- Article
Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension
- Kirill V. Poletkin and
- Jan G. Korvink
A micro-machined hybrid contactless suspension, in which a conductive proof mass is inductively levitated within an electrostatic field, is studied. This hybrid suspension has the unique capability to control the stiffness, in particular along the ve...

