Micromachines

7 pages, 1470 KiB

Open AccessArticle

Femtosecond Laser Direct Writing of Optical Overpass

by Xiaochuan Ding, Yao Zhao, Ali Hassan, Yunlu Sun, Zhishan Hou, Wei Xue and Yu Cao

Micromachines 2022, 13(7), 1158; https://doi.org/10.3390/mi13071158 - 21 Jul 2022

Cited by 2 | Viewed by 2068

With the rapid increase in information density, problems such as signal crosstalk and crossover restrict the further expansion of chip integration levels and packaging density. Based on this, a novel waveguide structure—photonic jumper wire—is proposed here to break through the technical restrictions in [...] Read more.

With the rapid increase in information density, problems such as signal crosstalk and crossover restrict the further expansion of chip integration levels and packaging density. Based on this, a novel waveguide structure—photonic jumper wire—is proposed here to break through the technical restrictions in waveguide crossing and parallel line wrapping, which hinder the integration of photonic chips. Furthermore, we fabricated the optical overpass to realize a more complex on-chip optical cross-connection. Our method and structure promote a series of practical schemes for improving optical chip integration. Full article

(This article belongs to the Special Issue Advanced (Citius, Minor, Simplicius) Laser Fabrication Technologies for Cross-Field Applications)

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11 pages, 3628 KiB

Open AccessArticle

An AlGaN/GaN Lateral Bidirectional Current-Regulating Diode with Two Symmetrical Hybrid Ohmic-Schottky Structures

by Yijun Shi, Zongqi Cai, Yun Huang, Zhiyuan He, Yiqiang Chen, Liye Cheng and Guoguang Lu

Micromachines 2022, 13(7), 1157; https://doi.org/10.3390/mi13071157 - 21 Jul 2022

Viewed by 1472

Abstract

Bidirectional current-regulating ability is needed for AC light emitting diode (LED) drivers. In previous studies, various rectifier circuits have been used to provide constant bidirectional current. However, the usage of multiple electronic components can lead to additional costs and power consumption. In this [...] Read more.

Bidirectional current-regulating ability is needed for AC light emitting diode (LED) drivers. In previous studies, various rectifier circuits have been used to provide constant bidirectional current. However, the usage of multiple electronic components can lead to additional costs and power consumption. In this work, a novel AlGaN/GaN lateral bidirectional current-regulating diode (B-CRD) featuring two symmetrical hybrid-trench electrodes is proposed and demonstrated by TCAD Sentaurus (California USA) from Synopsys corporation. Through shortly connecting the Ohmic contact and trench Schottky contact, the unidirectional invariant current can be obtained even with the applied voltage spanning a large range of 0–200 V. Furthermore, with the combination of two symmetrical hybrid-trench electrodes at each side of the device, the proposed B-CRD can deliver an excellent steady current in different directions. Through the TCAD simulation results, it was found that the device’s critical characteristics (namely knee voltage and current density) can be flexibly modulated by tailoring the depth and length of the trench Schottky contact. Meanwhile, it was also demonstrated through the device/circuit mixed-mode simulation that the proposed B-CRD can respond to the change in voltage in a few nanoseconds. Such a new functionality combined with excellent performance may make the proposed B-CRD attractive in some special fields where the bidirectional current-limiting function is needed. Full article

(This article belongs to the Special Issue Wide Bandgap Based Devices: Design, Fabrication and Applications, Volume III)

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13 pages, 5053 KiB

Open AccessArticle

Study on the Formation Mechanism of Cutting Dead Metal Zone for Turning AISI4340 with Different Chamfering Tools

by Shujing Wu, Dazhong Wang, Jiajia Zhang and Alexey B. Nadykto

Micromachines 2022, 13(7), 1156; https://doi.org/10.3390/mi13071156 - 21 Jul 2022

Cited by 3 | Viewed by 1882

Abstract

Tools with chamfered edges are often used in high speed machining of hard materials because they provide compelling cutting toughness and reduced tool wear. Chamfered tools are also responsible for the dead metal zone (DMZ). Through numerical simulation of orthogonal cutting with AISI [...] Read more.

Tools with chamfered edges are often used in high speed machining of hard materials because they provide compelling cutting toughness and reduced tool wear. Chamfered tools are also responsible for the dead metal zone (DMZ). Through numerical simulation of orthogonal cutting with AISI 4340 steel, this paper examines the mechanism of the DMZ, the cutting speed, the impacts of the chamfer angle, and the coefficient of friction on the generation of the DMZ. The analysis is based upon the Arbitrary Lagrangian-Eulerian (ALE) finite element method (FEM) for the continuous process of chip formation. The different chamfered angles, cutting speeds, and friction coefficient conditions are utilized in the simulation. The research demonstrates that a zone of trapped material called DMZ has been formed beneath the chamfer and serves as an effective cutting edge of the tool. Additionally, the dead metal zone DMZ becomes smaller while the cutting speed increases or the friction coefficient decreases. The machining forces rise with increasing chamfer angles, rise with increasing friction coefficients, and fall with increasing cutting speed in both the cutting and thrust directions. In this paper, the effect of different chamfering tools on AISI 4340 steel using carbide tools in the simulation environment is studied. It has certain reference significance for studying the formation mechanism of the dead zone of difficult-to-machine materials such as AISI4340 and improving the processing efficiency and workpiece surface quality. Full article

(This article belongs to the Special Issue Advances in Micro-Milling)

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11 pages, 1972 KiB

Open AccessArticle

Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

by Desheng Zeng, Qiang Liu, Chenyang Mei, Hongwei Li, Qingzhong Huang and Xinliang Zhang

Micromachines 2022, 13(7), 1155; https://doi.org/10.3390/mi13071155 - 21 Jul 2022

Cited by 8 | Viewed by 3636

Abstract

A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × [...] Read more.

A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10⁶, with a waveguide loss of approximately 0.28 dB/cm. For a resonator with 1.5-μm-wide waveguides, the average Q-factor reaches 1.20 × 10⁶, and the waveguide loss is 0.27 dB/cm. Moreover, we theoretically and experimentally show that a reduction in the waveguide loss significantly improves the conversion efficiency of four-wave mixing. A high four-wave mixing conversion efficiency of −17.0 dB is achieved at a pump power of 6.50 dBm. Full article

(This article belongs to the Special Issue Photonic Chips for Optical Communications)

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20 pages, 8380 KiB

Open AccessArticle

Cooperativity Model for Improving the Walking-Assistance Efficiency of the Exoskeleton

by Jianfeng Ma, Decheng Sun, Yongqing Ding, Daihe Luo and Xiao Chen

Micromachines 2022, 13(7), 1154; https://doi.org/10.3390/mi13071154 - 21 Jul 2022

Cited by 1 | Viewed by 1583

Abstract

(1) Background: To enhance the walking-assistance efficiencies of exoskeletons, this paper proposed the biomechanical-based cooperativity model based on a passive exoskeleton prototype to fill the technical gap in exoskeleton design regarding the torque transmission law between humans and exoskeletons. (2) Methods: The cooperativity [...] Read more.

(1) Background: To enhance the walking-assistance efficiencies of exoskeletons, this paper proposed the biomechanical-based cooperativity model based on a passive exoskeleton prototype to fill the technical gap in exoskeleton design regarding the torque transmission law between humans and exoskeletons. (2) Methods: The cooperativity model was used to solve the key system parameters based on the minimum average dispersion degree, in which the average dispersion degree algorithm based on the joint angle was designed and applied. (3) Results: The influence of the cooperativity model on the exoskeleton was indicated by comparing the walking-assistance efficiencies of the exoskeletons with the same structure but with different elastic parameters of the energy storage components, in which the exoskeleton based on the cooperativity design exhibited the highest walking-assistance performance. The walking-assistance efficiency of the exoskeleton with the optimal parameter combinations was also tested by comparing the respiratory metabolisms with and without the exoskeleton, in which the exoskeleton provided the average walking-assistance efficiency of 14.45% for more than 80% of the subjects. (4) Conclusions: The effects of the cooperativity model on exoskeletons were proven, but the accuracy and efficiency of the model still have room for improvement, especially the accuracy of the offset principle. Full article

(This article belongs to the Special Issue Recent Advance in Medical and Rehabilitation Robots)

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14 pages, 3754 KiB

Open AccessArticle

A Direct-Reading MEMS Conductivity Sensor with a Parallel-Symmetric Four-Electrode Configuration

by Zhiwei Liao, Junmin Jing, Rui Gao, Yuzhen Guo, Bin Yao, Huiyu Zhang, Zhou Zhao, Wenjun Zhang, Yonghua Wang, Zengxing Zhang and Chenyang Xue

Micromachines 2022, 13(7), 1153; https://doi.org/10.3390/mi13071153 - 21 Jul 2022

Cited by 8 | Viewed by 2584

Abstract

This work proposes a design for a direct-reading conductivity sensor with a parallel symmetrical four-electrode structure, which integrates a silicon-based platinum thin-film strip electrode and a serpentine temperature compensation electrode. The optimal structural parameters of the electrode were determined by finite element simulations [...] Read more.

This work proposes a design for a direct-reading conductivity sensor with a parallel symmetrical four-electrode structure, which integrates a silicon-based platinum thin-film strip electrode and a serpentine temperature compensation electrode. The optimal structural parameters of the electrode were determined by finite element simulations performed via COMSOL Multiphysics. Next, the designed conductivity sensor chip was fabricated using MEMS technology, and subsequently, the conductivity measurement circuit was designed to test the fabricated sensor’s performance. In laboratory tests, the optimal AC excitation frequency was observed to be 1.067 kHz, while the maximum measurement range was 0–107.41 mS/cm and the measurement precision in low concentration range (0–76.422 mS/cm) was ±0.1 mS/cm. Furthermore, the maximum measurement error of the sensor evaluated using the National Center of Ocean Standards and Metrology was ±0.073 mS/cm. The designed sensor possesses the characteristics of high accuracy, high range, and miniaturization, and enables real-time reading of conductivity value and temperature compensation, which is of great significance for the on-site observation of the physical parameters of marine environment. Full article

(This article belongs to the Special Issue Flexible and Wearable Sensors)

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1 pages, 151 KiB

Open AccessCorrection

Correction: Lai et al. Sensitivity Enhancement of Group Refractive Index Biosensor through Ring-Down Interferograms of Microring Resonator. Micromachines 2022, 13, 922

by Hsuan Lai, Tzu-Ning Kuo, Jia-Yi Xu, Shih-Hsiang Hsu and Yi-Cheng Hsu

Micromachines 2022, 13(7), 1152; https://doi.org/10.3390/mi13071152 - 21 Jul 2022

Cited by 1 | Viewed by 984

Abstract

In the original publication [...] Full article

(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)

2 pages, 164 KiB

Open AccessEditorial

Editorial for the Special Issue on Heat and Mass Transfer in Micro/Nanosystems

by Ruijin Wang and Junfeng Zhang

Micromachines 2022, 13(7), 1151; https://doi.org/10.3390/mi13071151 - 21 Jul 2022

Viewed by 1590

Abstract

The miniaturization of components in mechanical and electronic equipment has been the driving force for the fast development of micro/nanosystems [...] Full article

(This article belongs to the Special Issue Advances in Heat and Mass Transfer in Micro/Nano Systems)

12 pages, 3481 KiB

Open AccessArticle

High Sensitivity and Wide Range Biomimetic Tactile-Pressure Sensor Based on 2D Graphene Film and 3D Graphene Foam

by Baolin Sha, Xiaozhou Lü and La Jiang

Micromachines 2022, 13(7), 1150; https://doi.org/10.3390/mi13071150 - 21 Jul 2022

Cited by 4 | Viewed by 2277

Abstract

Bionic electronic skin is a system that simulates human skin and has multiple perceptions. For pressure sensors, high measurement accuracy and wide measurement range restrict each other, and it is difficult to achieve high measurement accuracy and wide measurement range simultaneously. Therefore, the [...] Read more.

Bionic electronic skin is a system that simulates human skin and has multiple perceptions. For pressure sensors, high measurement accuracy and wide measurement range restrict each other, and it is difficult to achieve high measurement accuracy and wide measurement range simultaneously. Therefore, the research and application of bionic tactile-pressure sensors are limited due to the mutual constraints of measurement accuracy and range. In this work, a flexible graphene piezoresistive tactile sensor based on a biomimetic structure that utilizes the piezoresistive properties of graphene was reported. The novel tactile-pressure sensor consists of a 2D graphene film tactile sensor and a 3D graphene foam pressure sensor that could achieve high accuracy and a wide-range measurement simultaneously. The testing results show that the measurement range of this sensor was in two intervals of 0–2 N and 2–40 N. For the 0–2 N measurement range, the sensitivity was 472.2 Ω/kPa, the force resolution was 0.01 N, and the response time was less than 40 ms. For the 2–40 N measurement range, the sensitivity was 5.05 kΩ/kPa, the force resolution was 1 N, and the response time was less than 20 ms. The new sensor can realize high-precision and large-scale force measurements and shows great application value in the field of medical instruments and artificial limbs. Full article

(This article belongs to the Special Issue Flexible and Wearable Sensors)

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24 pages, 11164 KiB

Open AccessArticle

Equilibrium Conformation of a Novel Cable-Driven Snake-Arm Robot under External Loads

by Long Huang, Bei Liu, Leiyu Zhang and Lairong Yin

Micromachines 2022, 13(7), 1149; https://doi.org/10.3390/mi13071149 - 20 Jul 2022

Cited by 3 | Viewed by 2461

Abstract

Based on the anti-parallelogram mechanism, an approximate cylindrical rolling joint is proposed to develop a novel cable-driven snake-arm robot with multiple degrees of freedom (DOF). Furthermore, the kinematics of the cable-driven snake-arm robot are established, and the mapping between actuator space and joint [...] Read more.

Based on the anti-parallelogram mechanism, an approximate cylindrical rolling joint is proposed to develop a novel cable-driven snake-arm robot with multiple degrees of freedom (DOF). Furthermore, the kinematics of the cable-driven snake-arm robot are established, and the mapping between actuator space and joint space is simplified by bending decoupling motion in the multiple segments. The workspace and bending configurations of the robot are obtained. The static model is established by the principle of minimum potential energy. Furthermore, the simplified cable constraints in the static model are proposed through Taylor expansion, which facilitates the equilibrium conformation analysis of the robot under different external forces. The cable-driven snake-arm robot prototype is developed to verify the feasibility of the robot design and the availability of the static model through the experiments of the free bending motion and the external load on the robot. Full article

(This article belongs to the Special Issue Recent Advance in Medical and Rehabilitation Robots)

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19 pages, 2362 KiB

Open AccessReview

Recent Progress and Challenges Regarding Carbon Nanotube On-Chip Interconnects

by Baohui Xu, Rongmei Chen, Jiuren Zhou and Jie Liang

Micromachines 2022, 13(7), 1148; https://doi.org/10.3390/mi13071148 - 20 Jul 2022

Cited by 18 | Viewed by 3547

Abstract

Along with deep scaling transistors and complex electronics information exchange networks, very-large-scale-integrated (VLSI) circuits require high performance and ultra-low power consumption. In order to meet the demand of data-abundant workloads and their energy efficiency, improving only the transistor performance would not be sufficient. [...] Read more.

Along with deep scaling transistors and complex electronics information exchange networks, very-large-scale-integrated (VLSI) circuits require high performance and ultra-low power consumption. In order to meet the demand of data-abundant workloads and their energy efficiency, improving only the transistor performance would not be sufficient. Super high-speed microprocessors are useless if the capacity of the data lines is not increased accordingly. Meanwhile, traditional on-chip copper interconnects reach their physical limitation of resistivity and reliability and may no longer be able to keep pace with a processor’s data throughput. As one of the potential alternatives, carbon nanotubes (CNTs) have attracted important attention to become the future emerging on-chip interconnects with possible explorations of new development directions. In this paper, we focus on the electrical, thermal, and process compatibility issues of current on-chip interconnects. We review the advantages, recent developments, and dilemmas of CNT-based interconnects from the perspective of different interconnect lengths and through-silicon-via (TSV) applications. Full article

(This article belongs to the Special Issue Advanced Interconnect and Packaging)

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14 pages, 5153 KiB

Open AccessArticle

Fabrication and Electrical Characterization of High Aspect Ratio Through-Silicon Vias with Polyimide Liner for 3D Integration

by Xuyan Chen, Zhiming Chen, Lei Xiao, Yigang Hao, Han Wang, Yingtao Ding and Ziyue Zhang

Micromachines 2022, 13(7), 1147; https://doi.org/10.3390/mi13071147 - 20 Jul 2022

Cited by 10 | Viewed by 2962

Abstract

High aspect ratio (HAR) through-silicon vias (TSVs) are in urgent need to achieve smaller keep-out zones (KOZs) and higher integration density for the miniaturization of high-performance three-dimensional (3D) integration of integrated circuits (IC), micro-electro-mechanical systems (MEMS), and other devices. In this study, HAR [...] Read more.

High aspect ratio (HAR) through-silicon vias (TSVs) are in urgent need to achieve smaller keep-out zones (KOZs) and higher integration density for the miniaturization of high-performance three-dimensional (3D) integration of integrated circuits (IC), micro-electro-mechanical systems (MEMS), and other devices. In this study, HAR TSVs with a diameter of 11 μm and an aspect ratio of 10:1 are successfully fabricated in a low-cost process flow. Conformal polyimide (PI) liners are deposited using a vacuum-assisted spin coating technique, and the effects of spin coating time and speed on the deposition results are discussed. Then, continuous Cu seed layers are fabricated by sequential sputtering and ultrasound-assisted electroless plating. Additionally, void-free and seamless Cu conductors are formed by electroplating. Moreover, a semi-additive method is used to fabricate the redistribution layers (RDLs) on the insulating layers of photosensitive PI (PSPI). Notably, a plasma bombardment process is introduced to remove residual PSPI in the contact windows between RDLs and central pillars. Results show that the resistance of a single TSV from a daisy chain of 144 TSVs with density of 2000/mm² is about 28 mΩ. Additionally, the S-parameters of a single TSV are obtained using L-2L de-embedding technology, and the experimental and simulated results agree well. The proposed low-cost fabrication technologies and the related electrical characterization of PI-TSVs are significant for the application of HAR TSVs in modern heterogeneous integration systems. Full article

(This article belongs to the Special Issue CMOS-MEMS Fabrication Technologies and Devices)

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14 pages, 6020 KiB

Open AccessArticle

Droplet Microfluidic Device for Chemoenzymatic Sensing

by Anton S. Yakimov, Ivan A. Denisov, Anton S. Bukatin, Kirill A. Lukyanenko, Kirill I. Belousov, Igor V. Kukhtevich, Elena N. Esimbekova, Anatoly A. Evstrapov and Peter I. Belobrov

Micromachines 2022, 13(7), 1146; https://doi.org/10.3390/mi13071146 - 20 Jul 2022

Cited by 4 | Viewed by 2977

Abstract

The rapid detection of pollutants in water can be performed with enzymatic probes, the catalytic light-emitting activity of which decreases in the presence of many types of pollutants. Herein, we present a microfluidic system for continuous chemoenzymatic biosensing that generates emulsion droplets containing [...] Read more.

The rapid detection of pollutants in water can be performed with enzymatic probes, the catalytic light-emitting activity of which decreases in the presence of many types of pollutants. Herein, we present a microfluidic system for continuous chemoenzymatic biosensing that generates emulsion droplets containing two enzymes of the bacterial bioluminescent system (luciferase and NAD(P)H:FMN–oxidoreductase) with substrates required for the reaction. The developed chip generates “water-in-oil” emulsion droplets with a volume of 0.1

μ

L and a frequency of up to 12 drops per minute as well as provides the efficient mixing of reagents in droplets and their distancing. The bioluminescent signal from each individual droplet was measured by a photomultiplier tube with a signal-to-noise ratio of up to 3000/1. The intensity of the luminescence depended on the concentration of the copper sulfate with the limit of its detection of 5

μ

M. It was shown that bioluminescent enzymatic reactions could be carried out in droplet reactors in dispersed streams. The parameters and limitations required for the bioluminescent reaction to proceed were also studied. Hereby, chemoenzymatic sensing capabilities powered by a droplet microfluidics manipulation technique may serve as the basis for early-warning online water pollution systems. Full article

(This article belongs to the Special Issue Digital Microfluidics for Liquid Handling and Biochemical Analysis)

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10 pages, 8561 KiB

Open AccessFeature PaperEditor’s ChoiceArticle

Toward Higher Integration Density in Femtosecond-Laser-Written Programmable Photonic Circuits

by Riccardo Albiero, Ciro Pentangelo, Marco Gardina, Simone Atzeni, Francesco Ceccarelli and Roberto Osellame

Micromachines 2022, 13(7), 1145; https://doi.org/10.3390/mi13071145 - 19 Jul 2022

Cited by 6 | Viewed by 2677

Abstract

Programmability in femtosecond-laser-written integrated circuits is commonly achieved with the implementation of thermal phase shifters. Recent work has shown how such phase shifters display significantly reduced power dissipation and thermal crosstalk with the implementation of thermal isolation structures. However, the aforementioned phase shifter [...] Read more.

Programmability in femtosecond-laser-written integrated circuits is commonly achieved with the implementation of thermal phase shifters. Recent work has shown how such phase shifters display significantly reduced power dissipation and thermal crosstalk with the implementation of thermal isolation structures. However, the aforementioned phase shifter technology is based on a single gold film, which poses severe limitations on integration density and circuit complexity due to intrinsic geometrical constraints. To increase the compactness, we propose two improvements to this technology. Firstly, we fabricated thermal phase shifters with a photolithography process based on two different metal films, namely (1) chromium for microheaters and (2) copper for contact pads and interconnections. Secondly, we developed a novel curved isolation trench design that, along with a state-of-the-art curvature radius, allows for a significant reduction in the optical length of integrated circuits. As a result, curved Cr-Cu phase shifters provide a compact footprint with low parasitic series resistance and no significant increase in power dissipation (∼38 mW) and thermal crosstalk (∼20%). These results pave the way toward the fabrication of femtosecond-laser-written photonic circuits with a steep increase in terms of layout complexity. Full article

(This article belongs to the Special Issue Programmable Integrated Photonic Devices: Design, Fabrication and Applications)

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9 pages, 3304 KiB

Open AccessFeature PaperEditor’s ChoiceCommunication

Enzymatic and Cellular Degradation of Carbon-Based Biconcave Nanodisks

by Zhiyong Wei, Qingxin Mu, Hui Wang, Guanyou Lin and Miqin Zhang

Micromachines 2022, 13(7), 1144; https://doi.org/10.3390/mi13071144 - 19 Jul 2022

Cited by 1 | Viewed by 1745

Abstract

The assessment of the biodegradability of nanomaterials is of pragmatic importance for understanding the interactions between nanomaterials and biological systems and for the determination of ultimate fate of these materials as well as their potential use. We recently developed carbon-based biconcave nanodisks (CBBNs) [...] Read more.

The assessment of the biodegradability of nanomaterials is of pragmatic importance for understanding the interactions between nanomaterials and biological systems and for the determination of ultimate fate of these materials as well as their potential use. We recently developed carbon-based biconcave nanodisks (CBBNs) serving as a versatile nanocarrier for enhanced accumulation in tumors and combined photothermal-chemotherapy. Here, we investigate both the enzymatic and cellular degradation of CBBNs by monitoring their cellular response with electron microscopy, near-infrared absorbance spectroscopy, and cell viability and oxidative stress assessments. Our results show that CBBNs underwent significant degradation in solutions catalyzed by horseradish peroxidase (HRP) and hydrogen peroxide (H₂O₂), or in the presence of macrophage cells. The ability of CBBNs to be degraded in biological systems provides suitability for their future biomedical applications. Full article

(This article belongs to the Special Issue Nanoparticles in Biomedical Sciences)

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11 pages, 1488 KiB

Open AccessArticle

Using Algorithmic Transformations and Sensitivity Analysis to Unleash Approximations in CNNs at the Edge

by Flavio Ponzina, Giovanni Ansaloni, Miguel Peón-Quirós and David Atienza

Micromachines 2022, 13(7), 1143; https://doi.org/10.3390/mi13071143 - 19 Jul 2022

Cited by 1 | Viewed by 1418

Abstract

Previous studies have demonstrated that, up to a certain degree, Convolutional Neural Networks (CNNs) can tolerate arithmetic approximations. Nonetheless, perturbations must be applied judiciously, to constrain their impact on accuracy. This is a challenging task, since the implementation of inexact operators is often [...] Read more.

Previous studies have demonstrated that, up to a certain degree, Convolutional Neural Networks (CNNs) can tolerate arithmetic approximations. Nonetheless, perturbations must be applied judiciously, to constrain their impact on accuracy. This is a challenging task, since the implementation of inexact operators is often decided at design time, when the application and its robustness profile are unknown, posing the risk of over-constraining or over-provisioning the hardware. Bridging this gap, we propose a two-phase strategy. Our framework first optimizes the target CNN model, reducing the bitwidth of weights and activations and enhancing error resiliency, so that inexact operations can be performed as frequently as possible. Then, it selectively assigns CNN layers to exact or inexact hardware based on a sensitivity metric. Our results show that, within a 5% accuracy degradation, our methodology, including a highly inexact multiplier design, can reduce the cost of MAC operations in CNN inference up to 83.6% compared to state-of-the-art optimized exact implementations. Full article

(This article belongs to the Special Issue Hardware-Friendly Machine Learning and Its Applications)

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15 pages, 6849 KiB

Open AccessArticle

Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

by Rui Gao, Wenjun Zhang, Junmin Jing, Zhiwei Liao, Zhou Zhao, Bin Yao, Huiyu Zhang, Yuzhen Guo, Yanbo Xu, Yonghua Wang, Zengxing Zhang, Zhidong Zhang and Chenyang Xue

Micromachines 2022, 13(7), 1142; https://doi.org/10.3390/mi13071142 - 19 Jul 2022

Cited by 8 | Viewed by 3230

Abstract

Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported [...] Read more.

Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To address these issues, this paper proposes a design method for a MEMS piezoresistive pressure sensor, and the fabricated sensor is evaluated in a series of systematic dynamic environmental adaptability tests. After testing, the output sensitivity of the sensor chip was 9.21 mV∙bar⁻¹, while the nonlinearity was 0.069% FSS. The sensor overreacts to rapidly changing pressure environments and can withstand acceleration shocks of up to 20× g. In addition, the sensor is capable of providing normal output over the vibration frequency range of 0–5000 Hz with a temperature coefficient sensitivity of −0.30% FSS °C⁻¹ over the temperature range of 0–80 °C. Our proposed sensor can play a key role in applications with wide pressure ranges, high-frequency vibrations, and high acceleration shocks, as well as guide MEMS-based pressure sensors in high pressure ranges and complex environmental adaptability in their design. Full article

(This article belongs to the Special Issue Flexible and Wearable Sensors)

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14 pages, 8470 KiB

Open AccessArticle

Preparation of Micro-Pit-Textured PCD Tools and Micro-Turning Experiment on SiCp/Al Composites

by Xu Wang, Valentin L. Popov, Zhanjiang Yu, Yiquan Li, Jinkai Xu, Qiang Li and Huadong Yu

Micromachines 2022, 13(7), 1141; https://doi.org/10.3390/mi13071141 - 19 Jul 2022

Cited by 7 | Viewed by 1944

Abstract

Serious tool wear occurs very often during machining due to the reinforcing phases in the workpiece. In this study, micro-pit-textures were prepared on the surfaces of PCD tools with a nanosecond laser to improve their cutting performance on SiCp/Al composites. The micro-pits were [...] Read more.

Serious tool wear occurs very often during machining due to the reinforcing phases in the workpiece. In this study, micro-pit-textures were prepared on the surfaces of PCD tools with a nanosecond laser to improve their cutting performance on SiCp/Al composites. The micro-pits were designed with rounded corners to improve the chip flow. The location and size of the texture were determined by analyzing the tool-chip contact area of the non-textured tool. The cutting performance of these textured PCD tools was investigated through orthogonal cutting experiments. It was found that the optimal cutting performance of the textured tools was achieved with the proper distance of the texture from the main cutting edge (35 μm) and the pit spacing (60 μm), aa a result of which the main cutting force reduced by about 14%, and the tool wear and surface adhesion significantly reduced. This texture was then applied in the micro-turning experiments of the PCD tool on the SiCp/Al composites. The cutting force in this experiment reduced by 22%, and the textured tool provided better chip transfer and tool anti-tipping. In this study, the role of SiC particles as a third body between the tool and the chip surface is discussed. Full article

(This article belongs to the Special Issue Micro-Manufacturing and Applications, Volume III: Advanced Hybrid Processes in Micro-Manufacturing)

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11 pages, 2135 KiB

Open AccessArticle

Enhanced Deep Ultraviolet Photoresponse in Ga doped ZnMgO Thin Film

by Mao Ye, Dongbo Wang, Shujie Jiao and Lang Chen

Micromachines 2022, 13(7), 1140; https://doi.org/10.3390/mi13071140 - 19 Jul 2022

Cited by 2 | Viewed by 1587

Abstract

High Mg content (60%) ZnMgO samples with and without Ga dope were grown by an RF magnetron sputtering system. The effect of Ga dope on the ZnMgO sample and the respective ultraviolet photodetectors (UVPD) device’s performance were carefully studied by various experimental methods. [...] Read more.

High Mg content (60%) ZnMgO samples with and without Ga dope were grown by an RF magnetron sputtering system. The effect of Ga dope on the ZnMgO sample and the respective ultraviolet photodetectors (UVPD) device’s performance were carefully studied by various experimental methods. The investigations of the structure and optical properties of the ZnMgO sample established that the Ga doped sample has a better crystal quality and larger band gap (5.54 eV). The current-voltage characteristics indicate that both the photocurrent and dark current were enhanced after Ga dope. Under 12 V bias, the undoped UVPD show two spectral response peaks at 244 nm and 271 nm with a responsivity of 1.9 A/W and 0.38 A/W, respectively. While the Ga doped UVPD showed only one response peak at 241 nm and the deep UV responsibility up to 8.9 A/W;, as the bias increased from 12 V to 60 V, the responsiveness raised to 52 A/W, with a signal to noise ratio (241 nm/700 nm) as high as 10⁵. Combining the results of XRD, PL spectrum and XPS, the enhanced ultraviolet photoresponse of the Ga dope device contributed to improving the crystal quality and “dopant-defect pairing effect” caused by Ga doping, which led to a considerable reduction in the number of ionized impurities in the scatting centers, and enhanced the carrier’s mobility. Our work demonstrates that even a high Mg content ZnMgO can exhibit enhanced UV performance after a Ga dope due to the dopant-defect pairing effect, which confirmed the advantage of the use of ZnMgO in the deep-UV region. Full article

(This article belongs to the Special Issue Emerging Technologies in Wide-Bandgap Semiconductor Devices)

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8 pages, 1931 KiB

Open AccessArticle

Impact of Stacking-Up and Scaling-Down Bit Cells in 3D NAND on Their Threshold Voltages

by Dongwoo Lee and Changhwan Shin

Micromachines 2022, 13(7), 1139; https://doi.org/10.3390/mi13071139 - 18 Jul 2022

Cited by 3 | Viewed by 3200

Abstract

Over the past few decades, NAND flash memory has advanced with exponentially-increasing bit growth. As bit cells in 3D NAND flash memory are stacked up and scaled down together, some potential challenges should be investigated. In order to reasonably predict those challenges, a [...] Read more.

Over the past few decades, NAND flash memory has advanced with exponentially-increasing bit growth. As bit cells in 3D NAND flash memory are stacked up and scaled down together, some potential challenges should be investigated. In order to reasonably predict those challenges, a TCAD (technology computer-aided design) simulation for 3D NAND structure in mass production has been run. By aggressively stacking-up and scaling-down bit cells in a string, the structure of channel hole was varied from a macaroni to nanowire. This causes the threshold voltage difference (ΔV_th) between the top cell and bottom cell in the same string. In detail, ΔV_th between the top cell and bottom cell mostly depends on the xy-scaling, but the way how ΔV_th is affected is not very dependent on the stack height. Full article

(This article belongs to the Section D1: Semiconductor Devices)

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13 pages, 1989 KiB

Open AccessArticle

A Method for Broadband Polyimide Permittivity Measurement of Silicon Interposer Applied for High Speed Digital Microsystem

by Zhuoyue Zheng, Yongkun Wang, Lei Han, Daowei Wu, Defeng Mo and Wenchao Tian

Micromachines 2022, 13(7), 1138; https://doi.org/10.3390/mi13071138 - 18 Jul 2022

Cited by 1 | Viewed by 1854

Abstract

High-speed digital microsystems has emerged as one of the most important solutions for improving system performance, bandwidth, and power consumption. Based on mature micro-system processing technology, a material extraction approach for silicon interposer applied for high-speed digital microsystems was presented in order to [...] Read more.

High-speed digital microsystems has emerged as one of the most important solutions for improving system performance, bandwidth, and power consumption. Based on mature micro-system processing technology, a material extraction approach for silicon interposer applied for high-speed digital microsystems was presented in order to obtain frequency-dependent precise material parameters. By combining microwave theory and mathematical model of iterative algorithm, the dielectric constant (Dk) and the dissipation factor (Df) of polyimide dielectric layer is acquired, which minimizes testing costs and streamlines testing process. The method is based on two-port transmission/reflection measurements. Vector Network Analyzer (VNA) is used to extract the scattering parameters with an extraction range of 1 MHz to 10 GHz. The algorithm is programmed using MATLAB. The observed Dk values at 2 GHz, 6 GHz, 8 GHz, and 10 GHz are, respectively, 3.22, 3.04, 2.96, 3.03, and 2.91, while the corresponding Df values are 0.021, 0.025, 0.026, 0.026, and 0.024. Finally, the complex permittivity derived is simulated and analyzed using Ansys HFSS. The results verify the validity of the theoretical method and proves that the values of the complex permittivity obtained by the method in this paper are reliable. Full article

(This article belongs to the Special Issue Advanced Packaging for Microsystem Applications)

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16 pages, 4018 KiB

Open AccessReview

Cashew Gum: A Review of Brazilian Patents and Pharmaceutical Applications with a Special Focus on Nanoparticles

by Ricardo G. Amaral, Lucas R. Melo de Andrade, Luciana N. Andrade, Kahynna C. Loureiro, Eliana B. Souto and Patrícia Severino

Micromachines 2022, 13(7), 1137; https://doi.org/10.3390/mi13071137 - 18 Jul 2022

Cited by 12 | Viewed by 2765

Abstract

Natural polysaccharides are structures composed of highly diversified biological macromolecules whose properties have been exploited by a diversity of industries. Until 2018, the polysaccharides market raised more than US $ 12 billion worldwide, while an annual growth forecast of 4.8% is expected by [...] Read more.

Natural polysaccharides are structures composed of highly diversified biological macromolecules whose properties have been exploited by a diversity of industries. Until 2018, the polysaccharides market raised more than US $ 12 billion worldwide, while an annual growth forecast of 4.8% is expected by 2026. The food industry is largely responsible for the consumption of this plant-source material, produced by microbiological fermentation. Among the used polysaccharides, gums are hydrocolloids obtained from a variety of sources and in different forms, being composed of salts of calcium, potassium, magnesium and sugar monomers. Their non-toxicity, hydrophilicity, viscosity, biodegradability, biocompatibility and sustainable production are among their main advantages. Although Brazil is amongst the largest producers of cashew gum, reaching 50 tons per year, the polysaccharide is not being used to its full potential, in particular, with regard to its uses in pharmaceuticals. Cashew gum (CG), obtained from Anacardium occidentale L., caught the attention of the industry only in 1970; in 1990, its production started to grow. Within the Brazilian academy, the groups from the Federal University of Ceará and Piauí are devoting the most efforts to the study of cashew gum, with a total of 31 articles already published. The number of patents in the country for innovations containing cashew tree gum has reached 14, including the technological process for the purification of cashew tree gum, comparison of physical and chemical methods for physicochemical characterizations, and optimum purification methodology. This scenario opens a range of opportunities for the use of cashew gum, mainly in the development of new pharmaceutical products, with a special interest in nanoparticles. Full article

(This article belongs to the Special Issue Nanoparticles in Biomedical Sciences)

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12 pages, 17942 KiB

Open AccessArticle

Design, Characterization, and Liftoff of an Insect-Scale Soft Robotic Dragonfly Powered by Dielectric Elastomer Actuators

by Yufeng Chen, Cathleen Arase, Zhijian Ren and Pakpong Chirarattananon

Micromachines 2022, 13(7), 1136; https://doi.org/10.3390/mi13071136 - 18 Jul 2022

Cited by 10 | Viewed by 3841

Abstract

Dragonflies are agile and efficient flyers that use two pairs of wings for demonstrating exquisite aerial maneuvers. Compared to two-winged insects such as bees or flies, dragonflies leverage forewing and hindwing interactions for achieving higher efficiency and net lift. Here we develop the [...] Read more.

Dragonflies are agile and efficient flyers that use two pairs of wings for demonstrating exquisite aerial maneuvers. Compared to two-winged insects such as bees or flies, dragonflies leverage forewing and hindwing interactions for achieving higher efficiency and net lift. Here we develop the first at-scale dragonfly-like robot and investigate the influence of flapping-wing kinematics on net lift force production. Our 317 mg robot is driven by two independent dielectric elastomer actuators that flap four wings at 350 Hz. We extract the robot flapping-wing kinematics using a high-speed camera, and further measure the robot lift forces at different operating frequencies, voltage amplitudes, and phases between the forewings and hindwings. Our robot achieves a maximum lift-to-weight ratio of 1.49, and its net lift force increases by 19% when the forewings and hindwings flap in-phase compared to out-of-phase flapping. These at-scale experiments demonstrate that forewing–hindwing interaction can significantly influence lift force production and aerodynamic efficiency of flapping-wing robots with passive wing pitch designs. Our results could further enable future experiments to achieve feedback-controlled flights. Full article

(This article belongs to the Special Issue Microrobotics: A Commemorative Issue in Honor of Professor Robert J. Wood)

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15 pages, 12681 KiB

Open AccessArticle

Laser Additive Manufacturing of Anti-Tetrachiral Endovascular Stents with Negative Poisson’s Ratio and Favorable Cytocompatibility

by Ke Chen, Haoran Wan, Xiang Fang and Hongyu Chen

Micromachines 2022, 13(7), 1135; https://doi.org/10.3390/mi13071135 - 18 Jul 2022

Cited by 8 | Viewed by 2232

Abstract

Laser additive manufacturing (LAM) of complex-shaped metallic components offers great potential for fabricating customized endovascular stents. In this study, anti-tetrachiral auxetic stents with negative Poisson ratios (NPR) were designed and fabricated via LAM. Poisson’s ratios of models with different diameters of circular node [...] Read more.

Laser additive manufacturing (LAM) of complex-shaped metallic components offers great potential for fabricating customized endovascular stents. In this study, anti-tetrachiral auxetic stents with negative Poisson ratios (NPR) were designed and fabricated via LAM. Poisson’s ratios of models with different diameters of circular node (DCN) were calculated using finite element analysis (FEA). The experimental method was conducted with the LAM-fabricated anti-tetrachiral stents to validate their NPR effect and the simulation results. The results show that, with the increase in DCN from 0.6 to 1.5 mm, the Poisson ratios of anti-tetrachiral stents varied from −1.03 to −1.12, which is in line with the simulation results. The interrelationship between structural parameters of anti-tetrachiral stents, their mechanical properties and biocompatibility was demonstrated. The anti-tetrachiral stents with a DCN of 0.9 mm showed the highest absolute value of negative Poisson’s ratio, combined with good cytocompatibility. The cytocompatibility tests indicate the envisaged cell viability and adhesion of the vascular endothelial cell on the LAM-fabricated anti-tetrachiral auxetic stents. The manufactured stents exhibit great superiority in the application of endovascular stent implantation due to their high flexibility for easy maneuverability during deployment and enough strength for arterial support. Full article

(This article belongs to the Special Issue Laser Additive Manufacturing: Design, Materials, Processes and Applications)

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11 pages, 4301 KiB

Open AccessArticle

Quantitative Analysis of Drag Force for Task-Specific Micromachine at Low Reynolds Numbers

by Qiang Wang and Zhen Wang

Micromachines 2022, 13(7), 1134; https://doi.org/10.3390/mi13071134 - 18 Jul 2022

Cited by 4 | Viewed by 1903

Abstract

Micromotors have spread widely in order to meet the needs of new applications, including cell operation, drug delivery, biosensing, precise surgery and environmental decontamination, due to their small size, low energy consumption and large propelling power, especially the newly designed multifunctional micromotors that [...] Read more.

Micromotors have spread widely in order to meet the needs of new applications, including cell operation, drug delivery, biosensing, precise surgery and environmental decontamination, due to their small size, low energy consumption and large propelling power, especially the newly designed multifunctional micromotors that combine many extra shape features in one device. Features such as rod-like receptors, dendritic biosensors and ball-like catalyzing enzymes are added to the outer surface of the tubular micromotor during fabrication to perform their special mission. However, the structural optimization of motion performance is still unclear. The main factor restricting the motion performance of the micromotors is the drag forces. The complex geometry of a micromotor makes its dynamic behavior more complicated in a fluid environment. This study aimed to design the optimum structure of tubular micromotors with minimum drag forces and obtain the magnitude of drag forces considering both the internal and external fluids of the micromotors. By using the computational fluid dynamics software Fluent 18.0 (ANSYS), the drag force and the drag coefficient of different conical micromotors were calculated. Moreover, the influence of the Reynolds numbers Re, the semi-cone angle δ and the ratios ξ and η on the drag coefficient was analyzed. The results show the drag force monotonically increased with Reynolds numbers Re and the ratio η. The extreme point of the drag curve is reached when the semi-cone angle δ is 8° and the ratio ξ is 3.846. This work provides theoretical support and guidance for optimizing the design and development of conical micromotors. Full article

(This article belongs to the Special Issue Heat Transfer and Fluid Flow in Micromachines, Volume II)

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12 pages, 2868 KiB

Open AccessArticle

An Analytic Orthotropic Heat Conduction Model for the Stretchable Network Heaters

by Zeqing He, Yingli Shi, Jin Nan, Zhigang Shen, Taihua Zhang and Zhao Zhao

Micromachines 2022, 13(7), 1133; https://doi.org/10.3390/mi13071133 - 18 Jul 2022

Cited by 2 | Viewed by 1592

Abstract

Compared with other physiotherapy devices, epidermal electronic systems (EES) used in medical applications such as hyperthermia have obvious advantages of conformal attachment, lightness and high efficiency. The stretchable flexible electrode is an indispensable component. The structurally designed flexible inorganic stretchable electrode has the [...] Read more.

Compared with other physiotherapy devices, epidermal electronic systems (EES) used in medical applications such as hyperthermia have obvious advantages of conformal attachment, lightness and high efficiency. The stretchable flexible electrode is an indispensable component. The structurally designed flexible inorganic stretchable electrode has the advantage of stable electrical properties under tensile deformation and has received enough attention. However, the space between the patterned electrodes introduced to ensure the tensile properties will inevitably lead to the uneven temperature distribution of the thermotherapy electrodes and degrade the effect of thermotherapy. It is of great practical value to study the temperature uniformity of the stretchable patterned electrode. In order to improve the uniformity of temperature distribution in the heat transfer system with stretchable electrodes, a temperature distribution manipulation strategy for orthotropic substrates is proposed in this paper. A theoretical model of the orthotropic heat transfer system based on the horseshoe-shaped mesh electrode is established. Combined with finite element analysis, the effect of the orthotropic substrate on the uniformity of temperature distribution in three types of heat source heat transfer systems is studied based on this model. The influence of the thermal conductivity ratio in different directions on the temperature distribution is studied parametrically, which will help to guide the design and fabrication of the stretchable electrode that can produce a uniform temperature distribution. Full article

(This article belongs to the Special Issue Structural Analyses and Designs for Flexible/Stretchable Electronics)

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14 pages, 4761 KiB

Open AccessFeature PaperEditor’s ChoiceArticle

Lasered Graphene Microheaters Modified with Phase-Change Composites: New Approach to Smart Patch Drug Delivery

by Victoria Gilpin, Deetchaya Surandhiran, Cameron Scott, Amy Devine, Jill H. Cundell, Chris I. R. Gill, L. Kirsty Pourshahidi and James Davis

Micromachines 2022, 13(7), 1132; https://doi.org/10.3390/mi13071132 - 18 Jul 2022

Cited by 7 | Viewed by 3398

Abstract

The combination of paraffin wax and O,O′-bis(2-aminopropyl) polypropylene glycol–block–polyethylene glycol–block–polypropylene glycol was used as a phase-change material (PCM) for the controlled delivery of curcumin. The PCM was combined with a graphene-based heater derived from the laser [...] Read more.

The combination of paraffin wax and O,O′-bis(2-aminopropyl) polypropylene glycol–block–polyethylene glycol–block–polypropylene glycol was used as a phase-change material (PCM) for the controlled delivery of curcumin. The PCM was combined with a graphene-based heater derived from the laser scribing of polyimide film. This assembly provides a new approach to a smart patch through which release can be electronically controlled, allowing repetitive dosing. Rather than relying on passive diffusion, delivery is induced and terminated through the controlled heating of the PCM with transfer only occurring when the PCM transitions from solid to liquid. The material properties of the device and release characteristics of the strategy under repetitive dosing are critically assessed. The delivery yield of curcumin was found to be 3.5 µg (4.5 µg/cm²) per 3 min thermal cycle. Full article

(This article belongs to the Special Issue Biohybrid Technologies: From Materials Manufacturing to Biomedical Application)

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13 pages, 6390 KiB

Open AccessArticle

Microwave-Assisted Solvent Bonding for Polymethyl Methacrylate Microfluidic Device

by Chia-Wen Tsao, Chang-Yen Chang and Po-Yen Chien

Micromachines 2022, 13(7), 1131; https://doi.org/10.3390/mi13071131 - 17 Jul 2022

Cited by 4 | Viewed by 2761

Abstract

This paper demonstrated a microwave-assisted solvent bonding method that uses organic solvent to seal the thermoplastic substrates with microwave assistance. This direct bonding is a simple and straightforward process that starts with solvent application followed by microwave irradiation without the need for expensive [...] Read more.

This paper demonstrated a microwave-assisted solvent bonding method that uses organic solvent to seal the thermoplastic substrates with microwave assistance. This direct bonding is a simple and straightforward process that starts with solvent application followed by microwave irradiation without the need for expensive facilities or complex procedures. The organic solvent applied at the bonding interface is used in dissolving and dielectric heating of the thermoplastic surfaces to seal the thermoplastic substrates under microwave assistance. We evaluated acetone and ethanol to seal the polymethyl methacrylate (PMMA) microfluidic device. The bonding performance, such as bonding coverage, geometry stability, and bonding strength (tensile) were observed and compared with the oven-heating and non-heating control experiments under the same force applications. Results showed that the microwave-assisted solvent bonding method presents a high bonding yield (maximum > 99%) and bonding strength (maximum ~2.77 MPa) without microchannel distortion, which can be used for various microfluidic applications. Full article

(This article belongs to the Special Issue Smart Sensor 2021)

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12 pages, 4111 KiB

Open AccessArticle

Effects of Laser Machining Aluminum Alloy in Different Media

by Xiang Li, Shan Huang, Jianping Tang, Weihao Mu, Xin Xu and Xuehui Chen

Micromachines 2022, 13(7), 1130; https://doi.org/10.3390/mi13071130 - 17 Jul 2022

Cited by 5 | Viewed by 1673

Abstract

To study the effects of aluminum alloys processed by a laser in air and water and at different water velocities, corresponding experiments were conducted and the impacting effects of different water velocities on the surface of the workpiece were simulated, respectively. The results [...] Read more.

To study the effects of aluminum alloys processed by a laser in air and water and at different water velocities, corresponding experiments were conducted and the impacting effects of different water velocities on the surface of the workpiece were simulated, respectively. The results show that when laser processing aluminum alloy materials in air, there is more slag and a recondensation layer on both sides of the groove, the heat-affected zone is larger and the surface processing quality is poor. When laser processing aluminum alloy materials in water, the processing quality is improved. With the increase in water velocity, the impacting and cooling effect is enhanced, the groove depth and groove width show a trend of first increasing and then decreasing, the slag and recondensation layer on both sides of the groove are reduced, the heat-affected zone is reduced and the processing quality of the groove is improved. When the water velocity reaches 30 m/s, a better groove can be obtained. Laser processing aluminum alloy materials in water can obtain better processing quality than laser processing in air. Full article

(This article belongs to the Special Issue Advances in Hybrid Micromanufacturing Technology)

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28 pages, 8097 KiB

Open AccessReview

A Review on Additive Manufacturing of Functional Gradient Piezoceramic

by Anton Sotov, Artem Kantyukov, Anatoliy Popovich and Vadim Sufiiarov

Micromachines 2022, 13(7), 1129; https://doi.org/10.3390/mi13071129 - 17 Jul 2022

Cited by 10 | Viewed by 3041

Abstract

Functionally graded piezoceramics are a new generation of engineering materials whose final properties are determined by a chemical composition gradient (volume distribution), material microstructure, or design characteristics. This review analyzes possible ways to create a functionally graded piezoceramic material (gradient chemical composition, gradient [...] Read more.

Functionally graded piezoceramics are a new generation of engineering materials whose final properties are determined by a chemical composition gradient (volume distribution), material microstructure, or design characteristics. This review analyzes possible ways to create a functionally graded piezoceramic material (gradient chemical composition, gradient porosity—controlled and disordered porosity) by additive manufacturing methods, to control such materials’ functional characteristics. An analysis of the creation of gradient piezoceramics using binder jetting technology is presented in more detail. The review shows that today, the creation of functional gradient piezoceramics by additive manufacturing is a poorly-studied but promising research area, due to the rapid development of the additive manufacturing market and their unique features in shaping parts. Full article

(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)

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