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Micromachines
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Magnetic MEMS
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Magnetic MEMS

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 December 2015) | Viewed by 38686

Special Issue Editor

Prof. Dr. Stephanus Büttgenbach

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Guest Editor
Institute of Microtechnology, Technische Universität Braunschweig, Alte Salzdahlumer Straße 203, 38124 Braunschweig, Germany
Interests: silicon and quartz micromachining; high aspect ratio micro-structures; soft-lithography; CAD systems for microcomponents; microsensors and actuators; magnetic microsystems; lab-on-chip; microreaction systems

Special Issue Information

Dear Colleagues,

Magnetic materials, such as hard and soft magnetic alloys and superparamagnetic nanoparticles, are increasingly being used in micro-electro-mechanical systems (MEMS). They provide the base for new and efficient magnetic MEMS (Mag-MEMS). The areas of application comprise magnetic sensors, actuators based on magnetic interactions, passive devices, such as inductors and transformers, as well as magnetic particle-based microfluidics. Typical examples of magnetic sensors are thin film recording read-write heads, magneto-resistive devices, and magnetic field sensors. Actuator applications include (amongst others) optical switches and attenuators, micro-relays, micromotors, micropumps, and magnetic energy harvesters. Each of the potential applications has its own challenges during the fabrication process. In particular, control of the characteristics of the magnetic thin film materials requires considerable expertise.

In respect of the wide variety of materials and MEMS devices utilizing magnetic interactions, it seems to be helpful to have a compact source of up to date information on this exciting field of micro-engineering. Therefore, we encourage reviews, as well as regular papers, from all areas of Mag-MEMS. In particular, we should welcome contributions on:

  • Magnetic microsensors
  • Magnetic microactuators
  • Magnetic MEMS energy harvesters
  • MEMS inductors and transformers
  • Magnetic-particle based microfluidics
  • Meso-scale Mag-MEMS devices
  • Design and modeling of Mag-MEMS
  • Processing of magnetic materials
  • Magnetic nanostructures for MEMS

Prof. Dr. Stephanus Büttgenbach
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (5 papers)

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Research

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2106 KiB  
Article
Delay Kalman Filter to Estimate the Attitude of a Mobile Object with Indoor Magnetic Field Gradients
by Christophe Combettes and Valérie Renaudin
Micromachines 2016, 7(5), 79; https://doi.org/10.3390/mi7050079 - 2 May 2016
Cited by 10 | Viewed by 5982
Abstract
More and more services are based on knowing the location of pedestrians equipped with connected objects (smartphones, smartwatches, etc.). One part of the location estimation process is attitude estimation. Many algorithms have been proposed but they principally target open space areas where [...] Read more.
More and more services are based on knowing the location of pedestrians equipped with connected objects (smartphones, smartwatches, etc.). One part of the location estimation process is attitude estimation. Many algorithms have been proposed but they principally target open space areas where the local magnetic field equals the Earth’s field. Unfortunately, this approach is impossible indoors, where the use of magnetometer arrays or magnetic field gradients has been proposed. However, current approaches omit the impact of past state estimates on the current orientation estimate, especially when a reference field is computed over a sliding window. A novel Delay Kalman filter is proposed in this paper to integrate this time correlation: the Delay MAGYQ. Experimental assessment, conducted in a motion lab with a handheld inertial and magnetic mobile unit, shows that the novel filter better estimates the Euler angles of the handheld device with an 11.7° mean error on the yaw angle as compared to 16.4° with a common Additive Extended Kalman filter. Full article
(This article belongs to the Special Issue Magnetic MEMS)
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9177 KiB  
Article
Polymer Magnetic Composite Core Based Microcoils and Microtransformers for Very High Frequency Power Applications
by Saravana Guru Mariappan, Ali Moazenzadeh and Ulrike Wallrabe
Micromachines 2016, 7(4), 60; https://doi.org/10.3390/mi7040060 - 5 Apr 2016
Cited by 12 | Viewed by 7091 | Correction
Abstract
We present a rapid prototyping and a cost effective fabrication process on batch fabricated wafer-level micro inductive components with polymer magnetic composite (PMC) cores. The new PMC cores provide a possibility to bridge the gap between the non-magnetic and magnetic core inductive devices [...] Read more.
We present a rapid prototyping and a cost effective fabrication process on batch fabricated wafer-level micro inductive components with polymer magnetic composite (PMC) cores. The new PMC cores provide a possibility to bridge the gap between the non-magnetic and magnetic core inductive devices in terms of both the operating frequency and electrical performance. An optimized fabrication process of molding, casting, and demolding which uses teflon for the molding tool is presented. High permeability NiFeZn powder was mixed with Araldite epoxy to form high resistive PMC cores. Cylindrical PMC cores having a footprint of 0.79 mm 2 were fabricated with varying percentage of the magnetic powder on FR4 substrates. The core influence on the electrical performance of the inductive elements is discussed. Inductor chips having a solenoidal coil as well as transformer chips with primary and secondary coils wound around each other have been fabricated and evaluated. A core with 65% powder equipped with a solenoid made out of 25 µm thick insulated Au wire having 30 turns, yielded a constant inductance value of 2 µH up to the frequency of 50 MHz and a peak quality factor of 13. A 1:1 transformer with similar PMC core and solenoidal coils having 10 turns yielded a maximum efficiency of 84% and a coupling factor of 96%. In order to protect the solenoids and to increase the mechanical robustness and handling of the chips, a novel process was developed to encapsulate the components with an epoxy based magnetic composite. The effect on the electrical performance through the magnetic composite encapsulation is reported as well. Full article
(This article belongs to the Special Issue Magnetic MEMS)
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2831 KiB  
Article
Dealing with Magnetic Disturbances in Human Motion Capture: A Survey of Techniques
by Gabriele Ligorio and Angelo Maria Sabatini
Micromachines 2016, 7(3), 43; https://doi.org/10.3390/mi7030043 - 9 Mar 2016
Cited by 55 | Viewed by 5955
Abstract
Magnetic-Inertial Measurement Units (MIMUs) based on microelectromechanical (MEMS) technologies are widespread in contexts such as human motion tracking. Although they present several advantages (lightweight, size, cost), their orientation estimation accuracy might be poor. Indoor magnetic disturbances represent one of the limiting factors for [...] Read more.
Magnetic-Inertial Measurement Units (MIMUs) based on microelectromechanical (MEMS) technologies are widespread in contexts such as human motion tracking. Although they present several advantages (lightweight, size, cost), their orientation estimation accuracy might be poor. Indoor magnetic disturbances represent one of the limiting factors for their accuracy, and, therefore, a variety of work was done to characterize and compensate them. In this paper, the main compensation strategies included within Kalman-based orientation estimators are surveyed and classified according to which degrees of freedom are affected by the magnetic data and to the magnetic disturbance rejection methods implemented. By selecting a representative method from each category, four algorithms were obtained and compared in two different magnetic environments: (1) small workspace with an active magnetic source; (2) large workspace without active magnetic sources. A wrist-worn MIMU was used to acquire data from a healthy subject, whereas a stereophotogrammetric system was adopted to obtain ground-truth data. The results suggested that the model-based approaches represent the best compromise between the two testbeds. This is particularly true when the magnetic data are prevented to affect the estimation of the angles with respect to the vertical direction. Full article
(This article belongs to the Special Issue Magnetic MEMS)
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Review

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5408 KiB  
Review
Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields
by João Valadeiro, Susana Cardoso, Rita Macedo, Andre Guedes, João Gaspar and Paulo P. Freitas
Micromachines 2016, 7(5), 88; https://doi.org/10.3390/mi7050088 - 11 May 2016
Cited by 36 | Viewed by 8696
Abstract
In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybrid architecture, [...] Read more.
In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybrid architecture, lower detectivities are expected when compared with those obtained for individual sensors. This particularity results from the change of sensor’s operating point to frequencies above the 1/f noise knee. Full article
(This article belongs to the Special Issue Magnetic MEMS)
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3270 KiB  
Review
Magnetic Bead—Magic Bullet
by Christine Ruffert
Micromachines 2016, 7(2), 21; https://doi.org/10.3390/mi7020021 - 28 Jan 2016
Cited by 41 | Viewed by 9914
Abstract
Microfluidics is assumed to be one of the leading and most promising areas of research since the early 1990s. In microfluidic systems, small spherical magnetic particles with superparamagnetic properties, called magnetic beads, play an important role in the design of innovative methods and [...] Read more.
Microfluidics is assumed to be one of the leading and most promising areas of research since the early 1990s. In microfluidic systems, small spherical magnetic particles with superparamagnetic properties, called magnetic beads, play an important role in the design of innovative methods and tools, especially in bioanalysis and medical sciences. The intention of this review paper is to address main aspects from the state-of-the-art in the area of magnetic bead research, while demonstrating the broad variety of applications and the huge potential to solve fundamental biological and medical problems in the fields of diagnostics and therapy. Basic issues and demands related to the fabrication of magnetic particles and physical properties of nanosize magnets are discussed in Section 2. Of main interest are the control and adjustment of the nanoparticles’ properties and the availability of adequate approaches for particle detection via their magnetic field. Section 3 presents an overview of magnetic bead applications in nanomedicine. In Section 4, practical aspects of sample manipulation and separation employing magnetic beads are described. Finally, the benefits related to the use of magnetic bead-based microfluidic systems are summarized, illustrating ongoing questions and open tasks to be solved on the way to an approaching microfluidic age. Full article
(This article belongs to the Special Issue Magnetic MEMS)
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