Piezoelectric MEMS/NEMS—Materials, Devices, and Applications, Third Edition
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".
Deadline for manuscript submissions: 31 January 2025 | Viewed by 3435
Special Issue Editor
Interests: MEMS; microrobotics; smart materials; energy harvesting
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Piezoelectric materials have been playing a crucial role in a large number of devices and applications that have promoted a variety of today’s technological progress and impacted modern society. They are widely used as sensors and actuators, and they can be deposited as thin films over standard silicon substrates or flexible substrates. Typically, piezoelectric sensors feature high sensitivity, a wide dynamic range, and are self-powering; piezoelectric actuators enable high resolution, large force, and/or large displacement generation. The strong electromechanical coupling, simple geometric implementation, and high energy density endow the piezoelectric device with the capability of energy harvesting. The appeal of piezoelectric materials for MEMS/NEMS has been constantly growing, in particular, with the increasing commercial success of piezoelectric MEMS/NEMS devices. The upcoming era of Big Data, sensors, the Internet of Things (IoT), and Artificial Intelligence (AI) has been offering new opportunities and challenges to piezoelectric MEMS/NEMS devices, and we are seeing researchers throughout the world actively tapping into the state-of-the-art micro/nano-fabrication process, promoting advanced integration techniques, and exploring innovative applications to unleash the potential of piezoelectric MEMS/NEMS devices. In this Special Issue, we invite submissions exploring the latest advances in the field of piezoelectric MEMS/NEMS devices.
Dr. Wei Li
Guest Editor
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Keywords
- piezoelectric sensors and actuators
- microrobotics
- piezoelectric MEMS resonators
- acoustic MEMS devices
- surface acoustic wave devices
- energy-harvesting technologies
- simulation and modeling of piezoelectric MEMS
- application of smart materials in MEMS
- micro/nanofabrication
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