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Journal: Coatings, 2017
Volume: 7
Number: 136
Article:
Epitaxial Growth of AlN on (0001) Sapphire: Assessment of HVPE Process by a Design of Experiments Approach
Authors:
by
Raphaël Boichot, Danying Chen, Frédéric Mercier, Francis Baillet, Gaël Giusti, Thomas Coughlan, Mikhail Chubarov and Michel Pons
Link:
https://www.mdpi.com/2079-6412/7/9/136
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