Surface and Bulk Acoustic Wave Resonators: Materials, Design and Fabrication
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".
Deadline for manuscript submissions: closed (25 September 2024) | Viewed by 3272
Special Issue Editors
Interests: RF circuits and system; RF MEMS; acoustic filter; phononic crystal; low-noise oscillator
Interests: surface and bulk acoustic wave devices
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Acoustic wave devices have been extensively used for radio frequency (RF) signal processing in modern wireless communication systems. Modern mobile wireless handsets have many filters. There are one hundred acoustic filters in one terminal in the 5G and 6G communications systems. SAW/BAW filters, including duplexers and multiplexers, are very important devices in mobile terminal systems, and these acoustic devices are small and perform well. There are many kinds of acoustic filter, like TCSAW, XBAR, TFBAR, and IHPSAW, and they are developed using different concepts, like the Y-matrix, reflective array method (RAM), coupling of mode (COM), longitudinally coupled resonator (LCR), and so on.
Over the last ten years, the micro-acoustic resonator techniques and simulation systems have been improved and perfected, such as the 3D finite element method (3D FEM), hierarchical cascading technique (HCT), and the simulation of nonlinearities, with a high-power handling capacity, as well as filter synthesis. An Advanced Quality Factor Q, large electromechanical coupling factor keff^2, and Temperature Coefficient of Frequency (TCF) are required in some devices.
To fabricate SAW/BAW devices, some materials like Lithium Tantalate (LiTaO3, LT), Lithium Niobate (LiNbO3, LN) (especially for the substrate), and new Scandium (Sc)-doped AlN materials, and so on, are needed. In order to promote research and advocate for continuous innovation in this field, this Special Issue presents the current state of the art in the field of ‘Surface and Bulk Acoustic Wave Resonators’, covering a wide range of related topics, including, but not limited to, the following:
- New resonator structures: IDT, DMS,IHPSAW, Piston, etc.;
- New methods of material control: angle cut, guide wave structure, etc.;
- Advanced materials: LT-, LN-, Scandium (Sc)-doped AlN, etc.;
- Fabricated processes: thinner films, Nano-level accurate fabrication, etc.;
- Advanced simulations: BEM, FEM, HCT, etc.
In this Special Issue, original research articles and reviews are welcome. We look forward to receiving your contributions.
Prof. Dr. Jingfu Bao
Prof. Dr. Kenya Hashimoto
Guest Editors
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Keywords
- surface acoustic wave
- bulk acoustic wave
- excited bulk acoustic wave resonator (XBAR)
- 3D finite element method (FEM)
- resonator
- temperature coefficient of frequency (TCF)
- interdigital transducers (IDTs)
- coupling of mode (COM) model
- modified Butterworth van Dyke (mBVD)
- quality factors (Q)
- acoustic impedance (Z)
- multiplexer
- nonlinearity
- phononic crystal
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