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Micromachines
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Micro and Nano Machining Processes, 2nd Edition
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Micro and Nano Machining Processes, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (25 May 2023) | Viewed by 14901

Special Issue Editor

Dr. Muhammad Pervej Jahan

E-Mail Website
Guest Editor
Department of Mechanical and Manufacturing Engineering, Miami University, Oxford, OH 45056, USA
Interests: micromachining; micro-electro-discharge machining (micro-EDM); hybrid micromachining; nanomachining; non-conventional machining; additive manufacturing (AM); post-processing of AM parts; manufacturing processes
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

I would like to invite you to submit your unpublished research work on any areas of micro and nano machining processes to this Special Issue. With the increasing trend of miniaturization and growth of micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) industries, micro and nano machining processes have become an integral area of advanced manufacturing processes. Micro and nano machining processes have found important applications in the field of sensors, photovoltaics, drug delivery, microfluidics, micro mold fabrication, etc. Being able to machine a wide range of materials and geometry, micro and nano machining are found to play an important role where lithography-based micro and nanofabrication processes face challenges. Micro and nano machining processes can be tool-based or beam-based processes offering both contact and non-contact material removal mechanisms, and have their own advantages and limitations. Some of the tool-based micromachining includes micro-milling, micro-turning, and micro-grinding, whereas tool-based nanomachining processes are mostly based on scanning probe microscopy (SPM). Micro-electro-discharge machining (micro-EDM) and micro-electrochemical machining (micro-ECM) are two non-contact tool-based micromachining processes used for machining difficult-to-cut materials. Laser, electron beam, or ion beam based micro and nano machining processes are used extensively because of being faster processes and their capability of machining a wide range of materials.

The goal of this Special Issue is to encompass recent significant studies and advances in the areas of micro and nano machining processes using both beam and tool-based processes. Experimental investigations, analytical modeling, and numerical simulations in the areas of micro and nano machining processes are of interest. Process development, monitoring, and control of various micro and nano machining processes fall within the scope of this Special Issue. Specific topics of interest include, but are not limited to the following:

  • Conventional micromachining processes, i.e., micro-turning, micro-milling, micro-grinding, etc.
  • Non-conventional micromachining processes, i.e., micro-EDM, micro-ECM, micro-ECDM, micro-AWJM, etc.
  • Hybrid and/or assistive micro-machining processes, i.e., combined laser and micro-EDM, simultaneous micro-EDM and micro-ECM processes, etc.
  • Scanning probe-based nano machining processes, i.e., AFM-based nano-machining, AFM or nano-indentation based patterning, nano-scratching, etc.
  • Beam-based micro and nano machining processes, i.e., fused beam machining, electron beam machining, laser beam machining, etc.

Dr. Muhammad Pervej Jahan
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micromachining
  • nanomachining
  • tool-based micromachining
  • spm-based nanomachining
  • beam-based nanomachining
  • conventional micromachining
  • non-conventional micromachining
  • hybrid micromachining

Related Special Issues

Published Papers (8 papers)

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Research

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15 pages, 9335 KiB  
Article
Characteristics of Elliptical Vibration-Assisted Cutting with Variations in Tilt Angle of Elliptical Locus
by Senbin Xia, Ziqiang Yin, Cheng Huang, Yawen Guo and Chao Zhang
Micromachines 2023, 14(7), 1426; https://doi.org/10.3390/mi14071426 - 15 Jul 2023
Viewed by 1093
Abstract
Elliptical vibration-assisted cutting (EVAC), one of the advanced micromachining methods, enables results not possible with traditional ultra-precision machining. It is considered to be one of the most viable options for manufacturing micro/nanostructured surfaces. However, it is difficult to control the elliptical locus with [...] Read more.
Elliptical vibration-assisted cutting (EVAC), one of the advanced micromachining methods, enables results not possible with traditional ultra-precision machining. It is considered to be one of the most viable options for manufacturing micro/nanostructured surfaces. However, it is difficult to control the elliptical locus with different tilt angles; therefore, previous studies have primarily focused on fixed locus and investigated the effects of the amplitude and frequency on machining performance. In addition, tilt angle is an important factor affecting the characteristics of EVAC. To maximize the cutting performance of EVAC, the cutting characteristics of EVAC with variations in tilt angle of elliptical locus are investigated. The mathematical model of elliptical trajectory based on different tilt angles is established via geometric analysis. The effects of the different tilt angle (0–180°) on cutting forces, chip formation, defect generation and surface roughness are observed and theoretically analyzed in microgroove experiments. The experimental results show that the tilt angle has a significant effect on the cutting force, chip formation, defects and surface roughness. The best cutting performance can be obtained at the tilt angle of 30°, while the worst is recorded at 90°. The results can provide a valuable reference for further comprehensive studies to maximize the cutting performance of EVAC. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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14 pages, 5675 KiB  
Article
Improving Etched Flatness by Micro Airflow Array Pressurization in ITO Glass Laser Machining
by Rong Chen, Zhaojie Chen and Jin Xie
Micromachines 2023, 14(3), 676; https://doi.org/10.3390/mi14030676 - 19 Mar 2023
Viewed by 1463
Abstract
In laser etching of ITO glass, the warpage due to workpiece positioning causes breakpoint or deformation of micron-scale etching circuits. Based on traditional laser etching, a micro-airflow array pressurization is proposed by using a micro-flow air bearing through airflow positioning. The objective is [...] Read more.
In laser etching of ITO glass, the warpage due to workpiece positioning causes breakpoint or deformation of micron-scale etching circuits. Based on traditional laser etching, a micro-airflow array pressurization is proposed by using a micro-flow air bearing through airflow positioning. The objective is to achieve high-precision laser etching by pressurized micro-deformation of ITO glass during positioning. First, the micro-air flow and pressurized micro-deformation were modelled in relation to the airflow pressure and etching gap in order to analyze the flatness variation behavior. Then, the surface flatness was investigated in relation to the airflow parameters and relative bearing location. Finally, the critical value of the pressurization parameter were calculated using a data-twin and were applied to industrial ITO glass etching. It is shown that the uniform flow pressure distribution and surface central micro-deformation were formed by positive airflow pressure in the airflow area. The airflow pressure and etching gap could promote surface flatness, while excessive values could result in excessive deformation. Under the micro flow pressure, the initial flatness of the workpiece was able to be compensated within the critical pressurization parameter. By controlling the micro flow stress, the micro-airflow array pressurization could reduce the flatness to 22 μm with stress of 10.7–12.6 Pa. In industrial production, the surface fine circuits can be laser etched with an optimized micro flow pressure, which solves the problems of local breaks or deformed circuits due to the conventional etching process and the structural layout. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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13 pages, 5415 KiB  
Article
In-Hover Aerodynamic Analysis of a Small Rotor with a Thin Circular-Arc Airfoil and a Convex Structure at Low Reynolds Number
by Yao Lei, Jie Wang, Yazhou Li and Qingjia Gao
Micromachines 2023, 14(3), 540; https://doi.org/10.3390/mi14030540 - 25 Feb 2023
Cited by 1 | Viewed by 1592
Abstract
This study focused on the in-hover aerodynamics of a small rotor with a thin circular-arc airfoil and a convex structure at a low Reynolds number. The method combined computational fluid dynamics (CFD) with the blade element momentum theory (BEMT). The former was used [...] Read more.
This study focused on the in-hover aerodynamics of a small rotor with a thin circular-arc airfoil and a convex structure at a low Reynolds number. The method combined computational fluid dynamics (CFD) with the blade element momentum theory (BEMT). The former was used for studying the two-dimensional parametric aerodynamics of the airfoil at a low Reynolds number and the latter was used for the prediction of the rotor’s hover performance. A novel thin circular-arc airfoil with a convex structure with a high aerodynamic performance, high structural strength, light weight and easy manufacturing process is presented in this paper. A convex curve on the upper surface was adopted to increase the thickness of the airfoil at partial chord, and a stiffener in the airfoil was installed to improve the structural strength of rotor span-wise. The aerodynamic performance of the airfoil was numerically simulated by the two-dimensional steady and incompressible Navier–Stokes equations. The in-hover performance of the rotor for small-scale vehicles was predicted by an improved version of the blade element momentum theory (BEMT). Finally, a carbon-fiber rotor with the presented airfoil was manufactured that had a diameter of 40 cm and a pitch of 6.2 inches. The analysis results were verified by experiments. It was shown that the maximum calculation errors were below 6%. The improved BEMT can be used in the analysis of in-hover micro-rotor aerodynamics at low Reynolds numbers. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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10 pages, 3963 KiB  
Article
Effect of Substrate Pretreatment Process on the Cutting Performance of Diamond-Coated PCB Micro-Milling Tools
by Xiaofan Yang, Huang Li, Haiyang Lin, Yicong Chen and Rongjie Ji
Micromachines 2023, 14(1), 73; https://doi.org/10.3390/mi14010073 - 27 Dec 2022
Cited by 2 | Viewed by 1183
Abstract
Diamond coatings were deposited on PCB (printed circuit board) carbide milling tool substrates under various schemes of acid and alkali pretreatment by hot filament chemical vapor deposition (HFCVD). Scanning electron microscopy and X-ray coating analysis were used to examine the surface morphology of [...] Read more.
Diamond coatings were deposited on PCB (printed circuit board) carbide milling tool substrates under various schemes of acid and alkali pretreatment by hot filament chemical vapor deposition (HFCVD). Scanning electron microscopy and X-ray coating analysis were used to examine the surface morphology of the milling tools and the impact of de-cobalt from the substrate surface after pretreatment. Milling experiments were carried out to study the cutting performance of diamond-coated PCB micro-milling tools under various pretreatment processes. The results show that abrasive wear, coating flaking, and cutting-edge chipping are the main failure forms of coated PCB milling tools. The substrate pretreatment process with 20 min of alkali etching followed by 20 s of acid etching allows the diamond-coated micro-milling tools to produce the best film–substrate adhesion and substrate strength. These milling tools also have the longest service lives and are suitable for the high-speed cutting processing of PCB. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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15 pages, 3074 KiB  
Article
Development of a Hybrid Intelligent Process Model for Micro-Electro Discharge Machining Using the TTM-MDS and Gaussian Process Regression
by Yanyan Chen, Xudong Guo, Guojun Zhang, Yang Cao, Dili Shen, Xiaoke Li, Shengfei Zhang and Wuyi Ming
Micromachines 2022, 13(6), 845; https://doi.org/10.3390/mi13060845 - 28 May 2022
Cited by 5 | Viewed by 1781
Abstract
This paper proposed a hybrid intelligent process model, based on a hybrid model combining the two-temperature model (TTM) and molecular dynamics simulation (MDS) (TTM-MDS). Combined atomistic-continuum modeling of short-pulse laser melting and disintegration of metal films [Physical Review B, 68, (064114):1–22.], and Gaussian [...] Read more.
This paper proposed a hybrid intelligent process model, based on a hybrid model combining the two-temperature model (TTM) and molecular dynamics simulation (MDS) (TTM-MDS). Combined atomistic-continuum modeling of short-pulse laser melting and disintegration of metal films [Physical Review B, 68, (064114):1–22.], and Gaussian process regression (GPR), for micro-electrical discharge machining (micro-EDM) were also used. A model of single-spark micro-EDM process has been constructed based on TTM-MDS model to predict the removed depth (RD) and material removal rate (MRR). Then, a GPR model was proposed to establish the relationship between input process parameters (energy area density and pulse-on duration) and the process responses (RD and MRR) for micro-EDM machining. The GPR model was trained, tested, and tuned using the data generated from the numerical simulations. Through the GPR model, it was found that micro-EDM process responses can be accurately predicted for the chosen process conditions. Therefore, the hybrid intelligent model proposed in this paper can be used for a micro-EDM process to predict the performance. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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15 pages, 5576 KiB  
Article
Micro Aspheric Convex Lenses Fabricated by Precise Scraping
by Meng-Ju Lin
Micromachines 2022, 13(5), 778; https://doi.org/10.3390/mi13050778 - 15 May 2022
Cited by 2 | Viewed by 1775
Abstract
An easy, fast, inexpensive, and simple method utilizing a microshaper with a very small knife nose is used to fabricate microconvex aspherical lenses. The microshaper is mounted on a computer numerical control (CNC) machine. To achieve an accurately designed profile of the lens [...] Read more.
An easy, fast, inexpensive, and simple method utilizing a microshaper with a very small knife nose is used to fabricate microconvex aspherical lenses. The microshaper is mounted on a computer numerical control (CNC) machine. To achieve an accurately designed profile of the lens surface, a cutter-path planning algorithm with compensation for knife interference is developed. Exerting this algorithm in CNC machining, the microconvex aspheric surface is precisely scraped. To verify the precise machining of the cutter path planning algorithm, three aspheric surfaces of conic sections (ellipsoid, paraboloid, and hyperboloid) are successfully fabricated. The profiles scraped by the microshaper agree well and precisely with the designed theoretical conic section curve. Using a simple polishing method to make the machined surface smoother, the roughness is reduced from 143 and 346 nm to 52 and 44 nm for the path line direction and its transverse direction, respectively. The micro-aspherical lenses have moderate machining properties using a simple polishing method. The results show that the designed profiles of micro-aspheric convex lenses can be machined precisely and efficiently by the microshaper with the cutter-path planning algorithm developed in this work. From the image comparison formed by the aspherical and spherical microlenses, the aspherical lenses provide a better image. It is feasible that the designed profile of the micro-aspherical lenses with specific functions could be machined using the cutter-path planning algorithm developed in this work. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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14 pages, 7859 KiB  
Article
Design of 4.7 μm High-Efficiency Hybrid Dielectric Reflection Gratings
by Ye Wang, Xiuhua Fu, Yongyi Chen, Yuxin Lei, Li Qin and Lijun Wang
Micromachines 2022, 13(4), 632; https://doi.org/10.3390/mi13040632 - 16 Apr 2022
Cited by 3 | Viewed by 2298
Abstract
Traditional reflective diffraction gratings working at 4.7 μm are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 μm period multilayer grating design using [...] Read more.
Traditional reflective diffraction gratings working at 4.7 μm are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 μm period multilayer grating design using hybrid multilayer dielectrics. With a layer of 0.353 μm Si and a layer of 0.905 μm SiO2 forming the rectangular grating, the maximum of larger than 99.99% and the overall first-order DE reached 97.88%. The usable spectrum width is larger than 0.2 μm, more than four times larger than that of the pure Si rectangular grating. This high DE multilayer grating is an ideal element for high-power laser systems with the spectrum beam combining method. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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Review

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40 pages, 17411 KiB  
Review
Functional Surface Generation by EDM—A Review
by Muhammad Abdun Nafi and Muhammad Pervej Jahan
Micromachines 2023, 14(1), 115; https://doi.org/10.3390/mi14010115 - 31 Dec 2022
Cited by 10 | Viewed by 2444
Abstract
Electro-discharge machining (EDM) removes electrically conductive materials by high frequency spark discharges between the tool electrode and the workpiece in the presence of a dielectric liquid. Being an electrothermal process and with melting and evaporation being the mechanisms of material removal, EDM suffers [...] Read more.
Electro-discharge machining (EDM) removes electrically conductive materials by high frequency spark discharges between the tool electrode and the workpiece in the presence of a dielectric liquid. Being an electrothermal process and with melting and evaporation being the mechanisms of material removal, EDM suffers from migration of materials between the tool and the workpiece. Although unwanted surface modification was considered a challenge in the past for many applications, this inherent nature of the EDM process has recently become of interest to the scientific community. As a result, researchers have been focusing on using the EDM process for surface modification and coating by targeted surface engineering. In order to engineer a surface or generate functional coatings using the electro-discharge process, proper knowledge of the EDM process and science of electro-discharge surface modification must be understood. This paper aims to provide an overview of the electro-discharge surface modification and coating processes, thus assisting the readers on exploring potential applications of EDM-based techniques of surface engineering and coating generation. This review starts with a brief introduction to the EDM process, the physics behind the EDM process, and the science of the surface modification process in EDM. The paper then discusses the reasons and purposes of surface modification and coating practices. The common EDM-based techniques reported in the literature for producing coatings on the surface are discussed with their process mechanisms, important parameters, and design considerations. The characterization techniques used for the analysis of modified surfaces and coating layers, as well as the tribological and surface properties of modified surfaces or coatings are discussed. Some of the important applications of EDM-based surface modification and coating processes are generating surfaces for protective coating, for aesthetic purposes, for enhancing the biocompatibility of implants, for improving corrosion resistance, for improving wear resistance, and for improving tribological performance. The current state of the research in these application areas is discussed with examples. Finally, suggestions are provided on future research directions and innovative potential new applications of the electro-discharge-based surface engineering and coating processes. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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