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Journal: Appl. Sci., 2020
Volume: 10
Number: 8362
Article:
A Study on the Influence of the Cross-Sectional Shape of the Metal-Inserted Retainer Ring and the Pressure Distribution from the Multi-Zone Carrier Head to Increase the Wafer Yield
Authors:
by
Joon-Yeon Park, Je-Heon Han and Changwon Kim
Link:
https://www.mdpi.com/2076-3417/10/23/8362
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