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23 Results Found

  • Article
  • Open Access
20 Citations
5,928 Views
13 Pages

On the Feasibility of Fan-Out Wafer-Level Packaging of Capacitive Micromachined Ultrasound Transducers (CMUT) by Using Inkjet-Printed Redistribution Layers

  • Ali Roshanghias,
  • Marc Dreissigacker,
  • Christina Scherf,
  • Christian Bretthauer,
  • Lukas Rauter,
  • Johanna Zikulnig,
  • Tanja Braun,
  • Karl-F. Becker,
  • Sven Rzepka and
  • Martin Schneider-Ramelow

Fan-out wafer-level packaging (FOWLP) is an interesting platform for Microelectromechanical systems (MEMS) sensor packaging. Employing FOWLP for MEMS sensor packaging has some unique challenges, while some originate merely from the fabrication of red...

(This article belongs to the Special Issue MEMS Packaging Technologies and 3D Integration)
  • Systematic Review
  • Open Access
9 Citations
7,300 Views
40 Pages

Systematic Review of Commercially Available Clinical CMUT-Based Systems for Use in Medical Ultrasound Imaging: Products, Applications, and Performance

  • Ahmed Sewify,
  • Maria Antico,
  • Laith Alzubaidi,
  • Haider A. Alwzwazy,
  • Jacqueline Roots,
  • Peter Pivonka and
  • Davide Fontanarosa

2 April 2025

An emerging alternative to conventional piezoelectric technologies, which continue to dominate the ultrasound medical imaging (US) market, is Capacitive Micromachined Ultrasonic Transducers (CMUTs). Ultrasound transducers based on this technology off...

(This article belongs to the Special Issue Biomedical Sensors: New Technologies, Integration and Signal Processing)
  • Article
  • Open Access
9 Citations
4,359 Views
15 Pages

Wafer-Bonding Fabricated CMUT Device with Parylene Coating

  • Changde He,
  • Binzhen Zhang,
  • Chenyang Xue,
  • Wendong Zhang and
  • Shengdong Zhang

The advantages of the capacitive micromachined ultrasound transducer (CMUT) technology have provided revolutionary advances in ultrasound imaging. Extensive research on CMUT devices for high-frequency medical imaging applications has been conducted b...

(This article belongs to the Section E: Engineering and Technology)
  • Review
  • Open Access
2 Citations
1,792 Views
45 Pages

16 April 2026

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed over the past 30 years and achieved practical applications in both medical imaging and industrial non-destructive testing. This article presents the fundamental principles of...

(This article belongs to the Special Issue Micromachined Ultrasonic Transducers: Design, Fabrication and Applications)
  • Article
  • Open Access
1 Citations
1,656 Views
23 Pages

An Annular CMUT Array and Acquisition Strategy for Continuous Monitoring

  • María José Almario Escorcia,
  • Amir Gholampour,
  • Rob van Schaijk,
  • Willem-Jan de Wijs,
  • Andre Immink,
  • Vincent Henneken,
  • Richard Lopata and
  • Hans-Martin Schwab

29 October 2025

In many monitoring scenarios, repeated and operator-independent assessments are needed. Wearable ultrasound technology has the potential to continuously provide the vital information traditionally obtained from conventional ultrasound scanners, such...

(This article belongs to the Special Issue Wearable Physiological Sensors for Smart Healthcare)
  • Article
  • Open Access
17 Citations
5,967 Views
14 Pages

20 February 2019

With Capacitive Micromachined Ultrasound Transducers (CMUTs) increasingly being used for high intensity, large signal ultrasound applications and several drive methods being proposed, the efficiency of these devices in this operation regime have not...

(This article belongs to the Special Issue Ultrasound Transducers)
  • Article
  • Open Access
2 Citations
3,803 Views
13 Pages

Design, Fabrication, and Characterization of Capacitive Micromachined Ultrasonic Transducers for Transcranial, Multifocus Neurostimulation

  • Tamzid Ibn Minhaj,
  • Muhammetgeldi Annayev,
  • Oluwafemi J. Adelegan,
  • Ali Önder Biliroğlu,
  • Feysel Yalçın Yamaner and
  • Ömer Oralkan

30 August 2024

In a recent study using 3-D fullwave simulations, it was shown for a nonhuman primate model that a helmet-shaped 3D array of 128 transducer elements can be assembled for neurostimulation in an optimized configuration with the accommodation of an imag...

(This article belongs to the Special Issue MEMS Ultrasonic Transducers)
  • Review
  • Open Access
170 Citations
17,128 Views
27 Pages

Advances in Capacitive Micromachined Ultrasonic Transducers

  • Kevin Brenner,
  • Arif Sanli Ergun,
  • Kamyar Firouzi,
  • Morten Fischer Rasmussen,
  • Quintin Stedman and
  • Butrus (Pierre) Khuri–Yakub

23 February 2019

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream...

(This article belongs to the Special Issue MEMS Technology for Biomedical Imaging Applications)
  • Article
  • Open Access
7 Citations
3,855 Views
12 Pages

A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

  • Tian Zhang,
  • Wendong Zhang,
  • Xingling Shao,
  • Yuhua Yang,
  • Zhihao Wang,
  • Yang Wu and
  • Yu Pei

11 June 2021

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to red...

  • Article
  • Open Access
21 Citations
7,797 Views
14 Pages

Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding

  • Ziyuan Wang,
  • Changde He,
  • Wendong Zhang,
  • Yifan Li,
  • Pengfei Gao,
  • Yanan Meng,
  • Guojun Zhang,
  • Yuhua Yang,
  • Renxin Wang and
  • Sai Zhang
  • + 6 authors

8 January 2022

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further de...

  • Article
  • Open Access
14 Citations
5,523 Views
14 Pages

9 January 2021

The aim of this work was to extend conventional medical implants by the possibility of communication between them. For reasons of data security and transmitting distances, this communication should be realized using ultrasound, which is generated and...

(This article belongs to the Special Issue Sensors and Actuators for Wearable and Implantable Devices)
  • Review
  • Open Access
43 Citations
12,312 Views
24 Pages

Photoacoustic Imaging with Capacitive Micromachined Ultrasound Transducers: Principles and Developments

  • Jasmine Chan,
  • Zhou Zheng,
  • Kevan Bell,
  • Martin Le,
  • Parsin Haji Reza and
  • John T.W. Yeow

20 August 2019

Photoacoustic imaging (PAI) is an emerging imaging technique that bridges the gap between pure optical and acoustic techniques to provide images with optical contrast at the acoustic penetration depth. The two key components that have allowed PAI to...

(This article belongs to the Section Physical Sensors)
  • Feature Paper
  • Review
  • Open Access
43 Citations
13,627 Views
42 Pages

MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications

  • Haoran Wang,
  • Yifei Ma,
  • Hao Yang,
  • Huabei Jiang,
  • Yingtao Ding and
  • Huikai Xie

12 October 2020

Photoacoustic imaging (PAI) is drawing extensive attention and gaining rapid development as an emerging biomedical imaging technology because of its high spatial resolution, large imaging depth, and rich optical contrast. PAI has great potential appl...

(This article belongs to the Section A: Physics)
  • Article
  • Open Access
8 Citations
3,416 Views
14 Pages

14 August 2021

Ultrasound computed tomography (USCT) systems based on capacitive micromachined ultrasonic transducer (CMUT) arrays have a wide range of application prospects. For this paper, a high-precision image reconstruction method based on the propagation path...

  • Article
  • Open Access
4 Citations
4,572 Views
20 Pages

Analysis of Collapse–Snapback Phenomena in Capacitive Micromachined Ultrasound Transducers

  • Chloé Halbach,
  • Veronique Rochus,
  • Jan Genoe,
  • Xavier Rottenberg,
  • David Cheyns and
  • Paul Heremans

29 January 2025

The pull-in and pull-out voltages are important characteristics of Capacitive Micromachined Ultrasound Transducers (CMUTs), marking the transition between conventional and collapse operation regimes. These voltages are commonly determined using capac...

(This article belongs to the Special Issue MEMS Ultrasonic Transducers)
  • Article
  • Open Access
901 Views
20 Pages

1 March 2026

Capacitive micromachined ultrasonic transducers (CMUTs) are a promising alternative to conventional piezoelectric transducers, offering superior design flexibility and broadband operational characteristics. However, their clinical and practical deplo...

(This article belongs to the Special Issue Electronic Test and Measurement Instrumentation: Design and Applications (2nd Edition))
  • Article
  • Open Access
5 Citations
2,842 Views
12 Pages

Inkjet-Printed Functionalization of CMUT-Based CO2 Sensors

  • Dovydas Barauskas,
  • Donatas Pelenis,
  • Mindaugas Dzikaras,
  • Marius Mikolajunas,
  • Gailius Vanagas and
  • Darius Virzonis

16 March 2022

The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO2 sensors is addressed, and the CMUT surface modification process by thin inkjet-printed...

(This article belongs to the Section Chemical Sensors)
  • Article
  • Open Access
1 Citations
1,994 Views
18 Pages

Radiation Impedance of Rectangular CMUTs

  • Shayan Khorassany,
  • Eric B. Dew,
  • Mohammad Rahim Sobhani and
  • Roger J. Zemp

7 September 2024

Recently, capacitive micromachined ultrasound transducers (CMUTs) with long rectangular membranes have demonstrated performance advantages over conventional piezoelectric transducers; however, modeling these CMUT geometries has been limited to comput...

(This article belongs to the Section Sensors Development)
  • Letter
  • Open Access
5 Citations
4,007 Views
12 Pages

An Integrated Front-end Circuit Board for Air-Coupled CMUT Burst-Echo Imaging

  • Lei Ye,
  • Jian Li,
  • Hui Zhang,
  • Dongmei Liang and
  • Zhuochen Wang

28 October 2020

To conduct burst-echo imaging with air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using the same elements in transmission and reception, this work proposes a dedicated and integrated front-end circuit board design to build an ima...

(This article belongs to the Section Sensing and Imaging)
  • Article
  • Open Access
2 Citations
2,434 Views
13 Pages

Acoustic Streaming Efficiency in a Microfluidic Biosensor with an Integrated CMUT

  • Donatas Pelenis,
  • Gailius Vanagas,
  • Dovydas Barauskas,
  • Mindaugas Dzikaras,
  • Marius Mikolajūnas and
  • Darius Viržonis

The effect of microchannel height on acoustic streaming velocity and capacitive micromachined ultrasound transducer (CMUT) cell damping was investigated. Microchannels with heights ranging from 0.15 to 1.75 mm were used in experiments, and computatio...

(This article belongs to the Section B1: Biosensors)
  • Article
  • Open Access
3 Citations
2,107 Views
19 Pages

Design of Zeolitic Imidazolate Framework-8-Functionalized Capacitive Micromachined Ultrasound Transducer Gravimetric Sensors for Gas and Hydrocarbon Vapor Detection

  • Mindaugas Dzikaras,
  • Dovydas Barauskas,
  • Donatas Pelenis,
  • Gailius Vanagas,
  • Marius Mikolajūnas,
  • Jingming Shi,
  • Jonas Baltrusaitis and
  • Darius Viržonis

30 October 2023

A capacitive micromachined ultrasound transducer (CMUT) was engineered and functionalized with zeolitic imidazolate framework-8 (ZIF-8) dispersed in a photoresist AZ1512HS (AZ) matrix to function as a gravimetric gas sensor. The sensor response was r...

(This article belongs to the Section Physical Sensors)
  • Article
  • Open Access
21 Citations
6,269 Views
20 Pages

Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

  • Dovydas Barauskas,
  • Donatas Pelenis,
  • Gailius Vanagas,
  • Darius Viržonis and
  • Jonas Baltrušaitis

23 July 2019

A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The cr...

(This article belongs to the Special Issue Infrared Spectroscopy and Sensors)
  • Article
  • Open Access
4 Citations
2,830 Views
17 Pages

Four-Channel Ultrasonic Sensor for Bulk Liquid and Biochemical Surface Interrogation

  • Donatas Pelenis,
  • Dovydas Barauskas,
  • Mindaugas Dzikaras and
  • Darius Viržonis

26 January 2024

Custom electronics tailored for ultrasonic applications with four ultrasonic transmit-receive channels and a nominal 25 MHz single channel frequency were developed for ultrasound BAW and SAW biosensor uses. The designed integrated microcontroller, su...

(This article belongs to the Special Issue Biosensors Based on Microfluidic Devices)