MEMS/NEMS Sensors and Energy Harvesters
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: closed (31 August 2022) | Viewed by 2595
Special Issue Editor
Interests: III-Nitride MEMS; chemical sensors; biosensors; 2D materials; nanoelectronics
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Energy harvesters based on Micro-electromechanical systems (MEMS) are well known nowadays due to their small features, ability for monolithic integration with the integrated circuit in a single platform, robust, and easily fabricated in bulk. The piezoelectric (PZT), based on variety of micro and nanoscale materials, as well and the electromagnetic (EM) generators in various forms and functionalities, constitute examples of such energy harvesters. To further increase their effectiveness in harvesting ambient energy, researchers started to venture into hybrid or multimodal energy harvesters that can not only power sensors but also microcontrollers and data transmission.
Recently, different energy harvesting technologies have undergone significant innovation, providing key functionalities in diversified systems such as energy harvesters and self-powered sensors. Accordingly, this Special Issue seeks to showcase research papers and review articles that are focused on advanced developments for the design, fabrication, integration, and application of energy harvesting technologies and MEMS/NEMS sensors, with particular interests in the integration of energy harvesters and nanogenerators with MEMS/NEMS Sensors and systems.
Prof. Dr. Goutam Koley
Guest Editor
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Keywords
- energy harvesters
- nanogenerators
- self-powered sensors
- smart electronics
- MEMS/NEMS sensors
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