Power-MEMS and Energy Storage Devices for On-Chip Microsystems
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".
Deadline for manuscript submissions: closed (31 March 2022) | Viewed by 19400
Special Issue Editor
Interests: integration of nanomaterial into microsystem; micromachining of carbon-MEMS and integrated microdevice; power-MEMS and on-chip integrated microsystem
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
As the development of miniaturized electronics in the ascendance, much attention is focused on the study about the construction of power-MEMS and energy storage devices for on-chip microsystems, including versatile microbatteries, microsupercapacitors, energy harvesting devices, power generation devices, etc. Miniaturized energy storage devices are considered indispensable in MEMS, in addition, through integrating with multiple functional materials or devices, they can power functional systems, such as microactuators, implantable biosensors and wearable gadgets. The recent advances in high-performance power-MEMS and energy storage devices ranging from microfabrication techniques, device design, to multiple applications resulted in the increase in their energy density, power density and application potential. Particularly, multiple applications of power-MEMS with the aspects of power supply, functionalization and characterization platform show great promise and will stimulate great upsurge in interests on relevant research fields. Some practical pursuits for applications should be emphasized, such as high-resolution manufacture, rational integration of material and high energy loading, etc. Accordingly, this Special Issue seeks to showcase research papers and review articles that focus on novel developments in microfabrication, construction, performance, functional integration of power-MEMS and energy storage devices and their multiple applications.
We look forward to receiving your submissions!
Prof. Liang He
Guest Editor
Manuscript Submission Information
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Keywords
- microbattery
- supercapacitor
- textile
- MEMS
- microfabrication
- sensor
- miniaturization
- functionalization
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