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Micromachines
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Advanced Nanomachining
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Advanced Nanomachining

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (30 November 2022) | Viewed by 5496

Special Issue Editors

Dr. Bingdong Chang

E-Mail Website
Guest Editor
DTU Mekanik, Department of Mechanical Engineering, Technical University of Denmark, 2800 Kongens Lyngby, Denmark
Interests: plasma process; nanofabrication; MEMS/NEMS devices
Dr. Ding Zhao

E-Mail Website
Guest Editor
Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou 310024, Zhejiang Province, China
Interests: nanofabrication; nanoelectronics; nanophotonics; nanotechnology for energy applications

Special Issue Information

Dear Colleagues,

In the past few decades, tremendous advances have been achieved in nanoscience and nanotechnologies. Novel understandings of nanoscale are still being continuously reported in a broad spectrum of scientific research. At the same time, revolutionary progress has been made in industries benefiting from the development of nanotechnologies. From a technological perspective, most of the achievements are built upon the ability to fabricate and manipulate objects on a nanoscale with high precision and reproducibility. With the advanced fabrication techniques in semiconductor industries, we can manufacture nanostructures accurately on a wafer scale and realize complicated device architectures. Even smaller critical dimensions are pursued towards atomic scale with advanced lithographic methods, and nanostructures with complex 3D geometries are manufactured with novel techniques, e.g., two-photon polymerization and 3D plasma etching processes. Due to specific applications, nanomachining strategies are also being developed on various material platforms, e.g., polymer-based nanostructures for biomedicines and III–V materials for integrated photonic circuits. This Special Issue seeks to showcase research papers, short communications, and review articles focused on i) novel fabrication strategies on a nanoscale, e.g., with electron beam lithography, nanoscale plasma etching, 3D printing, etc.; and ii) nanomachining on novel material platforms such as polymers and 2D materials.     

We look forward to receiving your submissions!

Dr. Bingdong Chang
Dr. Ding Zhao
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • nanofabrication
  • nanomachining
  • high-resolution manufacturing
  • 3D manufacturing
  • process development

Published Papers (3 papers)

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Research

10 pages, 2993 KiB  
Article
Fabricating Air Pressure Sensors in Hollow-Core Fiber Using Femtosecond Laser Pulse
by Changning Liu, Wuqiang Tao, Cong Chen and Yang Liao
Micromachines 2023, 14(1), 101; https://doi.org/10.3390/mi14010101 - 30 Dec 2022
Cited by 2 | Viewed by 1598
Abstract
In this paper, a hollow core fiber was spliced with standard single-mode fibers to form a fiber optic gas pressure sensor, and its sensing characteristics with single hole or multi-holes punched on the hollow core fiber with femtosecond laser pulses were investigated. The [...] Read more.
In this paper, a hollow core fiber was spliced with standard single-mode fibers to form a fiber optic gas pressure sensor, and its sensing characteristics with single hole or multi-holes punched on the hollow core fiber with femtosecond laser pulses were investigated. The experiments demonstrate that the air pressure sensitivity of the single hole sensor was −3.548 nm/MPa, with a linearity of 99.45%, while its response times for air pressure’s rise and fall were 4.25 s and 2.52 s, respectively. The air pressure sensitivity of the ten-hole sensor was up to −3.786 nm/MPa, with a linearity of 99.47%, while its response times for air pressure’s rise and fall were 2.17 s and 1.30 s, respectively. Theoretical analysis and experimental results indicate that the pressure sensitivity of the sensor with an anti-resonant reflecting guidance mechanism mainly comes from the refractive index change of the air inside the hollow core fiber. The proposed device with multi-holes drilled by a femtosecond laser has the advantages of fabrication simplicity, low cost, fast response time, good structural robustness, high repeatability, high sensitivity to air pressure, and insensitivity to temperature (only 10.3 pm/°C), which makes it attractive for high pressure sensing applications in harsh environments. Full article
(This article belongs to the Special Issue Advanced Nanomachining)
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12 pages, 5239 KiB  
Article
General Strategy toward Laser Single-Step Generation of Multiscale Anti-Reflection Structures by Marangoni Effect
by Jingbo Yin, Huangping Yan, Gesang Dunzhu, Rui Wang, Shengzhu Cao, Rui Zhou and Yuanzhe Li
Micromachines 2022, 13(9), 1491; https://doi.org/10.3390/mi13091491 - 8 Sep 2022
Cited by 3 | Viewed by 1652
Abstract
The anti-reflection of transparent material surfaces has attracted great attention due to its potential applications. In this paper, a single-step controllable method based on an infrared femtosecond laser is proposed for self-generation multiscale anti-reflection structures on glass. The multiscale composite structure with ridge [...] Read more.
The anti-reflection of transparent material surfaces has attracted great attention due to its potential applications. In this paper, a single-step controllable method based on an infrared femtosecond laser is proposed for self-generation multiscale anti-reflection structures on glass. The multiscale composite structure with ridge structures and laser-induced nano-textures is generated by the Marangoni effect. By optimizing the laser parameters, multiscale structure with broadband anti-reflection enhancement is achieved. Meanwhile, the sample exhibits good anti-glare performance under strong light. The results show that the average reflectance of the laser-textured glass in the 300–800 nm band is reduced by 45.5% compared with the unprocessed glass. This work provides a simple and general strategy for fabricating anti-reflection structures and expands the potential applications of laser-textured glass in various optical components, display devices, and anti-glare glasses. Full article
(This article belongs to the Special Issue Advanced Nanomachining)
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14 pages, 8993 KiB  
Article
An Analysis of the Effect of Abrasive/Tool Wear on the Ductile Machining of Fused Silica from the Perspective of Stress
by Ming Li, Xiaoguang Guo, Song Yuan, Bingyao Zhao, Yongnian Qi, Shuohua Zhang, Dongming Guo and Ping Zhou
Micromachines 2022, 13(6), 820; https://doi.org/10.3390/mi13060820 - 25 May 2022
Cited by 1 | Viewed by 1754
Abstract
Understanding the influence mechanism of abrasive/tool wear on machining is the key to realize high-efficiency ultra-precision machining of fused silica. To explore the effect of abrasive/tool wear on ductile machining, the smoothed particle hydrodynamics (SPH) cutting models with different edge radii are established. [...] Read more.
Understanding the influence mechanism of abrasive/tool wear on machining is the key to realize high-efficiency ultra-precision machining of fused silica. To explore the effect of abrasive/tool wear on ductile machining, the smoothed particle hydrodynamics (SPH) cutting models with different edge radii are established. Through the analysis of equivalent rake angle, hydrostatic pressure, cutting force and maximum principal stress with the Flamant’s formula, the influence of edge radii on ductile-brittle transition (DBT) is discussed for the first time. The simulation results show that when the edge radius increases from less to larger than the cutting depth, the equivalent rake angle changes from positive to negative, and the maximum hydrostatic pressure gradually increases, which is beneficial to promote the ductile processing. Meanwhile, with the rise of edge radius (i.e., abrasive/tool wear), both the cutting force and crack initiation angle increase, while the friction coefficient and normalized maximum principal decrease. When the value of normalized maximum principal stress exceeds 2.702, the crack in the workpiece begins to initiate, and its initiation angle calculated by the Flamant’s formula is in good agreement with the simulation results as well as less than 50°. Finally, the nano-scratch experiment was carried out, and the material removal mechanism and friction coefficient f similar to the simulation were obtained, which further proved the accuracy of SPH model. This study is meaningful for understanding the effect of abrasive/tool wear on the removal mechanism of brittle materials and improving the quality and efficiency of cutting and grinding. Full article
(This article belongs to the Special Issue Advanced Nanomachining)
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