Advances in Acoustic and Vibration MEMS

Dear Colleagues,

MEMS technology has accelerated the development of traditional sensors toward miniaturization, low cost, low power consumption, and array integration. Acoustic and vibration sensors are high-demand devices, such as MEMS microphones, microspeakers, MEMS hydrophones, micromachined ultrasonic transducers, film bulk acoustic resonators, and microaccelerometers, which are widely applied in consumer electronics, healthcare, industrial monitoring, marine safety, aerospace, and other fields. Innovative research on structures, simulation analysis, energy-conversion films, and fabrication techniques for acoustic and vibration sensors has the potential to significantly advance this field and broaden device applications. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel sensor structures, theoretical and numerical simulation, energy-conversion film, MEMS fabrication processes, and system integration of MEMS acoustic and vibration sensors, along with their application potential in healthcare, industrial inspection, marine safety, and aerospace.

Dr. Junhong Li
Guest Editor

Dr. Qingqing Fan
Guest Editor Assistant

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.