Micro-/Nanosensors: Design, Fabrication, Simulation, and Material Preparation

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 October 2023) | Viewed by 1549

Special Issue Editor


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Collection Editor
Department of Physics, Manipal Institute of Technology, Manipal Academy of Higher Education, Manipal 576104, India
Interests: gas sensors; metal oxide semiconductors; nonlinear optics; optical power limiting materials for eye and sensor protection; second harmonic generation
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Special Issue Information

Dear Colleagues,

Rapid industrialization and urbanization in recent years have increased air pollution in large amounts, making the use of sensors vital. Sensors are not only essential for the real-time monitoring and assessment of air quality, though. They play a crucial role in realizing internet of things (IoT)-enabled smart cities, in which air quality monitoring is an integral part. Miniaturization of sensors to the micro-/nanoscale is thus crucial, and the integration of micromachining and nanofabrication process enables realizing micro/nano gas sensing chips with high sensitivity and fast response time. The present Special Issue focuses on recent advances in the area of sensing to address the limiting factors which will pave the way towards the next generation of intelligent micro-/nanosensors. This Special Issue focuses on the design, modeling, fabrication, simulation, material synthesis, and characterization of micro-/nanosensors. We cordially invite you to submit original research articles and communications covering the experimental and theoretical studies that examine novel sensing materials/preparation methods/sensing technology to this Special Issue. In addition, review articles on the above topics are invited for submission. Areas of interest include but are not limited to:

  • Fabrication technologies for sensors
  • Modelling and simulations of sensors
  • Sensing technology
  • Micro/nano gas sensors
  • MEMS
  • NEMS
  • Low-dimensional materials
  • Metal oxide semiconductors

Dr. P. Poornesh
Collection Editor

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Published Papers (1 paper)

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Research

12 pages, 8335 KiB  
Article
Evaluation of Zn: WO3 Thin Films as a Sensing Layer for Detection of NH3 Gas
by Anusha, Priyanka Kumari, P. Poornesh, Saikat Chattopadhyay, Ashok Rao and Suresh D. Kulkarni
Micromachines 2023, 14(4), 732; https://doi.org/10.3390/mi14040732 - 25 Mar 2023
Cited by 3 | Viewed by 1359
Abstract
Pristine WO3 and Zn-doped WO3 were synthesized using the spray pyrolysis technique to detect ammonia gas. The prominent orientation of the crystallites along the (200) plane was evident from X-ray diffraction (XRD) studies. Scanning Electron Microscope (SEM) morphology indicated well-defined grains [...] Read more.
Pristine WO3 and Zn-doped WO3 were synthesized using the spray pyrolysis technique to detect ammonia gas. The prominent orientation of the crystallites along the (200) plane was evident from X-ray diffraction (XRD) studies. Scanning Electron Microscope (SEM) morphology indicated well-defined grains upon Zn doping with a smaller grain size of 62 nm for Zn-doped WO3 (Zn: WO3) film. The photoluminescence (PL) emission at different wavelengths was assigned to defects such as oxygen vacancies, interstitial oxygens, localized defects, etc. X-ray Photoelectron spectroscopy (XPS) studies confirmed the formation of oxygen vacancies in the deposited films. The ammonia (NH3) sensing analysis of the deposited films was carried out at an optimum working temperature of 250 °C. The sensor performance of Zn: WO3 was enhanced compared to pristine WO3 at 1 ppm NH3 concentration, elucidating the possibility of the films in sensing applications. Full article
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