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Journal: Appl. Sci., 2018
Volume: 8
Number: 2403

Article: The Effect of Interfacial Ge and RF-Bias on the Microstructure and Stress Evolution upon Annealing of Ag/AlN Multilayers
Authors: by Claudia Cancellieri, Elizaveta Klyatskina, Mirco Chiodi, Jolanta Janczak-Rusch and Lars P. H. Jeurgens
Link: https://www.mdpi.com/2076-3417/8/12/2403

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