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MEMS/NEMS Devices and Applications, 2nd Edition

This special issue belongs to the section "E: Engineering and Technology".

Special Issue Information

Keywords

  • physical sensors
  • force sensors
  • magnetic sensors
  • optical sensors
  • microphones
  • flow sensors
  • thermal sensors
  • chemical sensors
  • biosensors
  • gas sensors
  • actuators
  • resonators/filters
  • switches/relays
  • energy harvesters
  • lens/mirrors

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Published Papers

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Micromachines - ISSN 2072-666X