2025 March - 115 articles
Alignment systems are core subsystems of lithography, which directly affect the overlay accuracy of the lithography process. The Moiré fringe-based alignment method has the advantages of high precision and low complexity. However, the precisio...
This manuscript presents a new approach to describe aircraft landing gear systems equipped with magnetorheological (MR) dampers, integrating a reinforcement learning-based neural network control strategy. The main target of the proposed system is to...
Thrombospondin-2 (THBS2) is a prevailing prognostic biomarker implicated in different cancer types, such as deadly colorectal, pancreas, and triple-negative breast cancers. While the current methods for cancer-relevant protein detection, such as enzy...
In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally design...
The bandwidth and output power of underwater acoustic transmitters are important for high-performance sonar detection systems. A mismatch between the impedance of the transducer and the transmitting circuit results in a low power factor, significantl...
Continuous perfusion is necessary to sustain microphysiological systems and other microfluidic cell cultures. However, most of the established microfluidic perfusion systems, such as syringe pumps, peristaltic pumps, and rocker plates, have several o...
Thermal analysis is an indispensable aspect of semiconductor packaging. Excessive operating temperatures in integrated circuit (IC) packages can degrade component performance and even cause failure. Therefore, thermal resistance and thermal character...
A MEMS scanning mirror is a beam scanning device based on MEMS technology, which plays an important role in the fields of Lidar, medical imaging, laser projection display, and so on. The accurate measurement of the scanning mirror index can verify it...
Accurate separation in microfluidic devices is crucial for biomedical applications; however, enhancing their performance remains challenging due to computational and experimental constraints. This study aims to optimize microfluidic devices by system...
This paper introduces a method for improving the measurement performance of single wavelength overlay errors by incorporating higher diffraction orders. In this method, to enhance the accuracy and robustness of overlay error detection between layers,...
Traditional tendon-driven continuum robot (TDCR) models based on Cosserat rod theory often assume that tendon tension is a continuous wrench along the backbone. However, this assumption overlooks critical factors, including the discrete arrangement o...
To enhance the safety of lithium ternary battery cases in new energy vehicles, this study designed a temperature monitoring and fault warning system based on NiCr/NiSi thin-film thermocouples. The system integrates six modules—sensor, amplifier...
Low-frequency electromagnetic fields, induced by alternating current (AC)-based equipment such as transformers, are known to influence the physicochemical properties and function of enzymes, including their catalytic activity. Herein, we have investi...
Biosensors as advanced analytical tools have found various applications in food safety, healthcare, and environmental monitoring in rapid and specific detection of target analytes in small liquid samples. Up to now, planar electrochemical electrodes...
This study presents an artificial intelligence (AI) prediction platform driven by deep learning technologies, designed specifically to address the challenges associated with predicting warpage behavior in fan-out wafer-level packaging (FOWLP). Tradit...
Considering that neurological injuries cannot typically self-recover, there is a need to develop new methods to study neuronal outgrowth in a controllable manner in vitro. In this study, a precise flow-controlled microfluidic system featuring custom-...
Nowadays, brain–computer interface (BCI) systems are frequently used to connect individuals who have lost their mobility with the outside world. These BCI systems enable individuals to control external devices using brain signals. However, thes...
X-ray response performances of a p-NiO/β-Ga2O3 hetero-junction diode (HJD) X-ray detector were studied before and after γ-ray irradiation at −200 V, with a total dose of 13.5 kGy(Si). The response performances of the HJD X-ray detect...
Electrowetting displays (EWDs) face challenges such as oil film splitting and luminance fluctuations, hindering stable display performance. This study employed a high-precision three-dimensional simulation model to investigate and validate oil film s...
This study details the manufacture of vanadium-doped ZnS thin films via a cost-effective spray pyrolysis technique at varying concentrations of vanadium (4, 8, and 12 wt.%). The XRD data demonstrate the hexagonal structure of the vanadium-doped ZnS l...
The rapid development of deep neural networks (DNNs), such as convolutional neural networks and transformer-based large language models, has significantly advanced AI applications. However, these advances have introduced substantial computational and...
The handling and fluidization of amorphous soft solids, such as emulsions, foams, or gels, is crucial in many technological processes. This is generally achieved by applying mechanical stress that overcomes a critical threshold, known as yield stress...
The heterogeneous integration of ferroelectric thin films on silicon- or silicon nitride-based platforms for photonic integrated circuits plays a crucial role in the development of nanophotonic thin film modulators. For this purpose, an ultrathin see...
This paper reviews recent developments in highly integrated all-digital frequency synthesizers suitable to deploy in low-power internet-of-things (IoT) applications. This review sets low power consumption as a key criterion for exploring the all-digi...
To address the issues of agglomeration during magnetic particle capture and the incomplete release of these particles during reuse in microfluidic chips for library preparation, a microchamber was utilized to enhance the dispersion area for magnetic...
Fiber Bragg gratings are key components for optical fiber sensing applications in harsh environments. Microvoids, or so-called type III fiber Bragg gratings, fabricated using femtosecond lasers and the point-by-point technique, were characterized at...
Stainless steel wires exhibit excellent mechanical properties and are widely used in engineering applications. This study fabricates 15 μm stainless steel wires for potential integration into wire bonding technology for electronic packaging. The r...
The rapid development of flexible sensor technology has made flexible sensor arrays a key research area in various applications due to their exceptional flexibility, wearability, and large-area-sensing capabilities. These arrays can precisely monitor...
Information security serves as the cornerstone for ensuring the stable development of today’s highly digitized era. As cryptographic primitives with high security and robust encryption capabilities, physical unclonable functions (PUFs) are reco...
In recent years, microphysiological systems (MPS) using microfluidic technology as a new in vitro experimental system have shown promise as an alternative to animal experiments in the development of drugs, especially in the field of drug discovery, a...
The printing of composite magnetic filaments using additive manufacturing techniques has emerged as a promising approach for biomedical applications, particularly in bone tissue engineering and magnetic hyperthermia treatments. This study focuses on...
In this work, the generalized finite difference method (GFDM), a popular meshless numerical method, is employed for predicting the thermal and mechanical behavior of an electrothermal micro-actuator. Based on the concept of GFDM and discretization on...
The development of an organ-on-a-chip to reproduce organ functions requires the incorporation of a vascular network within the tissue to transport the necessary nutrients. Tissues thicker than 200 µm cannot survive without a capillary network,...
With the rapid development of fifth-generation (5G) mobile communication technology, the performance requirements for radio frequency front-end surface acoustic wave (SAW) devices have become increasingly stringent. Surface acoustic wave devices on p...
The increasing resolution requirements of imaging optical systems must be satisfied by expanding the aperture of the optical system according to Rayleigh’s criterion, and larger apertures of conventional refractive/reflective optics place a gre...
Reactive bonding can overcome the issues associated with conventional soldering processes, such as potential damage to heat-sensitive components and the creation of thermomechanical stress due to differing coefficients of thermal expansion. The risk...
This paper presents a comprehensive review of advancements in wafer-level packaging (WLP) technology, with a particular focus on its application in surface acoustic wave (SAW) and bulk acoustic wave (BAW) filters. As wireless communication systems co...
In recent years, the improvement in living standards and the corresponding increase in quality-of-life expectations have significantly increased the demand for advanced electronic products. This trend has generated great interest in human health moni...
This paper introduces a novel differential TMR-ACFM probe integrated with deep learning for crack detection and evaluation. The differential design effectively mitigates the lift-off effect and external noise, thereby enhancing detection performance...
This letter presents a scheme for obtaining a microwave photonic frequency multiplier with low phase noise, in which an optoelectronic oscillator (OEO) is integrated with a directly modulated laser (DML)-based injection-locking technique. The system...
The growing use of microfluidic-based devices necessitates an analysis of flow characteristics through both experimental methods and computational fluid dynamic (CFD) simulations. CFD simulations facilitate the investigation of various devices, inclu...
High-performance optical isolators are key components in photonic integrated circuits, with significant applications in nonlinear optical systems. We propose a design for a TE-mode optical isolator based on the AlGaAs-on-insulator platform. The isola...
Leaf spring-type flexible hinges serve as critical transmission components in kilogram quantization energy balance systems. Investigating their bending behavior is crucial for enhancing measurement accuracy and ensuring structural reliability. This w...
Triboelectric nanogenerators (TENGs) can convert the mechanical energy of physical activities into electricity. This is particularly useful in sports applications, where physical activity can power devices such as wearables that can provide real-time...
Directly degrading the dyes in the wastewater is a missed opportunity. Herein, we propose a solution employing a microfluidic chip to construct a photocatalytic fuel cell (PFC) system, which can efficiently degrade tetracycline while generating elect...
Gate-All-Around (GAA) Nanosheet (NS) transistors have been identified as the device architecture for 3 nm and beyond as they provide additional scaling benefits. The Hot Carrier (HC) effect cannot be ignored in the development of metal oxide semicond...
Thin-walled micro-structures are a critical component of micro-devices, and their precise manufacture has a direct impact on product performance. Micro-milling is an effective manufacturing method that enables the production of micro-thin-walled stru...
Miniaturized components for enhanced integrated functionality or thin sheets for lightweight applications often consist of face-centered cubic metals. They exhibit good strength, corrosion resistance, formability and recyclability. Microfabrication t...
This article discusses the design of a high-performance quasi-optical mode converter for the
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