The Future of MEMS-Based Miniaturized Detectors for Emerging Technologies
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: closed (31 May 2020) | Viewed by 4462
Special Issue Editors
Interests: microscale NMR detectors; lab on a chip (LOC); magnetic microsystems
Interests: MEMS-based energy harvesting; biomedical sensors; MEMS sensors for wearable technologies; nanostructured materials for sensors and energy applications
Special Issue Information
Dear Colleagues,
The field of microelectromechanical systems (MEMS) symbolically started with the quest for Richard Feynman’s 1000$ prize offered to “the first who makes an operating electric motor [...] only 1/64 inch cube”, during a meeting of the American Physical Society in 1959. In order to make Feynman’s vision come true, the field has heavily relied over the years on the already established technology infrastructure for integrated circuits (IC’s). While the IC technology has been rather rigid in terms of materials and processes, the MEMS field has allowed much more room to play, incorporating a wide range of new materials such as glass, polymers, and ceramics in addition to traditional silicon. This rather “liberal” approach and the flexibility in materials and processes invited for useful integration of MEMS structures with electronic, optical, microfluidic, and biological networks, which has been translated into a plethora of sensing applications.
As of today, the field of miniaturized MEMS detectors is a rather established one. Small size and wafer scale fabrication have decreased unit device costs, contributing to the accessibility to and ubiquity of these devices. Some categories have made the leap towards being strongly commercialized and thus becoming part of our lives: MEMS microphones or gyroscopes in smartphones, accelerometers and pressure sensors in vehicles.
In this Special Issue, we aim at addressing the question “What is next in the field of miniaturized MEMS detectors?” We are inviting contributions as research articles, comments, and reviews addressing, but not limited to, the following topics:
- The development of the next generation of superior MEMS detectors in terms of sensitivity, size, low operating power, biocompatibility, and reliability;
- The future role of miniaturized MEMS detectors in the context of emerging technologies, i.e., in the era of the Internet of Things, virtual reality, and artificial intelligence;
- Miniaturized MEMS detectors opening the way for correlative characterization applications, i.e., simultaneously acquiring spatial- and time-resolved data of an individual sample by performing previously uncorrelated measurements in order to provide a deeper insight into the structure and processes of a sample than what is possible using the individual measurement methods separately.
Dr. Vlad Badilita
Dr. Mustafa Ilker Beyaz
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- MEMS detectors for IoT
- Virtual reality
- Artificial intelligence
- Biomedical sensors
- MEMS sensors for wearable and implantable devices
- Correlative characterization
- Ultralow power sensors
- Sensor reliability
