- Article
Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination
- Qing Yu,
- Yali Zhang,
- Wenjian Shang,
- Shengchao Dong,
- Chong Wang,
- Yin Wang,
- Ting Liu and
- Fang Cheng
Chromatic confocal microscopy is a widely used method to measure the thickness of transparent specimens. In conventional configurations, both the illumination and imaging axes are perpendicular to the test specimen. The reflection will be very weak w...

