices with mechanical properties similar to those of human tissues has attracted increasing research interest in biomedical engineering, wearables, and other fields. These devices have demo...

Air-coupled ultrasonic detection demands high transmission performance from piezoelectric micromachined ultrasonic transducers (PMUTs). However, existing microelectromechanical system (MEMS)-based PMUTs deliver limited output, which compromises measu...

Multiplexed detection of arboviruses using a 4 × 4 Si-based electrolyte-gated transistor (EGT) array functionalized with specific aptamers has been investigated. The Si-based EGTs were fabricated using conventional Si microfabrication processes. The...

In an ionizing radiation environment, the formation of interface traps affects transistor performance, which may lead to device failure. This article reviews interface trap formation mechanisms in silicon-based devices. It explores interface trap typ...

The thermal therapy mask, as a wearable device, requires precise thermal management to ensure therapeutic efficacy and safety, which necessitates a detailed investigation of its heat conduction behavior under complex conditions. However, the heat con...

This letter presents a high-gain frequency-controlled beam-scanning antenna specifically designed for through-wall radar (TWR) applications in the W band. The antenna leverages the leaky-wave radiation generated by spoof surface plasmon polaritons (S...

In this research, we examined the potential sensor characteristics of branched polyethyleneimine (BPEI)-derived carbon dots (CDs) synthesized using BPEI as a nitrogen source and citric acid (CA) as a carbon source, specifically for the recognition of...

In extremely harsh high-temperature environments in aerospace, industrial manufacturing and other fields, traditional ultrasonic temperature measurement technology has certain limitations. This paper proposes a differential single crystal sapphire ul...

Microrobot navigation in constrained environments requires path planning methods that ensure both efficiency and collision avoidance. Conventional approaches, which typically combine graph-based path finding with geometric path simplification, effect...

Cellular mechanical properties are critical indicators of cellular state and promising disease biomarkers. This study introduces a novel microhand system, featuring chopstick-like plate-shaped end-effectors, designed for stable and high-precision sin...

Zero-heat-flux (ZHF) thermometry is a clinically validated method for non-invasive core body temperature monitoring, yet its broad adoption in wearable applications is constrained by the high power consumption of the heater element. In this study, we...

High-throughput screening (HTS) is an essential process in drug discovery, requiring platforms that ensure reagent economy, high efficiency, and resistance to cross-contamination. Click chemistry is well suited for HTS because of its biocompatibility...

This work first analyzes the failure behaviors of P-GaN HEMTs with different gate structures (Schottky gate vs. Ohmic gate) under both forward and reverse ESD stresses. It reveals that the Schottky gate structure lacks effective electrostatic charge...

The simultaneous detection of multiple cancer biomarkers using microfluidic multiplexed immunosensors is gaining significant interest in the field of Point-of-Care diagnostics. This study highlights integrating surface-enhanced infrared Fourier trans...

Efficient and accurate prediction of transient temperature fields is critical for thermal management of electronic devices with multiple heat sources. In this study, a reduced-order surrogate modeling approach is developed based on proper orthogonal...

Traditional zero-compensation techniques employed to improve sub-sampling phase-locked loop (SSPLL) stability often exacerbate spur degradation or incur excessive area overhead, rendering them unsuitable for high-resolution image sensor applications....

Aqueous zinc-ion batteries (AZIBs) have attracted considerable attention due to their intrinsic safety, low cost, and environmental friendliness. However, drastic volume expansion, sluggish reaction kinetics, and the insufficient structural stability...

This study introduces a hybrid Brain–Computer (BCI) system with a robust and secure activation mechanism between sessions, aiming to minimize the negative effects of visual stimulus-based BCI systems on user eye health. The system is based on t...

Composite materials are widely utilized for their excellent properties; however, the mismatch in phase response during processing often induces surface and subsurface damage. While reducing the cutting depth is a common strategy to improve quality, i...

With the rapid deployment of artificial intelligence (AI) data centers, demand for optical modules surges—alongside faster upgrades and stricter low-power requirements. However, traditional optical driver integrated circuits (ICs) rely on devic...

Hemoglobin oxygen (HbO₂) saturation is a critical biomarker in patient care, yet conventional measurement approaches are often costly and require extensive calibration. To address these limitations, the present study proposes a novel biosensor derive...

The increasing market demand for high-power and high-frequency applications necessitates the development of highly reliable Gallium Nitride (GaN) High-Electron-Mobility Transistors (HEMTs). While GaN offers superior performance and efficiency over tr...

Aluminum nitride (AlN) is a wide-bandgap semiconductor (6.2 eV) with a broad transparency window spanning from the ultraviolet (UV) to the mid-infrared (MIR) wavelength region, making it a promising material for integrated photonics. In this work, Al...

Dry film photoresist (DFR) is a solid photosensitive resin film that enables multilayer lamination and rapid patterning at relatively low temperatures. Initially developed for the production of printed circuit boards (PCBs), DFR has demonstrated sign...

Carbon-fiber-reinforced silicon carbide (C/SiC) composite materials, as a kind of composite material with the characteristics of ceramics, have the following characteristics: high strength, high stiffness, low density, high temperature resistance, an...

The mechanical reliability of glass substrates is a key challenge for their adoption in advanced semiconductor packaging. This study employs finite element analysis to systematically evaluate the risk of edge crack propagation in large glass panels d...

Visceral pain in Irritable Bowel Syndrome (IBS) is difficult to evaluate objectively due to its complex physiological nature and lack of reliable biomarkers. Given the complexity of IBS, a multimodal physiological monitoring approach, combining elect...

Predicting the electric field distribution inside microfluidic devices featuring an embedded array of electrical insulating pillars is critical for applications that require the electrokinetic manipulation of particles (e.g., bacteria, exosomes, micr...

Conventional whole-blood flow assays for quantifying thrombus formation are typically performed at room temperature and are technically demanding, which limits their translational applicability. We engineered a novel, disposable, mountable, and singl...