Research Progress of Ultra-Precision Micro-nano Machining

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: 30 April 2025 | Viewed by 13829

Special Issue Editors


E-Mail Website
Guest Editor
School of Engineering and Built Environment, Griffith University, Southport, QLD 4222, Australia
Interests: advanced manufacturing technologies; micromachining; machine dynamics; vibration monitoring and control; mechatronics

E-Mail Website
Guest Editor
School of Mechanical Engineering, Tianjin University, Tianjin 300450, China
Interests: mechanical dynamics; surface engineering; micro/meso-scale manufacturing technology

Special Issue Information

Dear Colleagues,

This Special Issue aims to showcase the latest research advancements and developments in the field of ultra-precision micro-nano machining. It will gather and disseminate recent research results, novel concepts, and cutting-edge technologies in this field. Micro-nano machining is an interdisciplinary research area that encompasses various fields such as engineering, materials science, physics, and chemistry. It plays a crucial role in the fabrication of advanced devices, structures, and components with high precision and accuracy. This Special Issue invites original research articles, review papers, and technical notes that cover various aspects of ultra-precision micro-nano machining, including but not limited to:

  • Fundamental theories of ultra-precision micro-nano machining;
  • Advances in micro/nano fabrication techniques;
  • Process modeling and simulation in micro/nano machining;
  • Precision measurement and metrology in micro/nano machining;
  • Surface quality and tribology in micro/nano machining;
  • Micro-nano manufacturing process optimization and control;
  • Tool condition monitoring and chatter suppression in micro/nano machining;
  • Multi-scale and multi-process integration in micro/nano machining;
  • Innovative applications of micro/nano machining in industry and academia;
  • New materials and surface treatments for micro/nano machining;
  • Challenges and opportunities in micro/nano machining for future developments.

The Special Issue welcomes original research papers, review articles, and communications on the topics of interest. All submitted papers will undergo a rigorous peer-review process to ensure the quality and novelty of the work.

We look forward to receiving your contributions.

Dr. Huaizhong Li
Dr. Xiubing Jing
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • ultra-precision machining
  • micro-nano machining
  • micro-nano chip formation
  • process modeling and simulation
  • process automation and optimization

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Published Papers (10 papers)

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Research

Jump to: Review

17 pages, 15283 KiB  
Article
Development of a Fast Positioning Platform with a Large Stroke Based on a Piezoelectric Actuator for Precision Machining
by Gaofeng Hu, Wendong Xin, Min Zhang, Guangjun Chen, Jia Man and Yanling Tian
Micromachines 2024, 15(8), 1050; https://doi.org/10.3390/mi15081050 - 19 Aug 2024
Cited by 1 | Viewed by 703
Abstract
In this paper, a fast positioning platform (FPP) is proposed, able to meet simultaneously the requirements of large stroke and high frequency response, developed based on a PZT (piezoelectric actuator) and a quad-parallel flexible mechanism, for application in precision machining. The FPP is [...] Read more.
In this paper, a fast positioning platform (FPP) is proposed, able to meet simultaneously the requirements of large stroke and high frequency response, developed based on a PZT (piezoelectric actuator) and a quad-parallel flexible mechanism, for application in precision machining. The FPP is driven by a high-stiffness PZT and guided by a flexible hinge-based mechanism with a quad-parallel flexible hinge. The proposed quad-parallel flexible hinge mechanism can provide excellent planar motion capability with high stiffness and good guiding performance, thus guaranteeing outstanding dynamics characteristics. The mechanical model was established, the input and output characteristics of the FPP were analyzed, and the working range (output displacement and frequency) of the FPP was determined. Based on the mechanical model and the input and output characteristics of the FPP, the design method is described for of the proposed FPP, which is capable of achieving a large stroke while responding at a high frequency. The characteristics of the FPP were investigated using finite element analysis (FEA). Experiments were conducted to examine the performance of the FPP; the natural frequency of the FPP was 1315.6 Hz, while the maximum output displacement and the motion resolution of the FPP in a static state were 53.13 μm and 5 nm, respectively. Step response testing showed that under a step magnitude of 50 μm, the stabilization times for the falling and rising edges of the moving platform were 37 ms and 26 ms, respectively. The tracking errors were about ±1.96 μm and ±0.59 μm when the amplitude and frequency of the signal were 50 μm, 50 Hz and 10 μm, 200 Hz, respectively. The FPP showed excellent performance in terms of fast response and output displacement. The cutting test results indicated that compared with the uncontrolled condition, the values of surface roughness under controlled conditions decreased by 23.9% and 12.7% when the cutting depths were 5 μm and 10 μm, respectively. The developed FPP device has excellent precision machining performance. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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18 pages, 7345 KiB  
Article
Study on Effect of Surface Micro-Texture of Cemented Carbide on Tribological Properties of Bovine Cortical Bone
by Peng Shang, Bingfeng Liu, Chunhai Guo, Peijuan Cui, Zhanlin Hou, Fengbin Jin, Jianjun Zhang, Shijie Guo, Yuping Huang and Wenwu Zhang
Micromachines 2024, 15(8), 994; https://doi.org/10.3390/mi15080994 - 31 Jul 2024
Viewed by 651
Abstract
In bone-milling surgical procedures, the intense friction between the tool and bone material often results in high cutting temperatures, leading to the thermal necrosis of bone cells. This paper aims to investigate the effect of micro-texture on the tribological properties of YG8 cemented [...] Read more.
In bone-milling surgical procedures, the intense friction between the tool and bone material often results in high cutting temperatures, leading to the thermal necrosis of bone cells. This paper aims to investigate the effect of micro-texture on the tribological properties of YG8 cemented carbide in contact with bone. The main objective is to guide the design of tool surface microstructures to reduce frictional heat generation. To minimize experimental consumables and save time, numerical simulations are first conducted to determine the optimal machining depth for the texture. Subsequently, micro-textures with different shapes and pitches are prepared on the surface of YG8 cemented carbide. These textured samples are paired with bovine cortical bone pins featuring various bone unit arrangements, and friction and wear tests are conducted under physiological saline lubrication. The experimental results indicate that the appropriate shape and pitch of the micro-texture can minimize the coefficient of friction. The parallel arrangement of bone units exhibits a lower coefficient of friction compared to the vertical arrangement. This study holds significant implications for the design and fabrication of future micro-texture milling cutters. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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12 pages, 9123 KiB  
Article
Microgrooves with Small Taper Angle Processed by Nanosecond Laser in Closed Flowing Water
by Guoyan Chen, Junfei Zhang, Jian Yuan, Bin He, Jinjin Han and Suorong Zhang
Micromachines 2024, 15(4), 448; https://doi.org/10.3390/mi15040448 - 27 Mar 2024
Viewed by 1022
Abstract
To improve the capability of nanosecond lasers to process structures with a high aspect ratio, a new method of nanosecond laser processing in closed flowing water was proposed in this paper. The microgrooves on a stainless steel 304 surface were processed by the [...] Read more.
To improve the capability of nanosecond lasers to process structures with a high aspect ratio, a new method of nanosecond laser processing in closed flowing water was proposed in this paper. The microgrooves on a stainless steel 304 surface were processed by the new method, and the influence of processing parameters on the microgrooves was studied. The comparative experiments of laser processing in still water and overflowing water were also carried out, and the unusual phenomenon of laser processing in different flowing water was discovered by a high-speed camera. The results showed that the flowing velocity played a crucial role in underwater laser processing, and that high flowing velocity could timely remove bubbles in closed flowing water, thus obtaining higher processing efficiency. As the depth of the groove increased, the bubbles firstly affected the processing of the sidewall, causing a circular transition between the sidewall and bottom surface. The reflection of the laser beam by the bubble could cause secondary processing on the sidewall, resulting in a decrease in the taper angle. Based on the above research, the microgroove with a width of 0.5 mm, aspect ratio of 3, and taper angle of 87.57° was successfully processed by a nanosecond laser in closed flowing water. Compared to conventional nanosecond laser processing, laser processing in closed flowing water was more advantageous in processing microgrooves with a small taper angle and high aspect ratio. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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17 pages, 29594 KiB  
Article
Theoretical and Experimental Investigation of Surface Textures in Vibration-Assisted Micro Milling
by Bowen Song, Dawei Zhang, Xiubing Jing, Yingying Ren, Yun Chen and Huaizhong Li
Micromachines 2024, 15(1), 139; https://doi.org/10.3390/mi15010139 - 16 Jan 2024
Cited by 2 | Viewed by 1484
Abstract
Vibration-assisted micro milling is a promising technique for fabricating engineered mi-cro-scaled surface textures. This paper presents a novel approach for theoretical modeling of three-dimensional (3D) surface textures produced by vibration-assisted micro milling. The proposed model considers the effects of tool edge geometry, minimum [...] Read more.
Vibration-assisted micro milling is a promising technique for fabricating engineered mi-cro-scaled surface textures. This paper presents a novel approach for theoretical modeling of three-dimensional (3D) surface textures produced by vibration-assisted micro milling. The proposed model considers the effects of tool edge geometry, minimum uncut chip thickness (MUCT), and material elastic recovery. The surface texture formation under different machining parameters is simulated and analyzed through mathematical modeling. Two typical surface morphologies can be generated: wave-type and fish scale-type textures, depending on the phase difference between tool paths. A 2-degrees-of-freedom (2-DOF) vibration stage is also developed to provide vibration along the feed and cross-feed directions during micro-milling process. Micro-milling experiments on copper were carried out to verify the ability to fabricate controlled surface textures using the vibration stage. The simulated and experimentally generated surfaces show good agreement in geometry and dimensions. This work provides an accurate analytical model for vibration-assisted micro-milling surface generation and demonstrates its feasibility for efficient, flexible texturing. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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30 pages, 11285 KiB  
Article
Microstructure Formations Resulting from Nanosecond and Picosecond Laser Irradiation of a Ti-Based Alloy under Controlled Atmospheric Conditions and Optimization of the Irradiation Process
by Dubravka Milovanović, Boris Rajčić, Dragan Ranković, Biljana Stankov, Miha Čekada, Jovan Ciganović, Dragica Đurđević-Milošević, Zoran Stević, Miroslav Kuzmanović, Tatjana Šibalija and Sanja Petronić
Micromachines 2024, 15(1), 5; https://doi.org/10.3390/mi15010005 - 19 Dec 2023
Viewed by 1316
Abstract
This paper presents a study and comparison of surface effects induced by picosecond and nanosecond laser modification of a Ti6Al4V alloy surface under different ambient conditions: air and argon- and nitrogen-rich atmospheres. Detailed surface characterization was performed for all experimental conditions. Damage threshold [...] Read more.
This paper presents a study and comparison of surface effects induced by picosecond and nanosecond laser modification of a Ti6Al4V alloy surface under different ambient conditions: air and argon- and nitrogen-rich atmospheres. Detailed surface characterization was performed for all experimental conditions. Damage threshold fluences for picosecond and nanosecond laser irradiation in all three ambient conditions were determined. The observed surface features were a resolidified pool of molten material, craters, hydrodynamic effects and parallel periodic surface structures. Laser-induced periodic surface structures are formed by multi-mode-beam nanosecond laser action and picosecond laser action. Crown-like structures at crater rims are specific features for picosecond Nd:YAG laser action in argon-rich ambient conditions. Elemental analysis of the surfaces indicated nitride compound formation only in the nitrogen-rich ambient conditions. The constituents of the formed plasma were also investigated. Exploring the impact of process control parameters on output responses has been undertaken within the context of laser modification under different environmental conditions. Parametric optimization of the nanosecond laser modification was carried out by implementing an advanced method based on Taguchi’s parametric design and multivariate statistical techniques, and optimal settings are proposed for each atmosphere. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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13 pages, 5482 KiB  
Article
High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers
by Xiaoyu Ren, Selina X. Yao, Jiacheng Zhu, Zejun Deng, Yijia Wang, Baoshun Zhang, Zhongming Zeng and Hao Zhai
Micromachines 2023, 14(12), 2198; https://doi.org/10.3390/mi14122198 - 30 Nov 2023
Viewed by 1184
Abstract
The increasing demand for accurate imaging spectral information in remote sensing detection has driven the development of hyperspectral remote sensing instruments towards a larger view field and higher resolution. As the core component of the spectrometer slit, the designed length reaches tens of [...] Read more.
The increasing demand for accurate imaging spectral information in remote sensing detection has driven the development of hyperspectral remote sensing instruments towards a larger view field and higher resolution. As the core component of the spectrometer slit, the designed length reaches tens of millimeters while the precision maintained within the μm level. Such precision requirements pose challenges to traditional machining and laser processing. In this paper, a high-precision air slit was created with a large aspect ratio through MEMS technology on SOI silicon wafers. In particular, a MEMS slit was prepared with a width of 15 μm and an aspect ratio exceeding 4000:1, and a spectral spectroscopy system was created and tested with a Hg-Cd light source. As a result, the spectral spectrum was linear within the visible range, and a spectral resolution of less than 1 nm was obtained. The standard deviation of resolution is only one-fourth of that is seen in machined slits across various view fields. This research provided a reliable and novel manufacturing technique for high-precision air slits, offering technical assistance in developing high-resolution wide-coverage imaging spectrometers. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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23 pages, 7486 KiB  
Article
A Novel Type of Pseudo-Decoupling Method for Two Degree-of-Freedom Piezoelectrically Driven Compliant Mechanisms Based on Elliptical Parameter Compensation
by Rongqi Wang, Xiaoqin Zhou, Haonan Meng and Baizhi Liu
Micromachines 2023, 14(11), 2043; https://doi.org/10.3390/mi14112043 - 31 Oct 2023
Viewed by 951
Abstract
At present, a large number of two-degree-of-freedom piezoelectrically driven compliant mechanisms (2-DOF PDCMs) have been widely adopted to construct various elliptical vibration machining (EVM) devices employed in precisely fabricating functional micro-structured surfaces on difficult-to-cut materials, which have broad applications in many significant fields [...] Read more.
At present, a large number of two-degree-of-freedom piezoelectrically driven compliant mechanisms (2-DOF PDCMs) have been widely adopted to construct various elliptical vibration machining (EVM) devices employed in precisely fabricating functional micro-structured surfaces on difficult-to-cut materials, which have broad applications in many significant fields like optical engineering and precision manufacturing. For a higher precision of conventional 2-DOF PDCMs on tracking elliptical trajectories, a novel type of pseudo-decoupling method is proposed based on phase difference compensation (PDC). With finite element analysis (FEA), the dependences of elliptical trajectory tracking precision on PDC angles will then be investigated for optimizing PDC angles under different elliptical parameters. As the modification of the PDC-based method, another type of pseudo-decoupling method will be improved based on elliptical parameter compensation (EPC) for much higher tracking precision, an amplification coefficient and a coupling coefficient will be introduced to mathematically construct the EPC-based model. A series of FEA simulations will also be conducted on a conventional 2-DOF PDCM to calculate the amplification and coupling coefficients as well as optimize the EPC parameters under four series of elliptical parameters. The tracking precision and operational feasibility of these two new pseudo-decoupling methods on four series of elliptical trajectories will be further analyzed and discussed in detail. Meanwhile, a conventional 2-DOF PDCM will be practically adopted to build an experimental system for investigating the pseudo-decoupling performances of an EPC-based method, the input and output displacements will be measured and collected to actually calculate the amplification coefficients and coupling coefficients, further inversely solving the actual input elliptical parameters with EPC. The error distances between the expected and experimental elliptical trajectories will also be calculated and discussed. Finally, several critical conclusions on this study will be briefly summarized. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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17 pages, 8018 KiB  
Article
Compound Control of Trajectory Errors in a Non-Resonant Piezo-Actuated Elliptical Vibration Cutting Device
by Chen Zhang, Zeliang Shu, Yanjie Yuan, Xiaoming Gan and Fuhang Yu
Micromachines 2023, 14(10), 1961; https://doi.org/10.3390/mi14101961 - 21 Oct 2023
Viewed by 1122
Abstract
To improve the machining quality of the non-resonant elliptical vibration cutting (EVC) device, a compound control method for trajectory error compensation is proposed in this paper. Firstly, by analyzing the working principle of non-resonant EVC device and considering the elliptical trajectory error caused [...] Read more.
To improve the machining quality of the non-resonant elliptical vibration cutting (EVC) device, a compound control method for trajectory error compensation is proposed in this paper. Firstly, by analyzing the working principle of non-resonant EVC device and considering the elliptical trajectory error caused by piezoelectric hysteresis, a dynamic PI (Prandtl-Ishlinskii) model relating to voltage change rate and acceleration was established to describe the piezoelectric hysteresis characteristics of EVC devices. Then, the parameters of the dynamic PI model were identified by using the particle swarm optimization (PSO) algorithm. Secondly, based on the dynamic PI model, a compound control method has been proposed in which the inverse dynamic PI model is used as the feedforward controller for the dynamic hysteresis compensation, while PID (proportion integration differentiation) feedback is used to improve the control accuracy. Finally, trajectory-tracking experiments have been conducted to verify the feasibility of the proposed compound control method. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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Review

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18 pages, 5866 KiB  
Review
Recent Progress in Droplet Structure Machining for Advanced Optics
by Jin-Kun Guo, W.D.N. Sandaruwan, Jinwei Li, Jinzhong Ling, Ying Yuan, Xin Liu, Qiang Li and Xiaorui Wang
Micromachines 2024, 15(3), 337; https://doi.org/10.3390/mi15030337 - 28 Feb 2024
Cited by 1 | Viewed by 1624
Abstract
The development of optical and photonic applications using soft-matter droplets holds great scientific and application importance. The machining of droplet structures is expected to drive breakthroughs in advancing frontier applications. This review highlights recent advancements in micro–nanofabrication techniques for soft-matter droplets, encompassing microfluidics, [...] Read more.
The development of optical and photonic applications using soft-matter droplets holds great scientific and application importance. The machining of droplet structures is expected to drive breakthroughs in advancing frontier applications. This review highlights recent advancements in micro–nanofabrication techniques for soft-matter droplets, encompassing microfluidics, laser injection, and microfluidic 3D printing. The principles, advantages, and weaknesses of these technologies are thoroughly discussed. The review introduces the utilization of a phase separation strategy in microfluidics to assemble complex emulsion droplets and control droplet geometries by adjusting interfacial tension. Additionally, laser injection can take full advantage of the self-assembly properties of soft matter to control the spontaneous organization of internal substructures within droplets, thus providing the possibility of high-precision customized assembly of droplets. Microfluidic 3D printing demonstrates a 3D printing-based method for machining droplet structures. Its programmable nature holds promise for developing device-level applications utilizing droplet arrays. Finally, the review presents novel applications of soft-matter droplets in optics and photonics. The integration of processing concepts from microfluidics, laser micro–nano-machining, and 3D printing into droplet processing, combined with the self-assembly properties of soft materials, may offer novel opportunities for processing and application development. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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27 pages, 7255 KiB  
Review
A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components
by Wei Li, Qiang Xin, Bin Fan, Qiang Chen and Yonghong Deng
Micromachines 2024, 15(2), 178; https://doi.org/10.3390/mi15020178 - 25 Jan 2024
Cited by 2 | Viewed by 2092
Abstract
Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal [...] Read more.
Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces. Full article
(This article belongs to the Special Issue Research Progress of Ultra-Precision Micro-nano Machining)
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