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Actuators
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Editorial Board Members’ Collection Series: “MEMS Dynamics and Control”
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Editorial Board Members’ Collection Series: “MEMS Dynamics and Control”

A special issue of Actuators (ISSN 2076-0825). This special issue belongs to the section "Miniaturized and Micro Actuators".

Deadline for manuscript submissions: 1 November 2024 | Viewed by 3119

Special Issue Editors

Prof. Dr. Jose Luis Sanchez-Rojas

E-Mail Website
Guest Editor
Microsystems, Actuators and Sensors Lab, INAMOL-Universidad de Castilla-La Mancha, 45071 Toledo, Spain
Interests: MEMS/NEMS; piezoelectric microsystems; integrated sensors and transducers; miniaturization of instrumentation for applications in chemistry; food technology; robotics; biotechnology and IoT
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Wenjun (Chris) Zhang

E-Mail Website
Guest Editor
Department of Mechanical Engineering, University of Saskatchewan, Saskatoon, SK S7N 5A9, Canada
Interests: design; manufacturing; MEMS; dynamic systems; biorobotics; biosensors; bioacutators
Special Issues, Collections and Topics in MDPI journals
Dr. Guangya Zhou

E-Mail Website
Guest Editor
Department of Mechanical Engineering, National University of Singapore, Singapore 117575, Singapore
Interests: micro/nano technology; micro/nano fabrication; MEMS/NEMS; nanophotonics; silicon photonics; sensors; imaging
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

In this Special Issue, a wide range of topics will be covered, including the design, fabrication, characterization, packaging, system integration, and final applications of microelectromechanical systems (MEMS) for any of the aspects included in the scope of the journal Actuators. The main focuses of the issue are miniaturization, dynamic response, and control schemes, regardless of the materials employed or the device principles. Furthermore, basic as well as more application-oriented research topics are considered, such as:

  • Materials particularly designed to microsystems.
  • Functional materials.
  • Processes and fabrication technologies for miniaturized actuator systems.
  • Modelling and simulation of microsystem dynamics, from packaged systems down to the device level, and CAD tools.
  • Electrostatic, piezoelectric, mechanical, thermal, acoustic, magnetic, or any physical actuation and control principles.
  • Optical MEMS (MOEMS) and optoelectronic microsystems.
  • Chemical sensors and actuators, and bioinspired microsystems.
  • Calibration, characterization, and testing techniques.
  • Reliability, robustness, resilience, failure analysis, degradation mechanisms, and life time prediction.
  • Soft microfluidic robots.
  • Hybrid sensors and actuators (hydrogel and mechatronics).
  • System integration, interface electronics, packaging and assembly, 3D integration techniques, micromechatronics, and microrobotics.
  • Applications and markets, monitoring, control, and measurement systems based on miniaturized systems.

Prof. Dr. Jose Luis Sanchez-Rojas
Prof. Dr. Wenjun (Chris) Zhang
Dr. Guangya Zhou
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Actuators is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • materials for MEMS and microactuators
  • processes and fabrication of MEMS devices
  • modelling and simulation
  • device principles, micromechanisms, and geometry scaling
  • characterization and testing techniques for MEMS, dynamics, and control
  • final applications of MEMS devices and systems

Published Papers (2 papers)

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Research

15 pages, 7075 KiB  
Article
Waterproofing a Thermally Actuated Vibrational MEMS Viscosity Sensor
by Luis Gan, Shreyas Choudhary, Kavana Reddy, Connor Levine, Lukas Jander, Amogh Uchil and Ivan Puchades
Actuators 2024, 13(2), 57; https://doi.org/10.3390/act13020057 - 02 Feb 2024
Viewed by 1125
Abstract
An efficient and inexpensive post-process method to waterproof an electrically actuated microtransducer has been studied. The electrical signals of microtransducers operating in electrically conductive fluids must be effectively isolated from the surrounding environment while remaining in contact for sensing purposes. A thermally actuated [...] Read more.
An efficient and inexpensive post-process method to waterproof an electrically actuated microtransducer has been studied. The electrical signals of microtransducers operating in electrically conductive fluids must be effectively isolated from the surrounding environment while remaining in contact for sensing purposes. A thermally actuated MEMS viscosity sensor uses electrical signals for both actuation and sensing. Three post-processing materials, (1) Parylene-C, (2) flouroacrylate-based polymer, and (3) nitrocellulose-based polymer, were coated as thin layers of waterproofing materials on different sensors. All three coating materials provided adequate protection when tested under normal operating conditions. Although the vibration response of the sensors was slightly modified, it did not affect their functionality in a significant way when measuring conductive fluids based on glycerol–water mixtures. All the treated sensors lasted over 1.2 million actuations without any decay in performance or failures. When the test bias conditions were increased by 5x to accelerate failures, the flouroacrylate-based polymer samples lasted 2x longer than the others. Visual analysis of the failures indicates that the edge of the diaphragm, which undergoes the most significant stress and strain values during actuation, was the location of the mechanical failure. This work guides post-processed waterproofing coatings for microscale actuators operating in harsh and damaging environments. Full article
(This article belongs to the Special Issue Editorial Board Members’ Collection Series: “MEMS Dynamics and Control”)
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12 pages, 3005 KiB  
Article
Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror
by Tailong Liu, Teng Pan, Shuijie Qin, Hui Zhao and Huikai Xie
Actuators 2023, 12(2), 83; https://doi.org/10.3390/act12020083 - 15 Feb 2023
Cited by 1 | Viewed by 1442
Abstract
MEMS mirrors have a wide range of applications, most of which require large field-of-view (FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV. However, the increased viscosity, convective heat transfer and thermal conductivity in liquid greatly affect the [...] Read more.
MEMS mirrors have a wide range of applications, most of which require large field-of-view (FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV. However, the increased viscosity, convective heat transfer and thermal conductivity in liquid greatly affect the dynamic behaviors of electrothermally actuated micromirrors. In this paper, the complex interactions among the multiple energy domains, including electrical, thermal, mechanical and fluidic, are studied in an immersed electrothermally actuated MEMS mirror. A damping model of the immersed MEMS mirror is built and dimensional analysis is applied to reduce the number of variables and thus significantly simplify the model. The solution of the fluid damping model is solved by using regression analysis. The dynamic response of the MEMS mirror can be calculated easily by using the damping model. The experimental results verify the effectiveness and accuracy of these models. The difference between the model prediction and the measurement is within 4%. The FOV scanned in a liquid is also increased by a factor of 1.6. The model developed in this work can be applied to study the dynamic behaviors of various immersed MEMS actuators. Full article
(This article belongs to the Special Issue Editorial Board Members’ Collection Series: “MEMS Dynamics and Control”)
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