Pulsed Laser Micromachining

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".

Deadline for manuscript submissions: closed (31 May 2020) | Viewed by 7872

Special Issue Editor


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Guest Editor
Department of Physics & School of Chemical Sciences, The Photon Factory, The University of Auckland, Private Bag 92019, Auckland 1142, New Zealand
Interests: pulsed laser micromachining; beam and pulse shaping; ultrafast spectroscopy; photonic device R&D; photonics in the primary industries

Special Issue Information

Dear Colleagues,

Almost since its invention, the laser has been used to cut and process materials—everything from dielectrics and metals to polymers and biomaterials. Laser micromachining offers significant advantages over many mechanical machining methods, mostly in processing quality and allowing ever smaller, more precise features. The advent of ultrashort pulsed lasers, with pulse durations on or faster than the ~1 picosecond time frame for coupling between electrons and phonons, opened a new regime of laser micromachining and microprocessing. The fundamental physics of this ultrashort pulse laser ablation process is fascinating, and not yet fully understood. From a practical standpoint, these ultrashort pulses have been heralded for their ability to “cold cut” and reduce or eliminate the heat-affected zone around the ablation feature. The microprecision and feature quality can be extraordinarily good. Unfortunately, the limited energy carried by each ultrashort pulse means that micromachining with ultrashort pulses can be very slow—currently too slow for most industrial applications. This Special Issue will explore the current state-of-the-art in understanding and applying pulsed lasers to micromachine materials and to micro- and nanoprocess their surfaces. Contributions that explore fundamental mechanistic understandings for all pulse regimes as well as those that discuss applications will be welcomed. The topics to be covered include, but are not limited to the following:

  • Pulsed laser micromachining
  • Femtosecond laser micromachining
  • Picosecond laser micromachining
  • Nanosecond laser micromachining
  • CW laser micromachining
  • Mechanism of laser ablation
  • Laser ablation efficiency
  • Micromachining with pulse bursts
  • Micromachining with spatially-shaped beams
  • Laser micropatterning
  • Laser nanopatterning

Prof. M. Cather Simpson
Guest Editor

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Published Papers (2 papers)

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Research

17 pages, 7350 KiB  
Article
Facile Fabrication of Self-Similar Hierarchical Micro-Nano Structures for Multifunctional Surfaces via Solvent-Assisted UV-Lasering
by Shuo Zhang, Qin Jiang, Yi Xu, Chuan Fei Guo and Zhigang Wu
Micromachines 2020, 11(7), 682; https://doi.org/10.3390/mi11070682 - 14 Jul 2020
Cited by 10 | Viewed by 3458
Abstract
Cross-scale self-similar hierarchical micro–nano structures in living systems often provide unique features on surfaces and serve as inspiration sources for artificial materials or devices. For instance, a highly self-similar structure often has a higher fractal dimension and, consequently, a larger active surface area; [...] Read more.
Cross-scale self-similar hierarchical micro–nano structures in living systems often provide unique features on surfaces and serve as inspiration sources for artificial materials or devices. For instance, a highly self-similar structure often has a higher fractal dimension and, consequently, a larger active surface area; hence, it would have a super surface performance compared to its peer. However, artificial self-similar surfaces with hierarchical micro–nano structures and their application development have not yet received enough attention. Here, by introducing solvent-assisted UV-lasering, we establish an elegant approach to fabricate self-similar hierarchical micro–nano structures on silicon. The self-similar structure exhibits a super hydrophilicity, a high light absorbance (>90%) in an ultra-broad spectrum (200–2500 nm), and an extraordinarily high efficiency in heat transfer. Through further combinations with other techniques, such surfaces can be used for capillary assembling soft electronics, surface self-cleaning, and so on. Furthermore, such an approach can be transferred to other materials with minor modifications. For instance, by doping carbon in polymer matrix, a silicone surface with hierarchical micro–nano structures can be obtained. By selectively patterning such hierarchical structures, we obtained an ultra-high sensitivity bending sensor. We believe that such a fabrication technique of self-similar hierarchical micro–nano structures may encourage researchers to deeply explore the unique features of functional surfaces with such structures and to further discover their potentials in various applications in diverse directions. Full article
(This article belongs to the Special Issue Pulsed Laser Micromachining)
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12 pages, 4147 KiB  
Article
Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications
by Zhihong Lei, Yan Chen, Guisheng Xu, Jinfeng Liu, Maodan Yuan, Lvming Zeng, Xuanrong Ji and Dawei Wu
Micromachines 2020, 11(5), 512; https://doi.org/10.3390/mi11050512 - 19 May 2020
Cited by 8 | Viewed by 3256
Abstract
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using [...] Read more.
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN–31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d33*~1200 pm/V). Our results are promising for fabricating superior PMN–31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers. Full article
(This article belongs to the Special Issue Pulsed Laser Micromachining)
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