RF MEMS Technology and Progress
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: 31 March 2025 | Viewed by 636
Special Issue Editor
Interests: micro sensors; wireless passive sensor systems; RF MEMS
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
RF MEMS is a type of MEMS device that processes radio frequency signals. RF MEMS can utilize MEMS technology to manufacture on-chip transmission lines, RF cavities, three-dimensional inductors, couplers, varactors, switches, filters, phase shifters and antennas. Compared with traditional RF devices, RF MEMS devices have many advantages, including their small size, insensitivity to acceleration, low DC power consumption, and ability to be fabricated on low-cost silicon or glass substrates. In addition, RF MEMS devices can be integrated with traditional silicon-based and gallium arsenide-based circuits, enabling miniaturization of RF processing systems. These advantages have led to significant applications in fields such as mobile communications, satellites, radars, etc. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel technology and progress in RF MEMS and its use for various RF systems.
Dr. Lifeng Wang
Guest Editor
Manuscript Submission Information
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Keywords
- RF MEMS
- switch
- filters
- ase shifters
- varactors
- inductors
- antenna
- reconfigurable
- tuneable
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