Micromachines, Volume 9, Issue 12

This work focuses on the effect of remote phonon arising from the substrate and high-κ gate dielectric on electron mobility in two-dimensional (2D) InSe field-effect transistors (FETs). The electrostatic characteristic under quantum confinement...

The low fabrication cost of SU-8-based devices has opened the fields of point-of-care devices (POC), µTAS and Lab-on-Chip technologies, which call for cheap and disposable devices. Often this translates to free-standing, suspended devices and a...

Micro-electromechanical system (MEMS) accelerometers are widely used in the inertial navigation and nanosatellites field. A high-performance digital interface circuit for a high-Q MEMS micro-accelerometer is presented in this work. The mechanical noi...

Tactile feedback is needed for the interaction of humans with a worn device, and to enable robots to gather environmental cues and react to their surroundings [...]

In this study, we develop a facial one-step approach to prepare durable super-hydrophobic coatings on glass surfaces. The hydrophobic characteristics, corrosive liquid resistance, and mechanical durability of the super-hydrophobic surface are present...

The nanostructures with uniform long-range ordered structure are of crucial importance for performance standardization of high-quality surface-enhanced Raman scattering (SERS) spectra. In this paper, we described the fabrication and SERS properties o...

Over the past decade, synthesized nanomaterials, such as carbon nanotube, nanoparticle, quantum dot, and nanowire, have already made breakthroughs in various fields, including biomedical sensors. Enormous surface area-to-volume ratio of the nanomater...

Asymmetric plate-type micro-channels (APM) have one hydrophobic wall and one hydrophilic wall. By flowing through APM, a kerosene-in-water emulsion can be de-emulsified in one second. To date, however, the demulsification process in the APM is still...

Culturing cellular tissues inside a microchannel using an artificial three-dimensional (3D) microstructure is normally conducted to elucidate and reproduce a biological function. The thick photoresist SU-8, which has a microscale resolution and high...

Electrochemical sensors for early tumor cell detection are currently an important area of research, as this special region directly improves the efficiency of cancer treatment. Functional graphene is a promising alternative for selective recognition...

Carbon monoxide (CO), as a dangerous emission gas, is easy to accumulate in the complex underground environment and poses a serious threat to the safety of miners. In this paper, a sensor using a quantum cascade laser with an excitation wavelength of...

The skeletal muscle occupies about 40% mass of the human body and plays a significant role in the skeletal movement control. Skeletal muscle injury also occurs often and causes pain, discomfort, and functional impairment in daily living. Clinically,...

When milling titanium alloy, the cutting temperature has a strong impact on the degree of tool wear and, in turn, tool life and the surface quality of the workpiece. The distribution of the temperature field on a tool’s rake face can be improve...

Fibroblasts have significant involvement in cancer progression and are an important therapeutic target for cancer. Here, we present a microfluidic non-contact co-culture device to analyze interactions between tumor cells and fibroblasts. Further, we...

A microelectromechanical system (MEMS) torsional resonant magnetometer based on Lorentz force was investigated, consisting of torsional structures, torsional beams, metal plates, a coil, and a glass substrate. The Lorentz force, introduced by the int...

This paper presents an upright piezoelectric energy harvester (UPEH) with cylinder extension along its longitudinal direction. The UPEH can generate energy from low-speed wind by bending deformation produced by vortex-induced vibrations (VIVs). The U...

The steady streaming (SS) phenomenon is gaining increased attention in the microfluidics community, because it can generate net mass flow from zero-mean vibration. We developed numerical simulation and experimental measurement tools to analyze this v...

A two-dimensional molecular dynamics model of the liquid flow inside rough nanochannels is developed to investigate the effect of a solid wall on the interface slip of liquid in nanochannels with a surface roughness constructed by rectangular protrus...

We report the study of heterodimeric plasmonic nanogaps created between gold nanostar (AuNS) tips and gold nanospheres. The selective binding is realized by properly functionalizing the two nanostructures; in particular, the hot electrons injected at...

Injection molding is increasingly gaining favor in the manufacturing of polymer components since it can ensure a cost-efficient production with short cycle times. To ensure the quality of the finished parts and the stability of the process, it is ess...

This work demonstrated the surface microfabrication of the UV-transparent fluoropolymer CYTOP (perfluoro 1-butenyl vinyl ether), by etching-assisted ablation using lasers with different pulse widths. In previous studies, we developed a technique for...

Temperature-dependent threshold voltage (V_th) stability is a significant issue in the practical application of semi-conductor power devices, especially when they are undergoing a repeated high-temperature operation condition. The V_th analytical model...

In this paper, for the first time, an n-channel metal-oxide-semiconductor field-effect transistor (NMOSFET) layout with a Z gate and an improved total ionizing dose (TID) tolerance is proposed. The novel layout can be radiation-hardened with a fixed...

Cancer cell metastasis has been recognized as one hallmark of malignant tumor progression; thus, measuring the motility of cells, especially tumor cell migration, is important for evaluating the therapeutic effects of anti-tumor drugs. Here, we used...

Currently, a tunnel field-effect transistor (TFET) is being considered as a suitable electrostatic discharge (ESD) protection device in advanced technology. In addition, silicon-germanium (SiGe) engineering is shown to improve the performance of TFET...

The unique and outstanding electrical and optical properties of graphene make it a potential material to be used in the construction of high-performance photosensors. However, the fabrication process of a graphene photosensor is usually complicated a...

Nanoindentation techniques, with high spatial resolution and force sensitivity, have recently been moved into the center of the spotlight for measuring the mechanical properties of biomaterials, especially bridging the scales from the molecular via t...

The oxidation of metal microparticles (MPs) in a polymer film yields a mesoporous highly-deformable composite polymer for enhancing performance and creating a gapless structure of triboelectric nanogenerators (TENGs). This is a one-step scalable synt...

The traditional silicon-based micro-electro-mechanical systems (MEMS) safety and arming (S&A) device fuze cannot isolate abnormal outputs in the detonation environment, which creates hazards for personnel. To address this problem, we report the d...

Injection compression molding (ICM) provides enhanced optical performances of molded polymer optics in terms of birefringence and transmission of light compared to Injection molding (IM). Nevertheless, ICM requires case-dedicated process optimization...

Since the beginning of the 2000s, globalization has accelerated because of the development of transportation systems that allow for human and material exchanges throughout the world. However, this globalization has brought with it the rise of various...

This work describes the interfacing of electrowetting-on-dielectric based digital microfluidic (DMF) sample preparation devices with ambient mass spectrometry (MS) via desorption atmospheric pressure photoionization (DAPPI). The DMF droplet manipulat...

We demonstrated two types of GaN-based flip-chip light-emitting diodes (FCLEDs) with distributed Bragg reflector (DBR) and without DBR to investigate the effect of dielectric TiO₂/SiO₂ DBR on optical and electrical characteristics of FCLEDs. The refl...

Focusing on the issue of the malachite green traditional test methods such as large volume, high cost and high complex, this paper proposed a novel multi-channel electrochemical malachite green detection system. Specific recognition properties of mal...

One of the main assumptions of the standard electrokinetic model is that ions behave as point-like entities. In a previous work (López-García, et al., 2015) we removed this assumption and analyzed the influence of finite ionic size on t...

We fabricated carbon nanotube (CNT) cold cathode emitters with enhanced and stable electron emission properties and long-time stability with electrical aging as a post-treatment. Our CNT field emitters showed improved electrical properties by electri...

Using a state-of-the-art quantum transport simulator based on the effective mass approximation, we have thoroughly studied the impact of variability on ${\mathrm{Si}}_x{\mathrm{Ge}}_{1-x}$ channel gate-all-around nanowire metal-oxide-semiconductor field...

As electronic products become more functional, the devices are required to provide better performances and meet ever smaller form factor requirements. To achieve a higher I/O density within the smallest form factor package, applying nanotechniques to...

The stretchability of electronic devices is typically obtained by tailoring the stretchable interconnects that link the functional units together. The durability of the interconnects against environmental conditions, such as deformation and chemicals...

The paper aims to propose a magnetic actuated capsule microrobotic system, which is composed of a magnetically actuated microrobot with a screw jet mechanism, a driving system, and a positioning system. The magnetically actuated microrobot embedded a...

The generation of electrical energy depending on renewable sources is rapidly growing and gaining serious attention due to its green sustainability. With fewer adverse impacts on the environment, the sun is considered as a nearly infinite source of r...

We present a rapid and highly reliable glass (fused silica) microfluidic device fabrication process using various laser processes, including maskless microchannel formation and packaging. Femtosecond laser assisted selective etching was adopted to pa...

In this paper we propose a gold-plated photonic crystal fiber (PCF) refractive index sensor based on surface plasmon resonance (SPR), in which gold is coated on the external surface of PCF for easy fabrication and practical detection. The finite elem...

As an advanced manufacturing technology that has been developed in recent years, three-dimensional (3D) printing of macromolecular materials can create complex-shaped components that cannot be realized by traditional processing. However, only a few t...

Room-temperature creep tests are performed at the plastic regions of two different metallic glassy films under Berkovich nanoindetation. Relying on the strain rate sensitivity of the steady-state creep curve, shear transformation zone (STZ) size is e...

A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. T...

Environmental energy issues caused by the burning of fossil fuel such as coal, and petroleum, and the limited resources along with the increasing world population pose a world-wide challenge. Alternative energy sources including solar energy, wind en...

Semiconductor device dimensions have been decreasing steadily over the past several decades, generating the need to overcome fundamental limitations of both the materials they are made of and the fabrication techniques used to build them. Modern meta...

Applications in broadband optical fiber communication system need variable optical attenuators (VOAs) with low wavelength-dependent loss (WDL). Based on analysis on the dispersion of the optical system of a MEMS-based VOA, we provide a method to redu...

The effect of post-helium irradiation annealing on bubbles and nanoindentation hardness of two reduced activation ferritic martensitic steels for nuclear fusion applications (EUROFER97 and EU-ODS EUROFER) has been studied. Helium-irradiated EUROFER97...