Thermal Stability of Self-Assembled 3-Aminopropyltrimethoxysilane Diffusion Barrier Terminated by Carboxyl Groups
Round 1
Reviewer 1 Report
The manuscript entitled “Thermal Stability of Self-assembled 3-aminopropyltrimethoxysilane Diffusion Barrier Terminated by Carboxyl Groups” by Liu et. al. demonstrates to increase in the barrier breakdown temperature of the APTMS diffusion barrier layer by about 100℃ using a carboxyl termination. The method is effective to inhibit Cu diffusion at 500˚C. The work is definitely quite interesting and can be recommended for publication after addressing the following questions/queries.
1. a) On page 4, the authors wrote, “As the reaction time was increased to 3 h, the unreacted areas disappeared, and no obvious particles existed on the surface (Figure 2(c)).” Also, the SEM image looked smoother than 2a and b. However, in AFM images, 3c looked rougher than 3a and b, and also the RMS values are higher for 3c compared to 3a and b. This looks contradictory. Can authors comment on this?
b) The explanation for the increased roughness value for 3c is not entirely convincing, also no references were given in support of their explanation. Please provide appropriate references.
c) Roughness values are not mentioned in the 3c and d images.
2. Can the authors provide the AFM images and the corresponding RMS values for Cu/COOH-APTMS/SiO2/Si samples at different annealing temperatures? This would help to understand the film surface better.
Author Response
Please see the attachment.
Author Response File: 
Author Response.docx
Reviewer 2 Report
Comments for author File: Comments.doc
Author Response
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Author Response File: Author Response.docx
Reviewer 3 Report
I recommend that this paper could be published in Applied Science as it is.
Author Response
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Author Response File: Author Response.docx
Round 2
Reviewer 1 Report
The authors have answered all my queries. The manuscript can be accepted after minor text editing.
Author Response
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Author Response File: Author Response.docx
Reviewer 2 Report
The author's response is not clear enough. So, It is recommended to update their manuscript according to the following recommendations before considering for publication:
a) Providing a Cross-sectional SEM image for the as-prepared samples at 500 oC, would clearly illustrate the barrier modification due to thermal-induced diffusion of material at the interface between the polymer and the Cu-layer.
b) Raman spectra at least of the as-prepared Cu/COOH-APTMS/SiO2/Si and COOH-APTMS/SiO2/Si.
c) When I refer to the reorganization of manuscript figures. I meant as an example XRD as figure 1, SEM as Figure 2, etc. This arrangement is typical in most papers, illustrating the film construction before the performance evaluation.
Author Response
Please see the attachment.
Author Response File: Author Response.docx
Round 3
Reviewer 2 Report
Authors have improved their manuscript and I think now is suitable for publication i applied science.
