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MEMS and Ultra-Sensitive Sensors
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MEMS and Ultra-Sensitive Sensors

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (20 January 2023) | Viewed by 17584

Special Issue Editor

Dr. Mingliang Zhang

E-Mail Website
Guest Editor
1. College of Microelectronics and Research Center of Materials and Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
2. Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Interests: MEMS pressure sensor; micro/nano fabrication technology; micro/nano MEMS; micro/nano energy devices

Special Issue Information

Dear Colleagues,

MEMS sensors have attracted a lot of research. For example, differential pressure sensors have achieved a resolution of 1.3 mPa, while resonant pressure sensors with a 2 MPa measuring range have an accuracy of 0.01%. Small-size MEMS pressure sensors can inspect blood pressure in vessels. The Allan deviation zero bias instability of MEMS accelerometers can be less than 1 micro gravity acceleration. The zero point drift of MEMS gyro can be better than 0.01°/h. Single gold atoms (~3*10-22 g) can be weighted using a carbon nanotube cantilever. The minimum magnetic field noise is about 36 pT/Hz(1/2), and a resolution of 5 nT was achieved in the Fe–Co–B-based amorphous ribbon. MEMS resonators have extensive usable frequency ranges from a few Hz to several THz. The interaction between molecules with am fN force level can be detected using MEMS sensors. The detection of single DNAs, proteins, viruses, and cells has been enabled with MEMS bio-/chem-sensors.

Due to different working principles, materials, device structures, fabricating technologies, and driving detecting mechanisms, MEMS sensors exhibit various properties. This Special Issue shall discuss issues associated with the updated frontier of MEMS sensors, such as theory, material, preparation, measurement, and application. Progress, problems, barriers, limits, and comments related to MEMS sensors are all welcome. This Special Issue aims to publish original papers as well as review articles summarizing and analyzing the latest results in the MEMS sensor field. The main topics include but are not limited to the keywords.

Dr. Mingliang Zhang
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS pressure sensor
  • MEMS accelerometer
  • MEMS gyro
  • MEMS gas sensor
  • MEMS magnetometer
  • MEMS resonator
  • MEMS force sensor
  • MEMS acoustic wave sensor
  • MEMS bio-/chem-sensor

Published Papers (5 papers)

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Research

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13 pages, 5029 KiB  
Article
Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal
by Lixia Li, Chuang Zhu, Haixia Liu, Yan Li, Qi Wang and Kun Su
Sensors 2022, 22(20), 7751; https://doi.org/10.3390/s22207751 - 12 Oct 2022
Cited by 4 | Viewed by 2331
Abstract
Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection phononic crystal (SCC-PnC), which can be used for MEMS resonators of [...] Read more.
Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection phononic crystal (SCC-PnC), which can be used for MEMS resonators of various overtone modes. First, using the finite element method to study the frequency characteristics and delay line of the SCC-PnC band, the SCC-PnC has an ultra-wide bandgap of 56.6–269.6 MHz. Next, the effects of the height h and the position h1 of the structural parameters of the small cross-connected plate on the band gap are studied, and it is found that h is more sensitive to the width of the band gap. Further, the SCC-PnC was implanted into the piezoelectric MEMS resonator, and the admittance and insertion loss curves were obtained. The results show that when the arrangement of 4 × 7 SCC-PnC plates is adopted, the anchor quality factors of the third-order overtone, fifth-order overtone, and seventh-order overtone MEMS resonators are increased by 1656 times, 2027 times, and 16 times, respectively. Full article
(This article belongs to the Special Issue MEMS and Ultra-Sensitive Sensors)
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9 pages, 9017 KiB  
Communication
High-Responsivity, Low-Leakage Current, Ultra-Fast Terahertz Detectors Based on a GaN High-Electron-Mobility Transistor with Integrated Bowtie Antennas
by Zhen Huang, Wei Yan, Zhaofeng Li, Hui Dong, Fuhua Yang and Xiaodong Wang
Sensors 2022, 22(3), 933; https://doi.org/10.3390/s22030933 - 25 Jan 2022
Cited by 7 | Viewed by 2380
Abstract
In this study, we fabricated three kinds of terahertz detectors with different leakage currents to analyze the plateau-like effect. The results indicate that the platform becomes increasingly apparent with the decrease in the leakage current. The fabricated device with the lowest leakage current [...] Read more.
In this study, we fabricated three kinds of terahertz detectors with different leakage currents to analyze the plateau-like effect. The results indicate that the platform becomes increasingly apparent with the decrease in the leakage current. The fabricated device with the lowest leakage current shows a responsivity of 4.9 kV/W and noise equivalent power (NEP) of 72 pW/Hz. Further, it can be used for broadband detection between 215 GHz and 232 GHz with a voltage responsivity of more than 3.4 kV/W, and the response time can be up to 8 ns. Overall, the proposed device exhibits high sensitivity, large modulation frequency, and fast response, which indicates its excellent potential for detection and imaging applications in the THz range, including the detection of the 220 GHz atmospheric window. Full article
(This article belongs to the Special Issue MEMS and Ultra-Sensitive Sensors)
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16 pages, 5935 KiB  
Article
Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor
by Wenhan Chang, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao and Chengchen Gao
Sensors 2021, 21(13), 4337; https://doi.org/10.3390/s21134337 - 24 Jun 2021
Cited by 4 | Viewed by 2761
Abstract
In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed through [...] Read more.
In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed through numerical calculation. Considering both the amplification factor and effective length of amplification zone, a small-sized double cone horn with middle tube is designed and further optimized. A three-wire thermal acoustic particle velocity sensor was fabricated and packaged in the 3D printed double cone tube (DCT) horn. Experiment results show that an amplification factor of 6.63 at 600 Hz and 6.93 at 1 kHz was achieved. A good 8-shape directivity pattern was also obtained for the optimized DCT horn with the lateral inhibition ratio of 50.3 dB. No additional noise was introduced, demonstrating the DCT horn’s potential in improving the sensitivity of acoustic particle velocity sensors. Full article
(This article belongs to the Special Issue MEMS and Ultra-Sensitive Sensors)
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Review

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22 pages, 5259 KiB  
Review
CTD Sensors for Ocean Investigation Including State of Art and Commercially Available
by Shiyu Xiao, Mingliang Zhang, Changhua Liu, Chongwen Jiang, Xiaodong Wang and Fuhua Yang
Sensors 2023, 23(2), 586; https://doi.org/10.3390/s23020586 - 4 Jan 2023
Cited by 5 | Viewed by 5951
Abstract
Over 70% of the earth’s surface is covered by oceans; globally, oceans provides a huge source of wealth to humans. In the literature, several sensors have been developed to investigate oceans. Electrical conductivity temperature depth (CTD) sensors were used frequently and extensively. Long-term [...] Read more.
Over 70% of the earth’s surface is covered by oceans; globally, oceans provides a huge source of wealth to humans. In the literature, several sensors have been developed to investigate oceans. Electrical conductivity temperature depth (CTD) sensors were used frequently and extensively. Long-term accurate CTD data is important for the study and utilization of oceans, e.g., for weather forecasting, ecological evolution, fishery, and shipping. Several kinds of CTD sensors based on electrics, optical, acoustic wave and radio waves have been developed. CTD sensors are often utilized by measuring electrical signals. The latest progress of CTD sensors will be presented in order of performance. The principles, structure, materials and properties of many CTD sensors were discussed in detail. The commercially available CTD sensors were involved and their respective performances were compared. Some possible development directions of CTD sensors for ocean investigation are proposed. Full article
(This article belongs to the Special Issue MEMS and Ultra-Sensitive Sensors)
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22 pages, 8644 KiB  
Review
Suppression Method of Optical Noises in Resonator-Integrated Optic Gyroscopes
by Xuebao Kuai, Lei Wei, Fuhua Yang, Wei Yan, Zhaofeng Li and Xiaodong Wang
Sensors 2022, 22(8), 2889; https://doi.org/10.3390/s22082889 - 9 Apr 2022
Cited by 8 | Viewed by 2652
Abstract
Resonator-integrated optical gyroscopes have advantages such as all-solid-state, on-chip integration, miniaturized structure, and high precision. However, many factors deteriorate the performance and push it far from the shot-noise limited theoretical sensitivity. This paper reviews the mechanisms of various noises and their corresponding suppression [...] Read more.
Resonator-integrated optical gyroscopes have advantages such as all-solid-state, on-chip integration, miniaturized structure, and high precision. However, many factors deteriorate the performance and push it far from the shot-noise limited theoretical sensitivity. This paper reviews the mechanisms of various noises and their corresponding suppression methods in resonator-integrated optical gyroscopes, including the backscattering, the back-reflection, the polarization error, the Kerr effect, and the laser frequency noise. Several main noise suppression methods are comprehensively expounded through inductive comparison and reasonable collation. The new noise suppression technology and digital signal processing system are also addressed. Full article
(This article belongs to the Special Issue MEMS and Ultra-Sensitive Sensors)
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