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Article

Scheduling of Automated Wet-Etch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming

by
Carmen L. García-Mata
1,*,
Larysa Burtseva
2 and
Frank Werner
3
1
Tecnológico Nacional de México (TecNM)—IT Chihuahua, Tecnológico Ave 2909, Chihuahua C.P. 31310, Chihuahua, Mexico
2
Instituto de Ingeniería, Universidad Autónoma de Baja California, Calle de la Normal S/N, Col. Insurgentes Este, Mexicali C.P. 21280, Baja California, Mexico
3
Faculty of Mathematics, Otto-von-Guericke University Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany
*
Author to whom correspondence should be addressed.
Processes 2024, 12(7), 1315; https://doi.org/10.3390/pr12071315
Submission received: 11 April 2024 / Revised: 10 June 2024 / Accepted: 20 June 2024 / Published: 25 June 2024
(This article belongs to the Special Issue Advances in Intelligent Manufacturing Systems and Process Control)

Abstract

Scheduling and optimization have a central place in the research area of computing because it is increasingly important to achieve fully automated production processes to adjust manufacturing systems to the requirements of Industry 4.0. In this paper, we demonstrate how an automated wet-etch scheduling problem for the semiconductor industry can be solved by constraint answer set programming (CASP) and its solver called clingcon. A successful solution to this problem is achieved, and we found that for all tested problems, CASP is faster and obtains smaller makespan values for seven of the eight problems tested than the solutions based on mixed integer linear programming and constraint paradigms. The considered scheduling problem includes a robot for lot transfers between baths. CASP is a hybrid approach in automated reasoning that combines different research areas such as answer set programming, constraint processing, and Satisfiability Modulo Theories. For a long time, exact methods such as constraint programming have displayed difficulties in solving real large-scale problem instances. Currently, the performance of state-of-the-art constraint solvers is comparatively better than a decade ago, and some complex combinatorial problems can be better solved. These theoretical and technical achievements open new horizons for declarative programming applications such as logistics.
Keywords: scheduling; optimization; knowledge representation and reasoning; constraint answer set programming; semiconductor manufacturing systems scheduling; optimization; knowledge representation and reasoning; constraint answer set programming; semiconductor manufacturing systems

Share and Cite

MDPI and ACS Style

García-Mata, C.L.; Burtseva, L.; Werner, F. Scheduling of Automated Wet-Etch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming. Processes 2024, 12, 1315. https://doi.org/10.3390/pr12071315

AMA Style

García-Mata CL, Burtseva L, Werner F. Scheduling of Automated Wet-Etch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming. Processes. 2024; 12(7):1315. https://doi.org/10.3390/pr12071315

Chicago/Turabian Style

García-Mata, Carmen L., Larysa Burtseva, and Frank Werner. 2024. "Scheduling of Automated Wet-Etch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming" Processes 12, no. 7: 1315. https://doi.org/10.3390/pr12071315

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