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18 pages, 7432 KB  
Article
Design and Optimization of a Pneumatic Microvalve with Symmetric Magnetic Yoke and Permanent Magnet Assistance
by Zeqin Peng, Zongbo Zheng, Shaochen Yang, Xiaotao Zhao, Xingxiao Yu and Dong Han
Actuators 2025, 14(8), 388; https://doi.org/10.3390/act14080388 - 4 Aug 2025
Viewed by 361
Abstract
Electromagnetic pneumatic microvalves, widely used in knitting machines, typically operate based on a spring-return mechanism. When the coil is energized, the electromagnetic force overcomes the spring force to attract the armature, opening the valve. Upon de-energization, the armature returns to its original position [...] Read more.
Electromagnetic pneumatic microvalves, widely used in knitting machines, typically operate based on a spring-return mechanism. When the coil is energized, the electromagnetic force overcomes the spring force to attract the armature, opening the valve. Upon de-energization, the armature returns to its original position under the restoring force of the spring, closing the valve. However, most existing electromagnetic microvalves adopt a radially asymmetric magnetic yoke design, which generates additional radial forces during operation, leading to armature misalignment or even sticking. Additionally, the inductance effect of the coil causes a significant delay in the armature release response, making it difficult to meet the knitting machine’s requirements for rapid response and high reliability. To address these issues, this paper proposes an improved electromagnetic microvalve design. First, the magnetic yoke structure is modified to be radially symmetric, eliminating unnecessary radial forces and preventing armature sticking during operation. Second, a permanent magnet assist mechanism is introduced at the armature release end to enhance release speed and reduce delays caused by the inductance effect. The effectiveness of the proposed design is validated through electromagnetic numerical simulations, and a multi-objective genetic algorithm is further employed to optimize the geometric dimensions of the electromagnet. The optimization results indicate that, while maintaining the fundamental power supply principle of conventional designs, the new microvalve structure achieves a pull-in time comparable to traditional designs during engagement but significantly reduces the release response time by approximately 80.2%, effectively preventing armature sticking due to radial forces. The findings of this study provide a feasible and efficient technical solution for the design of electromagnetic microvalves in textile machinery applications. Full article
(This article belongs to the Section Miniaturized and Micro Actuators)
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16 pages, 1767 KB  
Article
Common Food-Wrap Film as a Cost-Effective and Readily Available Alternative to Thermoplastic Polyurethane (TPU) Membranes for Microfluidic On-Chip Valves and Pumps
by Huu Anh Minh Nguyen, Mark Volosov, Jessica Maffei, Dae Jung Martins Cruz and Roman Voronov
Micromachines 2025, 16(6), 657; https://doi.org/10.3390/mi16060657 - 30 May 2025
Viewed by 3009
Abstract
Microfluidic devices rely on precise fluid control to enable complex operations in diagnostics, chemical synthesis, and biological research. Central to this control are microvalves, which regulate on-chip flow but require flexible membranes for active operation. While the laser cutting of thermoplastics offers a [...] Read more.
Microfluidic devices rely on precise fluid control to enable complex operations in diagnostics, chemical synthesis, and biological research. Central to this control are microvalves, which regulate on-chip flow but require flexible membranes for active operation. While the laser cutting of thermoplastics offers a fast, automated method for fabricating rigid microfluidic components, integrating flexible elements like valves and pumps remains a key challenge. Thermoplastic polyurethane (TPU) membranes have been adopted to address this need but are costly and difficult to procure reliably. In this study, we present commercial food-wrap film (FWF) as a low-cost, widely available alternative membrane material. We demonstrate FWF’s compatibility with laser-cut thermoplastic microfluidic devices by successfully fabricating Quake-style valves and peristaltic pumps. FWF valves maintained reliable sealing at 40 psi, maintained stable flow rates of ~1.33 μL/min during peristaltic operation, and sustained over one million continuous actuation cycles without performance degradation. Burst pressure testing confirmed robustness up to 60 psi. Additionally, FWF’s thermal resistance up to 140 °C enabled effective thermal bonding with PMMA layers, simplifying device assembly. These results establish FWF as a viable substitute for TPU membranes, offering an accessible and scalable solution for microfluidic device fabrication, particularly in resource-limited settings where TPU availability is constrained. Full article
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21 pages, 5395 KB  
Article
Air Leakages at Microvalves: Pressure Decay Measurements and Extended Continuum Modelling of Knudsen Flows
by Daniel Anheuer, Johannes Schwarz, Patrick Debera, Klaus Heinrich, Christoph Kutter and Martin Richter
Micromachines 2024, 15(10), 1263; https://doi.org/10.3390/mi15101263 - 16 Oct 2024
Viewed by 1381
Abstract
To improve the performance of valves in relation to the leakage rate, a comprehensive evaluation of the valve characteristics and behavior during pressure exposure is important. Often, these low gas flow rates below 0.1 cm3/min cannot be accurately measured with conventional [...] Read more.
To improve the performance of valves in relation to the leakage rate, a comprehensive evaluation of the valve characteristics and behavior during pressure exposure is important. Often, these low gas flow rates below 0.1 cm3/min cannot be accurately measured with conventional flow sensors. This paper presents a small and low-cost test rig for measuring gas leakage rates accurately, even far below 0.1 cm3/min, with the pressure decay method. These leakage flows are substantiated with a flow model, where we demonstrate the feasibility of modeling those gas flows with an extended Navier–Stokes framework to obtain more accurate theoretical predictions. As expected, the comparison to the experimental results proves that the classical Navier–Stokes system is unsuitable for modeling Knudsen flows. Hence, self-diffusion of gas, a wall-slip boundary condition, and an effective mean free path model were introduced in a physically evident manner. In terms of the calculated mass flow, while self-diffusion and slip boundary conditions explain deviations from the classical Navier–Stokes equation for Knudsen numbers already smaller than 1, the effective mean free path model has an effect, especially when Kn > 1. For simplified conditions, an analytical solution was presented and compared to the results of an OpenFOAM CFD-solver for flow rates through more complex gap-flow geometries of the flap valve. Hereby, acceptable deviations between 10% and 20% were observed. A comparison with measurement results was carried out. The reproducibility of the measurement method was verified by comparing multiple measurements of one silicon microvalve sample to a state-of-the-art flow sensor. Three geometrically similar passive silicon microvalves were measured with air overpressure decreasing from 15 kPa relative to atmospheric pressure. Maximum gas volume flowing in a blocking direction of 1–26 µL/min with high reproducibility and marginal noise were observed. Full article
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11 pages, 6119 KB  
Article
Euler Force-Driven Siphon Valve Control for Precise Sequential Release in Centrifugal Microfluidic Chips
by Yu Lu, Hao Shen, Guangyao Chen, Kaichao Yang, Jing Zhang, Liwei Xue, Jianzhen Ou and Liguo Chen
Micromachines 2024, 15(10), 1200; https://doi.org/10.3390/mi15101200 - 27 Sep 2024
Viewed by 1472
Abstract
Controlling the fluids in centrifugal microfluidic chips for precise sequential release is critical for multi-step reactions and immunoassays. Currently, the traditional methods of liquid sequential release mainly rely on various types of microvalves, which face the problems of complex operation and high costs. [...] Read more.
Controlling the fluids in centrifugal microfluidic chips for precise sequential release is critical for multi-step reactions and immunoassays. Currently, the traditional methods of liquid sequential release mainly rely on various types of microvalves, which face the problems of complex operation and high costs. Here, this work presents a method for driving liquid release using the Euler force. Under continuous acceleration and deceleration, the centrifugal and Euler forces can transfer the liquid from the sample chamber to the collection chamber. The liquid sequential release mechanism based on the Euler force was analyzed, which showed that the angular acceleration is key to the liquid release. Then, the geometrical parameters affecting the angular acceleration of complete release were investigated and simulated. Finally, based on the relationship between the geometrical parameters of the connecting channels and the angular acceleration of complete release, a simple and precise sequential release structure was designed, which allowed for a sequential and stable transfer of the liquid into the reaction chamber. The results showed that the proposed method is capable of transferring liquid, and its simple structure, low manufacturing cost, and ease of operation enable precise sequential liquid release in centrifugal microfluidic platforms. Full article
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42 pages, 10634 KB  
Review
Computational Fluid–Structure Interaction in Microfluidics
by Hafiz Muhammad Musharaf, Uditha Roshan, Amith Mudugamuwa, Quang Thang Trinh, Jun Zhang and Nam-Trung Nguyen
Micromachines 2024, 15(7), 897; https://doi.org/10.3390/mi15070897 - 9 Jul 2024
Cited by 8 | Viewed by 4580
Abstract
Micro elastofluidics is a transformative branch of microfluidics, leveraging the fluid–structure interaction (FSI) at the microscale to enhance the functionality and efficiency of various microdevices. This review paper elucidates the critical role of advanced computational FSI methods in the field of micro elastofluidics. [...] Read more.
Micro elastofluidics is a transformative branch of microfluidics, leveraging the fluid–structure interaction (FSI) at the microscale to enhance the functionality and efficiency of various microdevices. This review paper elucidates the critical role of advanced computational FSI methods in the field of micro elastofluidics. By focusing on the interplay between fluid mechanics and structural responses, these computational methods facilitate the intricate design and optimisation of microdevices such as microvalves, micropumps, and micromixers, which rely on the precise control of fluidic and structural dynamics. In addition, these computational tools extend to the development of biomedical devices, enabling precise particle manipulation and enhancing therapeutic outcomes in cardiovascular applications. Furthermore, this paper addresses the current challenges in computational FSI and highlights the necessity for further development of tools to tackle complex, time-dependent models under microfluidic environments and varying conditions. Our review highlights the expanding potential of FSI in micro elastofluidics, offering a roadmap for future research and development in this promising area. Full article
(This article belongs to the Special Issue Flows in Micro- and Nano-Systems)
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14 pages, 4308 KB  
Article
Experimental Study on SPR Array Sensing Chip Integrated with Microvalves
by Wanwan Chen, Peng Wang and Bin Li
Sensors 2024, 24(8), 2540; https://doi.org/10.3390/s24082540 - 15 Apr 2024
Cited by 1 | Viewed by 1270
Abstract
This paper discusses a microfluidic system designed for surface plasmon resonance (SPR) sensing, incorporating integrated microvalves. This system is built from a layered structure of polydimethylsiloxane (PDMS) and polymethylmethacrylate (PMMA). The functionality of the microvalves is verified through a conductance method involving electrodes [...] Read more.
This paper discusses a microfluidic system designed for surface plasmon resonance (SPR) sensing, incorporating integrated microvalves. This system is built from a layered structure of polydimethylsiloxane (PDMS) and polymethylmethacrylate (PMMA). The functionality of the microvalves is verified through a conductance method involving electrodes positioned at the microfluidic channels’ inlets and outlets. These microvalves can fully close at a control pressure of 0.3 MPa, with their operation depending on the duration of the applied pressure. The study further explores the coordinated operation of multiple microvalves to regulate the sequential flow of samples and reagents in the system. In SPR detection experiments, the microfluidic system is integrated with an SPR array sensing system to control the injection of NaCl solutions via the microvalves, and the observation of phase change curves in different chip regions are observed. The findings validate the microvalves’ dependability and suitability for use in SPR array sensing. Full article
(This article belongs to the Section Biosensors)
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4 pages, 392 KB  
Editorial
Microfluidic Formulation for Biomedical Applications
by Kieu The Loan Trinh
Pharmaceuticals 2023, 16(11), 1587; https://doi.org/10.3390/ph16111587 - 9 Nov 2023
Cited by 3 | Viewed by 1865
Abstract
Microfluidic technology was recognized in the 1980s when the first micropumps and micro-valves were developed to manipulate fluids for biological applications [...] Full article
(This article belongs to the Special Issue Microfluidic Formulation for Biomedical Applications)
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35 pages, 11056 KB  
Review
Recent Advances in Magnetic Polymer Composites for BioMEMS: A Review
by Zhengwei Liao, Oualid Zoumhani and Clementine M. Boutry
Materials 2023, 16(10), 3802; https://doi.org/10.3390/ma16103802 - 17 May 2023
Cited by 25 | Viewed by 6621
Abstract
The objective of this review is to investigate the potential of functionalized magnetic polymer composites for use in electromagnetic micro-electro-mechanical systems (MEMS) for biomedical applications. The properties that make magnetic polymer composites particularly interesting for application in the biomedical field are their biocompatibility, [...] Read more.
The objective of this review is to investigate the potential of functionalized magnetic polymer composites for use in electromagnetic micro-electro-mechanical systems (MEMS) for biomedical applications. The properties that make magnetic polymer composites particularly interesting for application in the biomedical field are their biocompatibility, their adjustable mechanical, chemical, and magnetic properties, as well as their manufacturing versatility, e.g., by 3D printing or by integration in cleanroom microfabrication processes, which makes them accessible for large-scale production to reach the general public. The review first examines recent advancements in magnetic polymer composites that possess unique features such as self-healing capabilities, shape-memory, and biodegradability. This analysis includes an exploration of the materials and fabrication processes involved in the production of these composites, as well as their potential applications. Subsequently, the review focuses on electromagnetic MEMS for biomedical applications (bioMEMS), including microactuators, micropumps, miniaturized drug delivery systems, microvalves, micromixers, and sensors. The analysis encompasses an examination of the materials and manufacturing processes involved and the specific fields of application for each of these biomedical MEMS devices. Finally, the review discusses missed opportunities and possible synergies in the development of next-generation composite materials and bioMEMS sensors and actuators based on magnetic polymer composites. Full article
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17 pages, 4208 KB  
Article
Fabrication of Chemofluidic Integrated Circuits by Multi-Material Printing
by Alexander Kutscher, Paula Kalenczuk, Mohammed Shahadha, Stefan Grünzner, Franziska Obst, Denise Gruner, Georgi Paschew, Anthony Beck, Steffen Howitz and Andreas Richter
Micromachines 2023, 14(3), 699; https://doi.org/10.3390/mi14030699 - 22 Mar 2023
Cited by 1 | Viewed by 2621
Abstract
Photolithographic patterning of components and integrated circuits based on active polymers for microfluidics is challenging and not always efficient on a laboratory scale using the traditional mask-based fabrication procedures. Here, we present an alternative manufacturing process based on multi-material 3D printing that can [...] Read more.
Photolithographic patterning of components and integrated circuits based on active polymers for microfluidics is challenging and not always efficient on a laboratory scale using the traditional mask-based fabrication procedures. Here, we present an alternative manufacturing process based on multi-material 3D printing that can be used to print various active polymers in microfluidic structures that act as microvalves on large-area substrates efficiently in terms of processing time and consumption of active materials with a single machine. Based on the examples of two chemofluidic valve types, hydrogel-based closing valves and PEG-based opening valves, the respective printing procedures, essential influencing variables and special features are discussed, and the components are characterized with regard to their properties and tolerances. The functionality of the concept is demonstrated by a specific chemofluidic chip which automates an analysis procedure typical of clinical chemistry and laboratory medicine. Multi-material 3D printing allows active-material devices to be produced on chip substrates with tolerances comparable to photolithography but is faster and very flexible for small quantities of up to about 50 chips. Full article
(This article belongs to the Special Issue Biomedical Microdevices: State of the Art and Trends)
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15 pages, 2855 KB  
Article
Rapid Prototyping of Multi-Functional and Biocompatible Parafilm®-Based Microfluidic Devices by Laser Ablation and Thermal Bonding
by Yuanyuan Wei, Tianle Wang, Yuye Wang, Shuwen Zeng, Yi-Ping Ho and Ho-Pui Ho
Micromachines 2023, 14(3), 656; https://doi.org/10.3390/mi14030656 - 14 Mar 2023
Cited by 13 | Viewed by 4259
Abstract
In this paper, we report a simple, rapid, low-cost, biocompatible, and detachable microfluidic chip fabrication method for customized designs based on Parafilm®. Here, Parafilm® works as both a bonding agent and a functional membrane. Its high ultimate tensile stress (3.94 [...] Read more.
In this paper, we report a simple, rapid, low-cost, biocompatible, and detachable microfluidic chip fabrication method for customized designs based on Parafilm®. Here, Parafilm® works as both a bonding agent and a functional membrane. Its high ultimate tensile stress (3.94 MPa) allows the demonstration of high-performance actuators such as microvalves and micropumps. By laser ablation and the one-step bonding of multiple layers, 3D structured microfluidic chips were successfully fabricated within 2 h. The consumption time of this method (~2 h) was 12 times less than conventional photolithography (~24 h). Moreover, the shear stress of the PMMA–Parafilm®–PMMA specimens (0.24 MPa) was 2.13 times higher than that of the PDMS–PDMS specimens (0.08 MPa), and 0.56 times higher than that of the PDMS–Glass specimens (0.16 MPa), showing better stability and reliability. In this method, multiple easily accessible materials such as polymethylmethacrylate (PMMA), PVC, and glass slides were demonstrated and well-incorporated as our substrates. Practical actuation devices that required high bonding strength including microvalves and micropumps were fabricated by this method with high performance. Moreover, the biocompatibility of the Parafilm®-based microfluidic devices was validated through a seven-day E. coli cultivation. This reported fabrication scheme will provide a versatile platform for biochemical applications and point-of-care diagnostics. Full article
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18 pages, 5716 KB  
Article
A Novel Soft Robotic Exoskeleton System for Hand Rehabilitation and Assistance Purposes
by Nikolaos Kladovasilakis, Ioannis Kostavelis, Paschalis Sideridis, Eleni Koltzi, Konstantinos Piliounis, Dimitrios Tzetzis and Dimitrios Tzovaras
Appl. Sci. 2023, 13(1), 553; https://doi.org/10.3390/app13010553 - 30 Dec 2022
Cited by 18 | Viewed by 10760
Abstract
During the last decade, soft robotic systems, such as actuators and grippers, have been employed in various commercial applications. Due to the need to integrate robotic mechanisms into devices operating alongside humans, soft robotic systems concentrate increased scientific interest in tasks with intense [...] Read more.
During the last decade, soft robotic systems, such as actuators and grippers, have been employed in various commercial applications. Due to the need to integrate robotic mechanisms into devices operating alongside humans, soft robotic systems concentrate increased scientific interest in tasks with intense human–robot interaction, especially for human-exoskeleton applications. Human exoskeletons are usually utilized for assistance and rehabilitation of patients with mobility disabilities and neurological disorders. Towards this direction, a fully functional soft robotic hand exoskeleton system was designed and developed, utilizing innovative air-pressurized soft actuators fabricated via additive manufacturing technologies. The CE-certified system consists of a control glove that copies the motion from the healthy hand and passes the fingers configuration to the exoskeleton applied on the affected hand, which consists of a soft exoskeleton glove (SEG) controlled with the assistance of one-axis flex sensors, micro-valves, and a proportional integral derivative (PID) controller. Each finger of the SEG moves independently due to the finger-dedicated motion control system. Furthermore, the real-time monitoring and control of the fabricated SEG are conducted via the developed software. In addition, the efficiency of the exoskeleton system was investigated through an experimental validation procedure with the involvement of healthy participants (control group) and patients, which evaluated the efficiency of the system, including safety, ergonomics, and comfort in its usage. Full article
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14 pages, 4770 KB  
Article
A Compact Control System to Enable Automated Operation of Microfluidic Bioanalytical Assays
by Alan M. Gonzalez-Suarez, Alexander Long, XuHai Huang and Alexander Revzin
Biosensors 2022, 12(12), 1160; https://doi.org/10.3390/bios12121160 - 13 Dec 2022
Cited by 6 | Viewed by 3886
Abstract
We describe a control system for operating valve-enabled microfluidic devices and leverage this control system to carry out a complex workflow of plasma separation from 8 μL of whole blood followed by on-chip mixing of plasma with assay reagents for biomarker detection. The [...] Read more.
We describe a control system for operating valve-enabled microfluidic devices and leverage this control system to carry out a complex workflow of plasma separation from 8 μL of whole blood followed by on-chip mixing of plasma with assay reagents for biomarker detection. The control system incorporates pumps, digital pressure sensors, a microcontroller, solenoid valves and off-the-shelf components to deliver high and low air pressure in the desired temporal sequence to meter fluid flow and actuate microvalves. Importantly, our control system is portable, which is suitable for operating the microvalve-enabled microfluidic devices in the point-of-care setting. Full article
(This article belongs to the Special Issue Advanced Microfluidic Chips and Their Applications)
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18 pages, 2822 KB  
Article
Size-Based Sorting and In Situ Clonal Expansion of Single Cells Using Microfluidics
by Huaying Chen, Haixu Meng, Zhenlin Chen, Tong Wang, Chuanpin Chen, Yonggang Zhu and Jing Jin
Biosensors 2022, 12(12), 1100; https://doi.org/10.3390/bios12121100 - 30 Nov 2022
Cited by 7 | Viewed by 3198
Abstract
Separation and clonal culture and growth kinetics analysis of target cells in a mixed population is critical for pathological research, disease diagnosis, and cell therapy. However, long-term culture with time-lapse imaging of the isolated cells for clonal analysis is still challenging. This paper [...] Read more.
Separation and clonal culture and growth kinetics analysis of target cells in a mixed population is critical for pathological research, disease diagnosis, and cell therapy. However, long-term culture with time-lapse imaging of the isolated cells for clonal analysis is still challenging. This paper reports a microfluidic device with four-level filtration channels and a pneumatic microvalve for size sorting and in situ clonal culture of single cells. The valve was on top of the filtration channels and used to direct fluid flow by membrane deformation during separation and long-term culture to avoid shear-induced cell deformation. Numerical simulations were performed to evaluate the influence of device parameters affecting the pressure drop across the filtration channels. Then, a droplet model was employed to evaluate the impact of cell viscosity, cell size, and channel width on the pressure drop inducing cell deformation. Experiments showed that filtration channels with a width of 7, 10, 13, or 17 μm successfully sorted K562 cells into four different size ranges at low driving pressure. The maximum efficiency of separating K562 cells from media and whole blood was 98.6% and 89.7%, respectively. Finally, the trapped single cells were cultured in situ for 4–7 days with time-lapse imaging to obtain the lineage trees and growth curves. Then, the time to the first division, variation of cell size before and after division, and cell fusion were investigated. This proved that cells at the G1 and G2 phases were of significantly distinct sizes. The microfluidic device for size sorting and clonal expansion will be of tremendous application potential in single-cell studies. Full article
(This article belongs to the Section Biosensor and Bioelectronic Devices)
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18 pages, 8076 KB  
Article
Wearable Bio-Inspired Pulsating-Flow Cooling for Live Garments Based on a Novel Design of Ferrofluid Micro-Valve
by Jiawei Tang and Patrick Luk
Energies 2022, 15(23), 8826; https://doi.org/10.3390/en15238826 - 23 Nov 2022
Cited by 5 | Viewed by 3035
Abstract
Temperature-related frustrations, such as heat exhaustion, heat stroke, hypothermia, and frost damage, are some of the most prevalent health risks encountered by humans. The aggravation may be lethal for individuals who reside or work in conditions of protracted and high temperature. Temperature-control technologies, [...] Read more.
Temperature-related frustrations, such as heat exhaustion, heat stroke, hypothermia, and frost damage, are some of the most prevalent health risks encountered by humans. The aggravation may be lethal for individuals who reside or work in conditions of protracted and high temperature. Temperature-control technologies, such as underfloor heating and air conditioners, have been studied and applied to give individuals with a pleasant and, more crucially, an endurable temperature. However, it may be challenging to install these technologies in an exterior or enclosed space. In addition, they are inflexible for individual requirements, such as mobility and personal-temperature management. A wearable bio-inspired pulsing-flow (discontinuous) cooling system, which can significantly enhance cooling performance, is proposed in this work. The proposed system is implemented with valves to generate pulsating flows. Given that traditional mechanical-valve actuation systems continue to face limits in terms of switching frequency, interface wear loss, and size limitations for wearable-garment applications, a ferrofluid-based shape-controllable micro-valve is proposed to reduce the size and weight of the cooling system. An empirical approach is adopted to avoid the extensive computational simulation of the thermo fluidic dynamics involved, so that efforts can be focused on the design of an innovative scaled prototype built from ferrofluid valves positioned in a specific array of the cooling tubes. This allows the performance of continuous and pulsating cooling-flow systems to be compared on the same flow rate baseline. The results demonstrate that the proposed technology not only delivers superior cooling efficiency, but also has the potential to provide individualized temperature regulation in a “live” garment. Full article
(This article belongs to the Special Issue Advanced Thermal Management and Cooling Technologies)
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19 pages, 2738 KB  
Article
Theoretical and Experimental Studies of a PDMS Pneumatic Microactuator for Microfluidic Systems
by Xuling Liu, Huafeng Song, Wensi Zuo, Guoyong Ye, Shaobo Jin, Liangwen Wang and Songjing Li
Energies 2022, 15(22), 8731; https://doi.org/10.3390/en15228731 - 20 Nov 2022
Cited by 3 | Viewed by 2175
Abstract
The compact, simple, and fast-reaction pneumatic microactuator is significant for the integration and high efficiency of pneumatic systems. In this work, the structure, working principle, and multiphysical model of an on-chip pneumatic microactuator are presented. The on-chip pneumatic microactuator is mainly composed of [...] Read more.
The compact, simple, and fast-reaction pneumatic microactuator is significant for the integration and high efficiency of pneumatic systems. In this work, the structure, working principle, and multiphysical model of an on-chip pneumatic microactuator are presented. The on-chip pneumatic microactuator is mainly composed of two parts: a polydimethylsiloxane (PDMS) thin membrane and an actuated chamber. The air pressure in the actuated chamber drives the thin elastic membrane to deformation. Dynamic response mathematical models of the actuated chamber for charging and exhaust with variable volume are established, and the deformation characteristics of the polydimethylsiloxane (PDMS) actuated membrane, the capacity of the actuated chamber, and the valve opening of the on-off membrane microvalve are simulated and analyzed to explore the response characteristics of the proposed pneumatic microactuator. Samples valving analysis of the on-chip membrane microvalve and mixing performance of the micromixer integrated with the pneumatic microactuator are tested to evaluate the driving capability of the pneumatic microactuator, and the results show that the response performance of the actuated time fully satisfies the needs of a pneumatic microfluidic chip for most applications. Full article
(This article belongs to the Special Issue New Insights of Intelligent and Integrated Fluid Power Systems)
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