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A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (28 February 2022) | Viewed by 30373

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Prof. Dr. Kai Tao

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Guest Editor

School of Mechanical Engineering, Northwestern Polytechnical University, Xi'an 710072, China
Interests: MEMS; energy harvesting; powerMEMS; flexible electronics

Prof. Dr. Yunjia Li

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Guest Editor

School of Electrical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Interests: MEMS; energy harvesting; microactuators; sensor systems

Special Issue Information

Dear Colleagues,

The Internet of things (IoT) poses new challenges for sensor devices and their power systems. The deployment of large numbers of sensor nodes requires the sensor to work for a sufficient period of time without battery replacement. Micro/nano energy harvesting systems as self-sustained power sources are capable of capturing and transforming unused ambient energy into electrical energy. They have been regarded as an alternative to conventional electrochemical batteries, which will pave the way for actualizing energy-autonomous devices and intelligent monitoring activities. By integrating the micro/nano power sources with IoT, it would be a revolutionary technology in the next decades. In addition, as most of the vibration energy harvester devices are sensitive to vibration, they are inherently considered excellent candidates for vibration sensing.

The purpose of this Special Issue is to gather the latest developments in smart devices and systems for vibration sensing and energy harvesting applications. We welcome original manuscripts with new principles, designs, structures, fabrication processes, system integration methodologies, and applications in the field of vibration sensing and energy harvesting. Review articles summarizing the current state of understanding of a particular topic in the field are also welcome.

Prof. Dr. Kai Tao
Prof. Dr. Yunjia Li
Guest Editors

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Keywords

self-powered sensors
vibration energy harvesting
inertial sensing
smart structures and systems

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Published Papers (12 papers)

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Editorial

Jump to: Research

3 pages, 181 KiB

Open AccessEditorial

Editorial for the Special Issue on Smart Devices and Systems for Vibration Sensing and Energy Harvesting

by Kai Tao and Yunjia Li

Micromachines 2023, 14(1), 173; https://doi.org/10.3390/mi14010173 - 10 Jan 2023

Viewed by 1237

Abstract

The Internet of things (IoT) poses new challenges for sensors and their power systems [...] Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

Research

Jump to: Editorial

13 pages, 3984 KiB

Open AccessArticle

Vibration Energy Harvester Based on Torsionally Oscillating Magnet

by Xinyi Wang, Jiaxing Li, Chenyuan Zhou, Kai Tao, Dayong Qiao and Yunjia Li

Micromachines 2021, 12(12), 1545; https://doi.org/10.3390/mi12121545 - 12 Dec 2021

Cited by 3 | Viewed by 2612

Abstract

Most of the miniaturized electromagnetic vibrational energy harvesters (EVEHs) are based on oscillating proof mass suspended by several springs or a cantilever structure. Such structural feature limits the miniaturization of the device’s footprint. This paper presents an EVEH device based on a torsional vibrating magnet over a stack of flexible planar coils. The torsional movement of the magnet is enabled by microfabricated silicon torsional springs, which effectively reduce the footprint of the device. With a size of 1 cm × 1 cm × 1.08 cm, the proposed EVEH is capable of generating an open-circuit peak-to-peak voltage of 169 mV and a power of 6.9 μW, under a sinusoidal excitation of ±0.5 g (g = 9.8 m/s²) and frequency of 96 Hz. At elevated acceleration levels, the maximum peak-to-peak output voltage is 222 mV under the acceleration of 7 g (±3.5 g). Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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13 pages, 12066 KiB

Open AccessArticle

Analysis of the Influence of Ferromagnetic Material on the Output Characteristics of Halbach Array Energy-Harvesting Structure

by Xiangyong Zhang, Haipeng Liu, Yunli He, Tingrui Peng, Bin Su and Huiyuan Guan

Micromachines 2021, 12(12), 1541; https://doi.org/10.3390/mi12121541 - 11 Dec 2021

Cited by 2 | Viewed by 2430

Abstract

Due to the particular arrangement of permanent magnets, a Halbach array has an significant effect of magnetism and magnetic self-shielding. It can stretch the magnetic lines on one side of the magnetic field to obtain an ideal sinusoidal unilateral magnetic field. It has a wide application range in the field of energy harvesting. In practical applications, magnetic induction intensity of each point in magnetic field is not only related to the induced current and conductor but also related to the permeability of the medium (also known as a magnetic medium) in the magnetic field. Permeability is the physical quantity that represents the magnetism of the magnetic medium, which indicates the resistance of magnetic flux or the ability of magnetic lines to be connected in the magnetic field after coil flows through current in space or in the core space. When the permeability is much greater than one, it is a ferromagnetic material. Adding a ferromagnetic material in a magnetic field can increase the magnetic induction intensity B. Iron sheet is a good magnetic material, and it is easy to magnetize to generate an additional magnetic field to strengthen the original magnetic field, and it is easy to obtain at low cost. In this paper, in order to explore the influence of ferromagnetic material on the magnetic field and energy harvesting efficiency of the Halbach array energy harvesting structure, iron sheets are installed on the periphery of the Halbach array rotor. Iron sheet has excellent magnetic permeability. Through simulation, angle between iron sheet and Halbach array, radian size of iron sheet itself and distance between iron sheet and Halbach array can all have different effects on the magnetic field of the Halbach array. It shows that adding iron sheets as a magnetic medium could indeed change the magnetic field distribution of the Halbach array and increase energy harvesting efficiency. In this paper, a Halbach array can be used to provide electrical power for passive wireless low-power devices. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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12 pages, 2664 KiB

Open AccessArticle

An Electret/Hydrogel-Based Tactile Sensor Boosted by Micro-Patterned and Electrostatic Promoting Methods with Flexibility and Wide-Temperature Tolerance

by Zhensheng Chen, Jiahao Yu, Haozhe Zeng, Zhao Chen, Kai Tao, Jin Wu and Yunjia Li

Micromachines 2021, 12(12), 1462; https://doi.org/10.3390/mi12121462 - 27 Nov 2021

Cited by 9 | Viewed by 2964

Abstract

With the rising demand for wearable, multifunctional, and flexible electronics, plenty of efforts aiming at wearable devices have been devoted to designing sensors with greater efficiency, wide environment tolerance, and good sustainability. Herein, a thin film of double-network ionic hydrogel with a solution replacement treatment method is fabricated, which not only possesses excellent stretchability (>1100%) and good transparency (>80%), but also maintains a wide application temperature range (−10~40 °C). Moreover, the hydrogel membrane further acts as both the flexible electrode and a triboelectric layer, with a larger friction area achieved through a micro-structure pattern method. Combining this with a corona-charged fluorinated ethylene propylene (FEP) film, an electret/hydrogel-based tactile sensor (EHTS) is designed and fabricated. The output performance of the EHTS is effectively boosted by 156.3% through the hybrid of triboelectric and electrostatic effects, which achieves the open-circuit peak voltage of 12.5 V, short-circuit current of 0.5 μA, and considerable power of 4.3 μW respectively, with a mentionable size of 10 mm × 10 mm × 0.9 mm. The EHTS also demonstrates a stable output characteristic within a wide range of temperature tolerance from −10 to approximately 40 °C and can be further integrated into a mask for human breath monitoring, which could provide for a reliable healthcare service during the COVID-19 pandemic. In general, the EHTS shows excellent potential in the fields of healthcare devices and wearable electronics. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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14 pages, 28774 KiB

Open AccessArticle

Electromagnetic Vibration Energy Harvester with Tunable Resonance Frequency Based on Stress Modulation of Flexible Springs

by Yunjia Li, Chenyuan Zhou, Qi Cao, Xinyi Wang, Dayong Qiao and Kai Tao

Micromachines 2021, 12(9), 1130; https://doi.org/10.3390/mi12091130 - 20 Sep 2021

Cited by 12 | Viewed by 2483

Abstract

This paper presents a compact electromagnetic vibrational energy harvester (EVEH) with tunable resonance frequency. The resonance frequency of the EVEH is tuned by adjusting the axial stress in the flexible polymeric springs, which is realized by physically pulling and pushing the springs. The stress tuning functionality is realized with a compact structure with small volume. The total frequency tuning range of the proposed EVEH is 56 Hz (74–130 Hz), which is 64% of the natural resonance frequency of the EVEH (88 Hz). It is found that the tensile stress increases the resonance frequency of the EVEH, while the compressive stress firstly reduces the resonance frequency and then increases the resonance frequency due to buckling. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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16 pages, 5281 KiB

Open AccessArticle

All-in-One High-Power-Density Vibrational Energy Harvester with Impact-Induced Frequency Broadening Mechanisms

by Yongqi Cao, Weihe Shen, Fangzhi Li, Huan Qi, Jiaxiang Wang, Jianren Mao, Yang Yang and Kai Tao

Micromachines 2021, 12(9), 1083; https://doi.org/10.3390/mi12091083 - 8 Sep 2021

Cited by 6 | Viewed by 2325

Abstract

This paper proposes an electrostatic-piezoelectric-electromagnetic hybrid vibrational power generator with different frequency broadening schemes. Both the nonlinear frequency broadening mechanisms and the synergized effect of the electrostatic-piezoelectric-electromagnetic hybrid structures are investigated. The structure and performance of the composite generator are optimized to improve the response bandwidth and performance. We propose that the electrostatic power generation module and the electromagnetic power generation module be introduced into the cantilever beam to make the multifunctional cantilever beam, realizing small integrated output loss, high output voltage, and high current characteristics. When the external load of the electrostatic power generation module is 10 kΩ, its peak power can reach 3.6 mW; when the external load of the piezoelectric power generation module is 2 kΩ, its peak power is 2.2 mW; and when the external load of the electromagnetic power generation module is 170 Ω, its peak power is 0.735 mW. This means that under the same space utilization, the performance is improved by 90%. Moreover, an energy management circuit (ECM) at the rear end of the device is added, through the energy conditioning circuit, the device can directly export a 3.3 V DC voltage to supply power to most of the sensing equipment. In this paper, the hybrid generator’s structure and performance are optimized, and the response bandwidth and performance are improved. In general, the primary advantages of the device in this paper are its larger bandwidth and enhanced performance. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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15 pages, 10877 KiB

Open AccessArticle

Time-Domain Dynamic Characteristics Analysis and Experimental Research of Tri-Stable Piezoelectric Energy Harvester

by Xuhui Zhang, Luyang Chen, Xiaoyu Chen, Fulin Zhu and Yan Guo

Micromachines 2021, 12(9), 1045; https://doi.org/10.3390/mi12091045 - 29 Aug 2021

Cited by 6 | Viewed by 2003

Abstract

In order to explore the dynamic characteristics of the linear-arch beam tri-stable piezoelectric energy harvester (TPEH), a magnetic force model was established by the magnetic dipole method, and the linear-arch composite beam nonlinear restoring force model was obtained through experiments. Based on the Euler–Bernoulli beam theory, a system dynamic model is established, and the influence of the horizontal distance, vertical distance and excitation acceleration of magnets on the dynamic characteristics of the system is simulated and analyzed. Moreover, the correctness of the theoretical results is verified by experiments. The results show that the system can be mono-stable, bi-stable and tri-stable by adjusting the horizontal or vertical spacing of the magnets under proper excitation. The potential well of the system in the tri-stable state is shallow, and it is easier to achieve a large-amplitude response. Increasing the excitation level is beneficial for the large-amplitude response of the system. This study provides theoretical guidance for the design of linear-arch beam TPEH. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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15 pages, 3676 KiB

Open AccessArticle

A Curve-Shaped Beam Bistable Piezoelectric Energy Harvester with Variable Potential Well: Modeling and Numerical Simulation

by Xiaoyu Chen, Xuhui Zhang, Luyang Chen, Yan Guo and Fulin Zhu

Micromachines 2021, 12(8), 995; https://doi.org/10.3390/mi12080995 - 21 Aug 2021

Cited by 10 | Viewed by 2783

Abstract

To improve the energy harvesting performance of an energy harvester, a novel bistable piezoelectric energy harvester with variable potential well (BPEH-V) is proposed by introducing a spring to the external magnet from a curve-shaped beam bistable harvester (CBH-C). First, finite element simulation was performed in COMSOL software to validate that the curved beam configuration was superior to the straight beam in power generation performance, which benefits energy harvesting. Moreover, the nonlinear magnetic model was obtained by using the magnetic dipoles method, and the nonlinear restoring force model of the curve-shaped beam was acquired based on fitting the experimental data. The corresponding coupled governing equations were derived by using generalized Hamilton’s principle, the dynamic responses were obtained by solving the coupling equations with the ode45 method. Finally, the numerical simulations showed that the proposed harvester can make interwell oscillations easier due to the spring being efficiently introduced to pull down the potential barrier compared with the conventional bistable harvester. Spring stiffness has a great impact on characteristics of the system, and a suitable stiffness contributes to realize large-amplitude interwell oscillations over a wide range of excitation, especially in the low excitation condition. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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7 pages, 3564 KiB

Open AccessArticle

Design and Performance Evaluation of a Single-Phase Driven Ultrasonic Motor Using Bending-Bending Vibrations

by Dongmei Xu, Wenzhong Yang, Xuhui Zhang and Simiao Yu

Micromachines 2021, 12(8), 853; https://doi.org/10.3390/mi12080853 - 21 Jul 2021

Cited by 16 | Viewed by 2008

Abstract

An ultrasonic motor as a kind of smart material drive actuator has potential in robots, aerocraft, medical operations, etc. The size of the ultrasonic motor and complex circuit limits the further application of ultrasonic motors. In this paper, a single-phase driven ultrasonic motor using Bending-Bending vibrations is proposed, which has advantages in structure miniaturization and circuit simplification. Hybrid bending vibration modes were used, which were excited by only single-phase voltage. The working principle based on an oblique line trajectory is illustrated. The working bending vibration modes and resonance frequencies of the bending vibration modes were calculated by the finite element method to verify the feasibility of the proposed ultrasonic motor. Additionally, the output performance was evaluated by experiment. This paper provides a single-phase driven ultrasonic motor using Bending-Bending vibrations, which has advantages in structure miniaturization and circuit simplification. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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22 pages, 4403 KiB

Open AccessArticle

Hydraulic Integrated Interconnected Regenerative Suspension: Modeling and Characteristics Analysis

by Sijing Guo, Liang Chen, Xikai Wang, Junyi Zou and Sanbao Hu

Micromachines 2021, 12(7), 733; https://doi.org/10.3390/mi12070733 - 22 Jun 2021

Cited by 12 | Viewed by 2468

Abstract

A novel suspension system, the hydraulic integrated interconnected regenerative suspension (HIIRS), has been proposed recently. This paper demonstrates the vibration and energy harvesting characteristics of the HIIRS. The HIIRS model is established as a set of coupled, frequency-dependent equations with the hydraulic impedance method. The mechanical–fluid boundary condition in the double-acting cylinders is modelled as an external force on the mechanical system and a moving boundary on the fluid system. By integrating the HIIRS into a half car model, its free and forced vibration analyses are conducted and compared with an equivalent traditional off-road vehicle. Results show that the natural frequency and the damping ratio of the HIIRS-equipped vehicle are within a proper range of a normal off-road vehicle. The root mean square values of the bounce and roll acceleration of the HIIRS system are, respectively, 64.62 and 11.21% lower than that of a traditional suspension. The average energy harvesting power are 186.93, 417.40 and 655.90 W at the speeds of 36, 72 and 108 km/h for an off-road vehicle on a Class-C road. The results indicate that the HIIRS system can significantly enhance the vehicle dynamics and harvest the vibration energy simultaneously. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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8 pages, 3890 KiB

Open AccessArticle

Stretchable Strain Sensor with Controllable Negative Resistance Sensitivity Coefficient Based on Patterned Carbon Nanotubes/Silicone Rubber Composites

by Rong Dong and Jianbing Xie

Micromachines 2021, 12(6), 716; https://doi.org/10.3390/mi12060716 - 19 Jun 2021

Cited by 6 | Viewed by 2822

Abstract

In this paper, stretchable strain sensors with a controllable negative resistance sensitivity coefficient are firstly proposed. In order to realize the sensor with a negative resistance sensitivity coefficient, a stretchable stress sensor with sandwich structure is designed in this paper. Carbon nanotubes are added between two layers of silica gel. When the sensor is stretched, carbon nanotubes will be squeezed at the same time, so the sensor will show a resistance sensitivity coefficient that the resistance becomes smaller after stretching. First, nanomaterials are coated on soft elastomer, then a layer of silica gel is wrapped on the outside of the nanomaterials. In this way, similar to sandwich biscuits, a stretchable strain sensor with controllable negative resistance sensitivity coefficient has been obtained. Because the carbon nanotubes are wrapped between two layers of silica gel, when the silica gel is stretched, the carbon nanotubes will be squeezed longitudinally, which increases their density and resistance. Thus, a stretchable strain sensor with negative resistance sensitivity coefficient can be realized, and the resistivity can be controlled and adjusted from 12.7 Ω·m to 403.2 Ω·m. The sensor can be used for various tensile testing such as human motion monitoring, which can effectively expand the application range of conventional tensile strain sensor. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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14 pages, 4645 KiB

Open AccessArticle

A Microtester for Measuring the Reliability of Microdevices in Controlled Environmental Conditions

by Yunjia Li, Weitao Dou, Chenyuan Zhou, Xinyi Wang, Aijun Yang, Yong Zhang and Dayong Qiao

Micromachines 2021, 12(5), 585; https://doi.org/10.3390/mi12050585 - 20 May 2021

Cited by 3 | Viewed by 2419

Abstract

A miniaturized reliability test system for microdevices with controlled environmental parameters is presented. The system is capable of measuring key electrical parameters of the microdevices while controlling the environmental conditions around the microdevices. The test system is compact and thus can be integrated with standard test equipment for microdevices. By using a feed-forward decoupling algorithm, the presented test system is capable of generating a temperature range of 0–120 °C and a humidity range of 20–90% RH (0–55 °C), within a small footprint and weight. The accuracy for temperature and humidity control is ±0.1 °C and ±1% RH (30 °C), respectively. The functionality of the proposed test system is verified by integrating it with a piezo shaker to test the environmental reliability of an electromagnetic vibration energy harvester. The proposed system can be used as a proof-of-technology platform for characterizing the performance of microdevices with controlled environmental parameters. Full article

(This article belongs to the Special Issue Smart Devices and Systems for Vibration Sensing and Energy Harvesting)

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