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Micro-Nano Systems Technology and Micro-Nano Intelligent Manufacture

This special issue belongs to the section “Physical Sensors“.

Special Issue Information

Keywords

  • Design principles and fabrication techniques of micro- and nano systems
  • MEMS sensors and actuators
  • Lab on chip devices
  • Microfluidics and nanofluidics
  • Signal processing and detection based on integrated micro- and nano systems
  • Modelling and simulation in micro and nano systems
  • Heat & mass transfer in micro and nano systems

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Published Papers

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Sensors - ISSN 1424-8220