Selected Papers from the 36th International Conference on Micro Electro Mechanical Systems (MEMS 2023)
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (20 May 2023) | Viewed by 5581
Special Issue Editors
Interests: micro/nanomedicine; microfluidics; diagnostics; biosensing; nanomaterials
Special Issues, Collections and Topics in MDPI journals
Interests: vibration energy harvesting; energy storage; gas sensor; MEMS devices
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event reporting research results on every aspect of microsystems technology. In recent years, it has attracted over 700 participants and has presented more than 200 select papers in non-overlapping oral and poster sessions.
This Special Issue in Micromachines contains extended papers from the 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023) held on 15–19 January 2023 in Munich, Germany (https://mems23.org/).
Topics of interest include but are not limited to:
- Materials, fabrication, and packaging for generic MEMS and NEMS;
- Micro- and nanofluidics;
- Bio- and medical MEMS;
- MEMS physical and chemical sensors;
- MEMS/NEMS for optical, RF, and electromagnetics;
- MEMS actuators and power MEMS;
- Industry MEMS and advancing MEMS for products and sustainability;
- Emerging technologies and new opportunities for MEMS/NEMS.
Prof. Dr. Yi Zhang
Dr. Fei Wang
Guest Editors
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Keywords
- MEMS/NEMS
- sensors
- microsystems
- micro- and nanofluidics
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