Advances in Multi-Target Physical Vapor Deposition Techniques
A special issue of Coatings (ISSN 2079-6412). This special issue belongs to the section "Thin Films".
Deadline for manuscript submissions: closed (15 July 2021) | Viewed by 16259
Special Issue Editor
Interests: oxide thin films (especially vanadium oxides); pulsed laser deposition; insulator-metal phase transition; functionally graded materials; nanocomposites via self-assembly
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Special Issue Information
Dear Colleagues,
Multitarget (MT) deposition schemes for realizing atomic-level mixture of plural materials pave the way to a wider range of possibilities of physical vapor deposition (PVD) techniques, including pulsed laser deposition (PLD), DC/RF sputtering, pulsed electron beam deposition (PED), cathodic arc deposition, and so on. MT PVD has proven to be a promising approach, not only for creating combinatorial libraries that drastically enhance efficiency in material search but also for preparing thin films containing high vapor–pressure elements which are generally difficult to grow with a single target.
Two targets, or sometimes more, are used as MT, allowing one to control the film composition by changing the intensity ratio among energy fluxes onto different targets. In MT PLD, a popular method is that where one laser beam irradiates multiple targets alternatively, based on solid-phase reaction on the substrate. Meanwhile, some trials have been made on simultaneous laser irradiation to multiple targets, in which the mixing is supposed to occur in the gas phase. Even if the deposition equipment is designed to hold only a single target, mixing of multiple materials is possible by adopting mosaic targets, which can be categorized into MT deposition techniques.
For this Special Issue, aiming at a further spread of MT PVD schemes, we are pleased to invite the thin-film community to submit original experimental research articles and review articles involving such techniques. Topics of interest include but are not limited to:
- Growth of single films with composition controlled with MT PVD;
- Composition-graded materials and combinatorial libraries prepared with MT PVD;
- Self-assembled nanocomposites prepared with MT PVD;
- Comparison of films grown with MT and single-target PVD;
- Comparison of films grown with alternative and simultaneous MT PVD;
- Novel mechanisms and strategies for high-quality and/or cost-effective MT PVD.
Dr. Joe Sakai
Guest Editor
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Coatings is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
