Advanced Thin Films Technologies for Optics, Electronics, and Sensing

A special issue of Coatings (ISSN 2079-6412). This special issue belongs to the section "Thin Films".

Deadline for manuscript submissions: 15 November 2024 | Viewed by 14907

Special Issue Editor


E-Mail Website
Guest Editor
National Institute for Research and Development in Microtechnologies (IMT Bucharest), 077190 Voluntari, Romania
Interests: sensors; material engineering; thin-film nanocomposites; nanofabrication; spectroellipsometry; II-VI semiconductors; carbon materials; graphene; graphene compounds; nanosensors; photocatalysts; semiconductor thin films; visible spectra; zinc compounds; catalysis; coatings; composite materials; computerized instrumentation; contact angle; dyes; electric resistance measurement; electrochemical sensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

We are pleased to invite you to submit your work to this Special Issue, “Advanced Thin Films Technologies for Optics, Electronics, and Sensing”.

New inorganic and organic optical materials, semiconductors, intelligent materials, nanostructures, nanocarbon, nanotubes, graphene, bioinspired and ecofriendly materials, perovskites, and related hybrid materials could be prepared as thin films with high quality. These films can possess useful properties such as dielectric constant, magnetic permeability and anisotropy, electrical conductivity, and electrical and mechanical strength, thus finding application in light-emitting devices, solar cells, and flexible and stretchable devices, etc. The microstructure of thin films could differ significantly from bulk materials of the same composition. In contrast, the properties of the thin films could be determined by a variety of parameters (synthesis method, thermal budget, overall physical thickness, bulk and surface morphology, etc.). This makes functional thin-film materials even more promising and “tunable” than the “bulk” functional materials.

The theme of this Special Issue is focused on thin-film applications in advanced optics, electronics, and sensing. The field of thin films, which can be defined as the confluence of materials science, surface science, chemistry, and applied physics, has become an identifiable unified discipline of scientific endeavour. In particular, papers are invited that discuss recent advances in synthesis and specific characterisation techniques supporting the correlation between structure and specific properties, design and realisation of devices based on thin films.

In this Special Issue, original research articles and critical reviews (focused on a specific group of materials or/and specific applications) are welcome. Research areas may include (but are not limited to) the following:

  • Synthesis of thin-film materials;
  • Composite and nanocomposite films—design, synthesis, characterization and their use;
  • Thin-film chemical and physical deposition techniques;
  • Advanced characterization techniques for thin films (bulk, surface, interfaces);
  • Optical properties of thin films and their applications;
  • Hybrid solar cells;
  • Thin films for electronic and sensing devices, microsystems;
  • Advances in environmentally friendly methods for thin-film production.

We look forward to receiving your contributions.

Dr. Octavian Buiu
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Coatings is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Benefits of Publishing in a Special Issue

  • Ease of navigation: Grouping papers by topic helps scholars navigate broad scope journals more efficiently.
  • Greater discoverability: Special Issues support the reach and impact of scientific research. Articles in Special Issues are more discoverable and cited more frequently.
  • Expansion of research network: Special Issues facilitate connections among authors, fostering scientific collaborations.
  • External promotion: Articles in Special Issues are often promoted through the journal's social media, increasing their visibility.
  • e-Book format: Special Issues with more than 10 articles can be published as dedicated e-books, ensuring wide and rapid dissemination.

Further information on MDPI's Special Issue polices can be found here.

Published Papers (10 papers)

Order results
Result details
Select all
Export citation of selected articles as:

Research

Jump to: Other

16 pages, 4859 KiB  
Article
Organic Semiconductor Devices Fabricated with Recycled Tetra Pak®-Based Electrodes and para-Quinone Methides
by María Elena Sánchez Vergara, Eva Alejandra Santillán Esquivel, Ricardo Ballinas-Indilí, Octavio Lozada-Flores, René Miranda-Ruvalcaba and Cecilio Álvarez-Toledano
Coatings 2024, 14(8), 998; https://doi.org/10.3390/coatings14080998 - 7 Aug 2024
Cited by 1 | Viewed by 845
Abstract
This work presents the synthesis of para-quinone methides (p-QMs), which were deposited as films using the high vacuum sublimation technique after being chemically characterized. The p-QMs films were characterized morphologically and structurally using scanning electron microscopy, atomic force microscopy, [...] Read more.
This work presents the synthesis of para-quinone methides (p-QMs), which were deposited as films using the high vacuum sublimation technique after being chemically characterized. The p-QMs films were characterized morphologically and structurally using scanning electron microscopy, atomic force microscopy, and X-ray diffraction. In addition, their optical behavior was studied by means of ultraviolet–visible spectroscopy, and the optical gaps obtained were in the range of 2.21–2.71 eV for indirect transitions, indicating the semiconductor behavior of the p-QMs. The above was verified through the manufacture and evaluation of the electrical behavior of rigid semiconductor devices, in which fluorine-doped tin oxide-coated glass slides (FTO) were used as an anode and substrate. Finally, as an original, ecological, and low-cost application, the FTO was replaced by substrates and anodes made from recycled Tetra Pak®, generating flexible semiconductor devices. Although the electrical current transported depends on the type of p-QMs, the substituent in its structure, and the morphology, the kinds of substrate and anode also influence the type of electrical behavior of the device. This current–voltage study demonstrates that p-QM2 with 4-Cl-Ph as a radical, p-QM3 with 4-Et2N-Ph as a radical, and p-QM6 with 5-(1,3-benzodioxol) as a radical can be used in optoelectronics as semiconductor films. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

8 pages, 2476 KiB  
Communication
Effects of Substrates on the Performance of Pt Thin-Film Resistance Temperature Detectors
by Dingjia Liu, Ruina Jiao, Chunshui Sun and Yong Wang
Coatings 2024, 14(8), 969; https://doi.org/10.3390/coatings14080969 - 2 Aug 2024
Viewed by 717
Abstract
Pt thin-film resistance temperature detectors (RTDs) have been fabricated by magnetron sputtering on various substrates, including silica, polyimide (PI) and LaAlO3 (LAO) (100) single crystal. The influences of different substrates on the performance of Pt thin-film RTDs have been studied. It is [...] Read more.
Pt thin-film resistance temperature detectors (RTDs) have been fabricated by magnetron sputtering on various substrates, including silica, polyimide (PI) and LaAlO3 (LAO) (100) single crystal. The influences of different substrates on the performance of Pt thin-film RTDs have been studied. It is revealed that the substrates exhibit a significant dependence on the temperature coefficient of resistance (TCR). Silica, PI and LAO substrates yield TCRs of 3.2 × 10−3, 2.7 × 10−3 and 3.4 × 10−3 /K, respectively. The Pt thin-film RTDs on LAO substrate exhibit a significantly larger TCR, compared to most of the other reported values. These devices also demonstrate a fast response time of 680 μs, which is shorter than that of many other reported RTDs. Furthermore, Pt thin-film RTDs on PI substrates could serve as flexible detectors, maintaining a consistent linear relationship between resistance and temperature even when bent. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

17 pages, 6151 KiB  
Article
Ternary Holey Carbon Nanohorn/Potassium Chloride/Polyvinylpyrrolidone Nanohybrid as Sensing Film for Resistive Humidity Sensor
by Bogdan-Catalin Serban, Octavian Buiu, Marius Bumbac, Nicolae Dumbravescu, Cristina Pachiu, Mihai Brezeanu, Gabriel Craciun, Cristina Mihaela Nicolescu, Vlad Diaconescu and Cornel Cobianu
Coatings 2024, 14(4), 517; https://doi.org/10.3390/coatings14040517 - 22 Apr 2024
Viewed by 1168
Abstract
The study presents findings on the relative humidity (R.H.) sensing capabilities of a resistive sensor. This sensor utilizes sensing layers composed of a ternary nanohybrid, consisting of holey carbon nanohorn (CNHox), potassium chloride (KCl), and polyvinylpyrrolidone (PVP), with mass ratios of 7/1/2, 6.5/1.5/2, [...] Read more.
The study presents findings on the relative humidity (R.H.) sensing capabilities of a resistive sensor. This sensor utilizes sensing layers composed of a ternary nanohybrid, consisting of holey carbon nanohorn (CNHox), potassium chloride (KCl), and polyvinylpyrrolidone (PVP), with mass ratios of 7/1/2, 6.5/1.5/2, and 6/2/2 (w/w/w). The sensing structure comprises a silicon substrate, a SiO2 layer, and interdigitated transducer (IDT) electrodes. The sensing film is deposited on the sensing structure via the drop-casting method. The sensing layers’ morphology and composition are investigated through Scanning Electron Microscopy (SEM) and RAMAN spectroscopy. The resistance of thin-film sensors based on ternary hybrids increased with exposure to a range of relative humidity (R.H.) levels, from 0% to 100%. The newly designed devices demonstrated a comparable response at room temperature to that of commercial capacitive R.H. sensors, boasting excellent linearity, swift response times, and heightened sensitivity. Notably, the studied sensors outperform others employing CNHox-based sensing layers in terms of sensitivity, as observed through manufacturing and testing processes. It elucidates the sensing mechanisms of each constituent within the ternary hybrid nanocomposites, delving into their chemical and physical properties, electronic characteristics, and affinity for water molecules. Various alternative sensing mechanisms are considered and discussed, including the reduction in holes within CNHox upon interaction with water molecules, proton conduction, and PVP swelling. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

11 pages, 10583 KiB  
Communication
Mid-Infrared (MIR) Complex Refractive Index Spectra of Polycrystalline Copper-Nitride Films by IR-VASE Ellipsometry and Their FIB-SEM Porosity
by Emilio Márquez, Eduardo Blanco, José M. Mánuel, Manuel Ballester, Marcos García-Gurrea, María I. Rodríguez-Tapiador, Susana M. Fernández, Florian Willomitzer and Aggelos K. Katsaggelos
Coatings 2024, 14(1), 5; https://doi.org/10.3390/coatings14010005 - 19 Dec 2023
Cited by 1 | Viewed by 1475
Abstract
Copper-nitride (Cu3N) semiconductor material is attracting much attention as a potential, next-generation thin-film solar light absorber in solar cells. In this communication, polycrystalline covalent Cu3N thin films were prepared using reactive-RF-magnetron-sputtering deposition, at room temperature, onto glass and silicon [...] Read more.
Copper-nitride (Cu3N) semiconductor material is attracting much attention as a potential, next-generation thin-film solar light absorber in solar cells. In this communication, polycrystalline covalent Cu3N thin films were prepared using reactive-RF-magnetron-sputtering deposition, at room temperature, onto glass and silicon substrates. The very-broadband optical properties of the Cu3N thin film layers were studied by UV-MIR (0.2–40 μm) ellipsometry and optical transmission, to be able to achieve the goal of a low-cost absorber material to replace the conventional silicon. The reactive-RF-sputtered Cu3N films were also investigated by focused ion beam scanning electron microscopy and both FTIR and Raman spectroscopies. The less dense layer was found to have a value of the static refractive index of 2.304, and the denser film had a value of 2.496. The iso-absorption gap, E04, varied between approximately 1.3 and 1.8 eV and could be considered suitable as a solar light absorber. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Graphical abstract

21 pages, 10110 KiB  
Article
Effect of Substrate Bias on the Microstructure and Properties of Non-Equimolar (AlCrSiTiZr)N Films with Different Cr/Zr Ratios Deposited Using Reactive Direct Current Magnetron Sputtering
by Hao-En Peng, Ching-Yin Lee, Hsin-Yi Chang and Jien-Wei Yeh
Coatings 2023, 13(12), 1985; https://doi.org/10.3390/coatings13121985 - 22 Nov 2023
Cited by 1 | Viewed by 1093
Abstract
To reduce the cost of tools operated in extreme environments, we developed films with excellent corrosion/oxidation resistance. Two high-entropy nitride films, (AlCrSi0.3TiZr)N and (AlCr1.5Si0.3TiZr0.5)N, were deposited using reactive DC magnetron sputtering under different substrate biases. [...] Read more.
To reduce the cost of tools operated in extreme environments, we developed films with excellent corrosion/oxidation resistance. Two high-entropy nitride films, (AlCrSi0.3TiZr)N and (AlCr1.5Si0.3TiZr0.5)N, were deposited using reactive DC magnetron sputtering under different substrate biases. The films exhibited a maximum hardness of 32.5 GPa ((AlCrSi0.3TiZr)N) and 35.3 GPa ((AlCr1.5Si0.3TiZr0.5)N) when deposited at −150 V, corresponding to 27 and 142% increases compared to those deposited at 0 V. This indicates that the bias strengthened (AlCr1.5Si0.3TiZr0.5)N (higher Cr/Zr ratio) more significantly. The enhancement of the mechanical properties was highly correlated with the interstitial point defects and densification of the film microstructures. The corrosion resistance of the films deposited on 6061 Al alloy substrate under different biases was tested in 0.1 M H2SO4. (AlCrSi0.3TiZr)N and (AlCr1.5Si0.3TiZr0.5)N displayed the lowest corrosion currents of 0.75 and 0.19 μA/cm2 when deposited at −100 and −150 V, respectively. These values are two orders of magnitude lower than that of the uncoated substrate. The (AlCr1.5Si0.3TiZr0.5)N film showed better oxidation resistance than the (AlCrSi0.3TiZr)N film and remained partially oxidized after heat treatment at 1000 °C. The (AlCr1.5Si0.3TiZr0.5)N film deposited at −150 V exhibits excellent mechanical properties and corrosion/oxidation resistances, making it suitable for protecting tools operating in harsh environments. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

18 pages, 15532 KiB  
Article
The Relationship between Annealing Temperatures and Surface Roughness in Shaping the Physical Characteristics of Co40Fe40B10Dy10 Thin Films
by Chi-Lon Fern, Wen-Jen Liu, Chia-Chin Chiang, Yung-Huang Chang, Yuan-Tsung Chen, Yu-Zhi Wang, Jia-Wei Liu, Shih-Hung Lin, Ko-Wei Lin and Sin-Liang Ou
Coatings 2023, 13(11), 1895; https://doi.org/10.3390/coatings13111895 - 5 Nov 2023
Viewed by 1934
Abstract
Co40Fe40B10Dy10 thin films, with thicknesses varying between 10 nm and 50 nm, were grown on a Si(100) substrate. Subsequently, they underwent a 1 h annealing process in an Ar atmosphere at temperatures of 100 °C, 200 [...] Read more.
Co40Fe40B10Dy10 thin films, with thicknesses varying between 10 nm and 50 nm, were grown on a Si(100) substrate. Subsequently, they underwent a 1 h annealing process in an Ar atmosphere at temperatures of 100 °C, 200 °C, and 300 °C. The oxide characteristic peaks of Dy2O3(440), Co2O3(422), and Co2O3(511) were revealed by X-ray diffraction (XRD). The low-frequency alternating current magnetic susceptibility (χac) decreases with frequency. Due to thickness and the anisotropy of the magnetic crystal, the maximum χac and saturation magnetization values rise with thicknesses and annealing temperatures. As the thickness and heat treatment temperature rise, the values for resistivity and sheet resistance tend to fall. The results of atomic force microscopy (AFM) and magnetic force microscopy (MFM) show that average roughness (Ra) lowers as the annealing temperature increases, and the distribution of strip-like magnetic domain becomes more visible. As thickness and annealing temperature increase, there is a corresponding rise in surface energy. Nano-indentation testing shows that hardness initially decreases from 10 nm to 40 nm, followed by an increase at 50 nm. Notably, annealing at 300 °C leads to a significant hardening effect, marking the highest level of hardness observed. Young’s modulus increased as thicknesses and annealing temperatures increased. The magnetic, electric, and adhesive characteristics of CoFeBDy films are highly dependent on surface roughness at various annealing temperatures. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

21 pages, 11978 KiB  
Article
Optical Properties of Reactive RF Magnetron Sputtered Polycrystalline Cu3N Thin Films Determined by UV/Visible/NIR Spectroscopic Ellipsometry: An Eco-Friendly Solar Light Absorber
by E. Márquez, E. Blanco, M. García-Gurrea, M. Cintado Puerta, M. Domínguez de la Vega, M. Ballester, J. M. Mánuel, M. I. Rodríguez-Tapiador and S. M. Fernández
Coatings 2023, 13(7), 1148; https://doi.org/10.3390/coatings13071148 - 25 Jun 2023
Cited by 3 | Viewed by 1940
Abstract
Copper nitride (Cu3N), a metastable poly-crystalline semiconductor material with reasonably high stability at room temperature, is receiving much attention as a very promising next-generation, earth-abundant, thin film solar light absorber. Its non-toxicity, on the other hand, makes it [...] Read more.
Copper nitride (Cu3N), a metastable poly-crystalline semiconductor material with reasonably high stability at room temperature, is receiving much attention as a very promising next-generation, earth-abundant, thin film solar light absorber. Its non-toxicity, on the other hand, makes it a very attractive eco-friendly (greener from an environmental standpoint) semiconducting material. In the present investigation, Cu3N thin films were successfully grown by employing reactive radio-frequency magnetron sputtering at room temperature with an RF-power of 50 W, total working gas pressure of 0.5Pa, and partial nitrogen pressures of 0.8 and 1.0, respectively, onto glass substrates. We investigated how argon affected the optical properties of the thin films of Cu3N, with the aim of achieving a low-cost solar light absorber material with the essential characteristics that are needed to replace the more common silicon that is currently in present solar cells. Variable angle spectroscopic ellipsometry measurements were taken at three different angles, 50, 60, and 70, to determine the two ellipsometric parameters psi, ψ, and delta, Δ. The bulk planar Cu3N layer was characterized by a one-dimensional graded index model together with the combination of a Tauc–Lorentz oscillator, while a Bruggeman effective medium approximation model with a 50% air void was adopted in order to account for the existing surface roughness layer. In addition, the optical properties, such as the energy band gap, refractive index, extinction coefficient, and absorption coefficient, were all accurately found to highlight the true potential of this particular material as a solar light absorber within a photovoltaic device. The direct and indirect band gap energies were precisely computed, and it was found that they fell within the useful energy ranges of 2.142.25 eV and 1.451.71 eV, respectively. The atomic structure, morphology, and chemical composition of the Cu3N thin films were analyzed using X-ray diffraction, atomic force microscopy, and energy-dispersive X-ray spectroscopy, respectively. The Cu3N thin layer thickness, profile texture, and surface topography of the Cu3N material were characterized using scanning electron microscopy. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

14 pages, 9447 KiB  
Article
Evolution of Nanocrystalline Graphite’s Physical Properties during Film Formation
by Mariuca Gartner, Mihai Anastasescu, Hermine Stroescu, Jose Maria Calderon-Moreno, Silviu Preda, Octavian-Gabriel Simionescu, Andrei Avram and Octavian Buiu
Coatings 2022, 12(9), 1274; https://doi.org/10.3390/coatings12091274 - 1 Sep 2022
Cited by 3 | Viewed by 1747
Abstract
Nanocrystalline graphite (NCG) layers represent a good alternative to graphene for the development of various applications, using large area, complementary metal-oxide semiconductor (CMOS) compatible technologies. A comprehensive analysis of the physical properties of NCG layers—grown for different time periods via plasma-enhanced chemical vapour [...] Read more.
Nanocrystalline graphite (NCG) layers represent a good alternative to graphene for the development of various applications, using large area, complementary metal-oxide semiconductor (CMOS) compatible technologies. A comprehensive analysis of the physical properties of NCG layers—grown for different time periods via plasma-enhanced chemical vapour deposition (PECVD)—was conducted. The correlation between measured properties (thickness, optical constants, Raman response, electrical performance, and surface morphology) and growth time was established to further develop various functional structures. All thin films show an increased grain size and improved crystalline structure, with better electrical properties, as the plasma growth time is increased. Moreover, the spectroscopic ellipsometry investigations of their thickness and optical constants, together with the surface roughness extracted from the atomic force microscopy examinations and the electrical properties resulting from Hall measurements, point out the transition from nucleation to three-dimensional growth in the PECVD process around the five-minute mark. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

8 pages, 1848 KiB  
Article
Dependence of Structural and Optical Performance of Lanthanum Fluoride Antireflective Films on O Impurities
by Wenli Lu, Bo Pan, Ruiying Miao, Bingzheng Yang, Chuang Yu, Dongwei Zhang, Dehong Chen, Liguo Han and Zhiqiang Wang
Coatings 2022, 12(8), 1184; https://doi.org/10.3390/coatings12081184 - 16 Aug 2022
Viewed by 1556
Abstract
Lanthanum fluoride (LaF3) thin films were deposited on the Ge substrate using the molybdenum boat evaporation method. The effect of films’ oxygen impurity on the infrared optical properties has been investigated for the first time in this report. With the increase [...] Read more.
Lanthanum fluoride (LaF3) thin films were deposited on the Ge substrate using the molybdenum boat evaporation method. The effect of films’ oxygen impurity on the infrared optical properties has been investigated for the first time in this report. With the increase in oxygen content in the films, the F content decreases, and the O/F ratio decreases from 0.160 to 0.055. XRD patterns reveal that the presence of O impurity destroys the crystal structure integrity of the LaF3 films and leads to the intensification of infrared absorption. The average transmittance decreases from 58.1% to 52.2%, and the peak transmittance decreases from 59.9% to 54.5%. Additionally, the refractive index and extinction coefficient of LaF3 films with different oxygen content are obtained by fitting the transmittance test data. The results show that the refractive index and extinction coefficient of the films in 8–12 μm increase with the increase in oxygen content, the average refractive index increases from 1.339 to 1.478, and the extinction coefficient increases from 0.001 to 0.030. In this paper, the influence of oxygen impurity in the LaF3 film on its infrared optical properties is revealed, which lays a theoretical foundation for the development of high-performance LaF3 infrared antireflective film. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Graphical abstract

Other

Jump to: Research

12 pages, 3347 KiB  
Brief Report
High-Performance ε-Ga2O3 Solar-Blind Photodetectors Grown by MOCVD with Post-Thermal Annealing
by Zeyuan Fei, Zimin Chen, Weiqu Chen, Tiecheng Luo, Shujian Chen, Jun Liang, Xinzhong Wang, Xing Lu, Gang Wang and Yanli Pei
Coatings 2023, 13(12), 1987; https://doi.org/10.3390/coatings13121987 - 23 Nov 2023
Cited by 1 | Viewed by 1209
Abstract
High-temperature annealing has been regarded as an effective technology to improve the performance of Ga2O3-based solar-blind photodetectors (SBPDs). However, as a metastable phase, ε-Ga2O3 thin film may undergo phase transformation during post-annealing. Therefore, it is necessary [...] Read more.
High-temperature annealing has been regarded as an effective technology to improve the performance of Ga2O3-based solar-blind photodetectors (SBPDs). However, as a metastable phase, ε-Ga2O3 thin film may undergo phase transformation during post-annealing. Therefore, it is necessary to investigate the effect of the phase transition and the defect formation or desorption on the performance of photodetectors during post-annealing. In this work, the ε-Ga2O3 thin films were grown on c-plane sapphire with a two-step method, carried out in a metal-organic chemical vapor deposition (MOCVD) system, and the ε-Ga2O3 metal-semiconductor-metal (MSM)-type SBPDs were fabricated. The effects of post-annealing on ε-Ga2O3 MSM SBPDs were investigated. As a metastable phase, ε-Ga2O3 thin film undergoes phase transition when the annealing temperature is higher than 700 °C. As result, the decreased crystal quality makes an SBPD with high dark current and long response time. In contrast, low-temperature annealing at 640 °C, which is the same as the growth temperature, reduces the oxygen-related defects, as confirmed by X-ray photoelectron spectroscopy (XPS) measurement, while the good crystal quality is maintained. The performance of the SBPD with the post-annealing temperature of 640 °C is overall improved greatly compared with the ones fabricated on the other films. It shows the low dark current of 0.069 pA at 10 V, a rejection ratio (Rpeak/R400) of 2.4 × 104 (Rpeak = 230 nm), a higher photo-to-dark current ratio (PDCR) of 3 × 105, and a better time-dependent photoresponse. These results indicate that, while maintaining no phase transition, post-annealing is an effective method to eliminate point defects such as oxygen vacancies in ε-Ga2O3 thin films and improve the performance of SBPDs. Full article
(This article belongs to the Special Issue Advanced Thin Films Technologies for Optics, Electronics, and Sensing)
Show Figures

Figure 1

Back to TopTop