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Keywords = focused electron beam-induced deposition

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56 pages, 2573 KB  
Review
A Review of Optimization of Additively Manufactured 316/316L Stainless Steel Process Parameters, Post-Processing Strategies, and Defect Mitigation
by Usman Aziz, Marion McAfee, Ioannis Manolakis, Nick Timmons and David Tormey
Materials 2025, 18(12), 2870; https://doi.org/10.3390/ma18122870 - 17 Jun 2025
Cited by 4 | Viewed by 1410
Abstract
The rapid progress in additive manufacturing (AM) has unlocked significant possibilities for producing 316/316L stainless steel components, particularly in industries requiring high precision, enhanced mechanical properties, and intricate geometries. However, the widespread adoption of AM—specifically Directed energy deposition (DED), selective laser melting (SLM), [...] Read more.
The rapid progress in additive manufacturing (AM) has unlocked significant possibilities for producing 316/316L stainless steel components, particularly in industries requiring high precision, enhanced mechanical properties, and intricate geometries. However, the widespread adoption of AM—specifically Directed energy deposition (DED), selective laser melting (SLM), and electron beam melting (EBM) remains challenged by inherent process-related defects such as residual stresses, porosity, anisotropy, and surface roughness. This review critically examines these AM techniques, focusing on optimizing key manufacturing parameters, mitigating defects, and implementing effective post-processing treatments. This review highlights how process parameters including laser power, energy density, scanning strategy, layer thickness, build orientation, and preheating conditions directly affect microstructural evolution, mechanical properties, and defect formation in AM-fabricated 316/316L stainless steel. Comparative analysis reveals that SLM excels in achieving refined microstructures and high precision, although it is prone to residual stress accumulation and porosity. DED, on the other hand, offers flexibility for large-scale manufacturing but struggles with surface finish and mechanical property consistency. EBM effectively reduces thermal-induced residual stresses due to its sustained high preheating temperatures (typically maintained between 700 °C and 850 °C throughout the build process) and vacuum environment, but it faces limitations related to resolution, cost-effectiveness, and material applicability. Additionally, this review aligns AM techniques with specific defect reduction strategies, emphasizing the importance of post-processing methods such as heat treatment and hot isostatic pressing (HIP). These approaches enhance structural integrity by refining microstructure, reducing residual stresses, and minimizing porosity. By providing a comprehensive framework that connects AM techniques optimization strategies, this review serves as a valuable resource for academic and industry professionals. It underscores the necessity of process standardization and real-time monitoring to improve the reliability and consistency of AM-produced 316/316L stainless steel components. A targeted approach to these challenges will be crucial in advancing AM technologies to meet the stringent performance requirements of various high-value industrial applications. Full article
(This article belongs to the Section Manufacturing Processes and Systems)
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20 pages, 5573 KB  
Article
New Gold(I) Complexes as Potential Precursors for Gas-Assisted Methods: Structure, Volatility, Thermal Stability, and Electron Sensitivity
by Aleksandra Butrymowicz-Kubiak, Tadeusz M. Muzioł, Piotr Madajski and Iwona B. Szymańska
Molecules 2025, 30(1), 146; https://doi.org/10.3390/molecules30010146 - 2 Jan 2025
Cited by 1 | Viewed by 1171
Abstract
We report the synthesis and characterization of new, user-friendly gold(I) [Au4(μ-(NH)2CC2F5)4]n coordination polymer and [Au2Cl2(NH2(NH=)CC2F5)2]n complex. These compounds were [...] Read more.
We report the synthesis and characterization of new, user-friendly gold(I) [Au4(μ-(NH)2CC2F5)4]n coordination polymer and [Au2Cl2(NH2(NH=)CC2F5)2]n complex. These compounds were investigated for potential application as precursors in chemical vapor deposition (CVD) and focused electron/ion beam-induced deposition (FEBID/FIBID), which are additive methods to produce nanomaterials. Single-crystal X-ray diffraction, elemental analysis, and infrared spectroscopy were used to determine the complexes’ composition and structure. We studied their thermal stability and volatility using thermal analysis and variable-temperature infrared spectroscopy (VT IR) and by conducting sublimation experiments. The gold(I) amidinate [Au2(μ-(NH)2CC2F5)2]n sublimates at 413 K under 10−2 mbar pressure. The electron-induced decomposition of the complexes’ molecules in the gas phase and of their thin layers on silicon substrates was analyzed using electron impact mass spectrometry (EI MS) and microscopy studies (SEM/EDX), respectively, to provide insights for FEBID and FIBID precursor design. The [Au2Cl2(NH2(NH=)CC2F5)2]n hydrogen chloride molecules evolved during heating, with the formation of gold(I) amidinate. The obtained results revealed that the new gold(I) amidinate may be a promising source of metal for nanomaterial fabrication by gas-assisted methods. Full article
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9 pages, 2782 KB  
Communication
Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition
by Robert Winkler, Michele Brugger-Hatzl, Fabrizio Porrati, David Kuhness, Thomas Mairhofer, Lukas M. Seewald, Gerald Kothleitner, Michael Huth, Harald Plank and Sven Barth
Nanomaterials 2023, 13(21), 2907; https://doi.org/10.3390/nano13212907 - 6 Nov 2023
Cited by 5 | Viewed by 2360
Abstract
Electron-induced fragmentation of the HFeCo3(CO)12 precursor allows direct-write fabrication of 3D nanostructures with metallic contents of up to >95 at %. While microstructure and composition determine the physical and functional properties of focused electron beam-induced deposits, they also provide fundamental [...] Read more.
Electron-induced fragmentation of the HFeCo3(CO)12 precursor allows direct-write fabrication of 3D nanostructures with metallic contents of up to >95 at %. While microstructure and composition determine the physical and functional properties of focused electron beam-induced deposits, they also provide fundamental insights into the decomposition process of precursors, as elaborated in this study based on EDX and TEM. The results provide solid information suggesting that different dominant fragmentation channels are active in single-spot growth processes for pillar formation. The use of the single source precursor provides a unique insight into high- and low-energy fragmentation channels being active in the same deposit formation process. Full article
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12 pages, 7202 KB  
Article
3D Magnonic Conduits by Direct Write Nanofabrication
by Sebastian Lamb-Camarena, Fabrizio Porrati, Alexander Kuprava, Qi Wang, Michal Urbánek, Sven Barth, Denys Makarov, Michael Huth and Oleksandr V. Dobrovolskiy
Nanomaterials 2023, 13(13), 1926; https://doi.org/10.3390/nano13131926 - 24 Jun 2023
Cited by 5 | Viewed by 2274
Abstract
Magnonics is a rapidly developing domain of nanomagnetism, with application potential in information processing systems. Realisation of this potential and miniaturisation of magnonic circuits requires their extension into the third dimension. However, so far, magnonic conduits are largely limited to thin films and [...] Read more.
Magnonics is a rapidly developing domain of nanomagnetism, with application potential in information processing systems. Realisation of this potential and miniaturisation of magnonic circuits requires their extension into the third dimension. However, so far, magnonic conduits are largely limited to thin films and 2D structures. Here, we introduce 3D magnonic nanoconduits fabricated by the direct write technique of focused-electron-beam induced deposition (FEBID). We use Brillouin light scattering (BLS) spectroscopy to demonstrate significant qualitative differences in spatially resolved spin-wave resonances of 2D and 3D nanostructures, which originates from the geometrically induced non-uniformity of the internal magnetic field. This work demonstrates the capability of FEBID as an additive manufacturing technique to produce magnetic 3D nanoarchitectures and presents the first report of BLS spectroscopy characterisation of FEBID conduits. Full article
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23 pages, 6899 KB  
Review
The 3D Controllable Fabrication of Nanomaterials with FIB-SEM Synchronization Technology
by Lirong Zhao, Yimin Cui, Junyi Li, Yuxi Xie, Wenping Li and Junying Zhang
Nanomaterials 2023, 13(12), 1839; https://doi.org/10.3390/nano13121839 - 11 Jun 2023
Cited by 5 | Viewed by 5190
Abstract
Nanomaterials with unique structures and functions have been widely used in the fields of microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution and multi functions (e.g., milling, deposition, and implantation), focused ion beam (FIB) technology has been widely developed due [...] Read more.
Nanomaterials with unique structures and functions have been widely used in the fields of microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution and multi functions (e.g., milling, deposition, and implantation), focused ion beam (FIB) technology has been widely developed due to urgent demands for the 3D fabrication of nanomaterials in recent years. In this paper, FIB technology is illustrated in detail, including ion optical systems, operating modes, and combining equipment with other systems. Together with the in situ and real-time monitoring of scanning electron microscopy (SEM) imaging, a FIB-SEM synchronization system achieved 3D controllable fabrication from conductive to semiconductive and insulative nanomaterials. The controllable FIB-SEM processing of conductive nanomaterials with a high precision is studied, especially for the FIB-induced deposition (FIBID) 3D nano-patterning and nano-origami. As for semiconductive nanomaterials, the realization of high resolution and controllability is focused on nano-origami and 3D milling with a high aspect ratio. The parameters of FIB-SEM and its working modes are analyzed and optimized to achieve the high aspect ratio fabrication and 3D reconstruction of insulative nanomaterials. Furthermore, the current challenges and future outlooks are prospected for the 3D controllable processing of flexible insulative materials with high resolution. Full article
(This article belongs to the Section Nanofabrication and Nanomanufacturing)
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13 pages, 13425 KB  
Article
Comparative Study of Mechanical Performance of AlCrSiN Coating Deposited on WC-Co and cBN Hard Substrates
by Jing Liang, Marc Serra, Sandra Gordon, Jonathan Fernández de Ara, Eluxka Almandoz, Luis Llanes and Emilio Jimenez-Piqué
Ceramics 2023, 6(2), 1238-1250; https://doi.org/10.3390/ceramics6020075 - 9 Jun 2023
Cited by 1 | Viewed by 2630
Abstract
The objective of this study is to explore and compare the mechanical response of AlCrSiN coatings deposited on two different substrates, namely, WC-Co and cBN. Nano-indentation was used to measure the hardness and elastic modulus of the coatings, and micro-indentation was used for [...] Read more.
The objective of this study is to explore and compare the mechanical response of AlCrSiN coatings deposited on two different substrates, namely, WC-Co and cBN. Nano-indentation was used to measure the hardness and elastic modulus of the coatings, and micro-indentation was used for observing the contact damage under Hertzian contact with monotonic and cyclic (fatigue) loads. Microscratch and contact damage tests were also used to evaluate the strength of adhesion between the AlCrSiN coatings and the two substrates under progressive and constant loads, respectively. The surface damages induced via different mechanical tests were observed using scanning electron microscopy (SEM). A focused ion beam (FIB) was used to produce a cross-section of the coating–substrate system in order to further detect the mode and extent of failure that was induced. The results show that the AlCrSiN coating deposited on the WC-Co substrate performed better in regard to adhesion strength and contact damage response than the same coating deposited on the cBN substrate; this is attributed to the lower plasticity of the cBN substrate as well as its less powerful adhesion to the coating. Full article
(This article belongs to the Special Issue Ceramic Coatings for High-Temperature Applications)
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14 pages, 2133 KB  
Article
Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
by Jakub Jurczyk, Katja Höflich, Katarzyna Madajska, Luisa Berger, Leo Brockhuis, Thomas Edward James Edwards, Czesław Kapusta, Iwona B. Szymańska and Ivo Utke
Nanomaterials 2023, 13(9), 1516; https://doi.org/10.3390/nano13091516 - 29 Apr 2023
Cited by 5 | Viewed by 2307
Abstract
Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we [...] Read more.
Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we examine and compare five different silver carboxylates, three perfluorinated: [Ag2(µ-O2CCF3)2], [Ag2(µ-O2CC2F5)2], and [Ag2(µ-O2CC3F7)2], and two containing branched substituents: [Ag2(µ-O2CCMe2Et)2] and [Ag2(µ-O2CtBu)2], as potential precursors for focused electron-beam-induced deposition. All of the compounds show high sensitivity to electron dissociation and efficient dissociation of Ag-O bonds. The as-deposited materials have silver contents from 42 at.% to above 70 at.% and are composed of silver nano-crystals with impurities of carbon and fluorine between them. Precursors with the shortest carbon-fluorine chain ligands yield the highest silver contents. In addition, the deposited silver content depends on the balance of electron-induced ligand co-deposition and ligand desorption. For all of the tested compounds, low electron flux was related to high silver content. Our findings demonstrate that silver carboxylates constitute a promising group of precursors for gas-assisted focused electron beam writing of high silver content materials. Full article
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17 pages, 6715 KB  
Article
Additive Manufacturing of Co3Fe Nano-Probes for Magnetic Force Microscopy
by Robert Winkler, Michele Brugger-Hatzl, Lukas Matthias Seewald, David Kuhness, Sven Barth, Thomas Mairhofer, Gerald Kothleitner and Harald Plank
Nanomaterials 2023, 13(7), 1217; https://doi.org/10.3390/nano13071217 - 29 Mar 2023
Cited by 13 | Viewed by 4816
Abstract
Magnetic force microscopy (MFM) is a powerful extension of atomic force microscopy (AFM), which mostly uses nano-probes with functional coatings for studying magnetic surface features. Although well established, additional layers inherently increase apex radii, which reduce lateral resolution and also contain the risk [...] Read more.
Magnetic force microscopy (MFM) is a powerful extension of atomic force microscopy (AFM), which mostly uses nano-probes with functional coatings for studying magnetic surface features. Although well established, additional layers inherently increase apex radii, which reduce lateral resolution and also contain the risk of delamination, rendering such nano-probes doubtful or even useless. To overcome these limitations, we now introduce the additive direct-write fabrication of magnetic nano-cones via focused electron beam-induced deposition (FEBID) using an HCo3Fe(CO)12 precursor. The study first identifies a proper 3D design, confines the most relevant process parameters by means of primary electron energy and beam currents, and evaluates post-growth procedures as well. That way, highly crystalline nano-tips with minimal surface contamination and apex radii in the sub-15 nm regime are fabricated and benchmarked against commercial products. The results not only reveal a very high performance during MFM operation but in particular demonstrate virtually loss-free behavior after almost 8 h of continuous operation, thanks to the all-metal character. Even after more than 12 months of storage in ambient conditions, no performance loss is observed, which underlines the high overall performance of the here-introduced FEBID-based Co3Fe MFM nano-probes. Full article
(This article belongs to the Special Issue Preparation and Application of Nanowires: 2nd Edition)
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11 pages, 4341 KB  
Article
Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition
by Alix Tatiana Escalante-Quiceno, Ondřej Novotný, Jan Neuman, César Magén and José María De Teresa
Sensors 2023, 23(6), 2879; https://doi.org/10.3390/s23062879 - 7 Mar 2023
Cited by 9 | Viewed by 2866
Abstract
High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down to 10 nm in optimal conditions. This technique has been used to [...] Read more.
High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down to 10 nm in optimal conditions. This technique has been used to grow magnetic tips for use in Magnetic Force Microscopy (MFM). Due to their high aspect ratio and good magnetic behavior, these FEBID magnetic tips provide several advantages over commercial magnetic tips when used for simultaneous topographical and magnetic measurements. Here, we report a study of the durability of these excellent candidates for high-resolution MFM measurements. A batch of FEBID-grown magnetic tips was subjected to a systematic analysis of MFM magnetic contrast for 30 weeks, using magnetic storage tape as a test specimen. Our results indicate that these FEBID magnetic tips operate effectively over a long period of time. The magnetic signal was well preserved, with a maximum reduction of 60% after 21 weeks of recurrent use. No significant contrast degradation was observed after 30 weeks in storage. Full article
(This article belongs to the Special Issue Advanced Sensing for Scanning Probe Microscopy)
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17 pages, 4276 KB  
Article
Fast and Efficient Simulation of the FEBID Process with Thermal Effects
by Alexander Kuprava and Michael Huth
Nanomaterials 2023, 13(5), 858; https://doi.org/10.3390/nano13050858 - 25 Feb 2023
Cited by 4 | Viewed by 2395
Abstract
Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scattering and sample heating during the 3D [...] Read more.
Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scattering and sample heating during the 3D growth process complicate the shape-true transfer from a target 3D model to the actual deposit. Here, we describe an efficient and fast numerical approach to simulate the growth process, which allows for a systematic study of the influence of the most important growth parameters on the resulting shape of the 3D structures. The precursor parameter set derived in this work for the precursor Me3PtCpMe enables a detailed replication of the experimentally fabricated nanostructure, taking beam-induced heating into account. The modular character of the simulation approach allows for additional future performance increases using parallelization or drawing on the use of graphics cards. Ultimately, beam-control pattern generation for 3D FEBID will profit from being routinely combined with this fast simulation approach for optimized shape transfer. Full article
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14 pages, 3730 KB  
Article
Selected Area Deposition of High Purity Gold for Functional 3D Architectures
by John Lasseter, Philip D. Rack and Steven J. Randolph
Nanomaterials 2023, 13(4), 757; https://doi.org/10.3390/nano13040757 - 17 Feb 2023
Cited by 8 | Viewed by 3179
Abstract
Selected area deposition of high purity gold films onto nanoscale 3D architectures is highly desirable as gold is conductive, inert, plasmonically active, and can be functionalized with thiol chemistries, which are useful in many biological applications. Here, we show that high-purity gold coatings [...] Read more.
Selected area deposition of high purity gold films onto nanoscale 3D architectures is highly desirable as gold is conductive, inert, plasmonically active, and can be functionalized with thiol chemistries, which are useful in many biological applications. Here, we show that high-purity gold coatings can be selectively grown with the Me2Au (acac) precursor onto nanoscale 3D architectures via a pulsed laser pyrolytic chemical vapor deposition process. The selected area of deposition is achieved due to the high thermal resistance of the nanoscale geometries. Focused electron beam induced deposits (FEBID) and carbon nanofibers are functionalized with gold coatings, and we demonstrate the effects that laser irradiance, pulse width, and precursor pressure have on the growth rate. Furthermore, we demonstrate selected area deposition with a feature-targeting resolutions of ~100 and 5 µm, using diode lasers coupled to a multimode (915 nm) and single mode (785 nm) fiber optic, respectively. The experimental results are rationalized via finite element thermal modeling. Full article
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12 pages, 4445 KB  
Article
A Core-Shell MWCNT-Pt Nanowire Electron Source with Anomalously Long-Term Stable Field Emission
by Wenqi Zhang, Peidong Chao, Donglei Chen, Zhan Yang and Lixin Dong
Nanomaterials 2023, 13(3), 532; https://doi.org/10.3390/nano13030532 - 28 Jan 2023
Cited by 2 | Viewed by 1922
Abstract
A hybrid core-shell structured nanowire is proposed for a long-term stable electron source based on an isolated platinum/multi-walled carbon nanotube (Pt/MWCNT). This hybrid nanowire is prepared by growing a Pt shell on a metallic MWCNT through a field-emission-induced deposition (FEID) method. An in [...] Read more.
A hybrid core-shell structured nanowire is proposed for a long-term stable electron source based on an isolated platinum/multi-walled carbon nanotube (Pt/MWCNT). This hybrid nanowire is prepared by growing a Pt shell on a metallic MWCNT through a field-emission-induced deposition (FEID) method. An in situ field emission (FE) platform was constructed inside a scanning electron microscope (SEM) equipped with two nanorobotic manipulators (NRMs) for the preparation and testing of the hybrid nanowire. An in situ fatigue test was conducted with high current intensity (500 nA) to show the influence of the Pt shell. Compared with the pristine bare MWCNT, our hybrid-nanowire-based electron source has a lifetime of hundreds of times longer and can work continuously for up to 48 h under relatively high pressure (3.6×10-3 Pa) without having an apparent change in its structure or emission currents, demonstrating good stability and tolerance to poor working conditions. The anomalous long-term stability is attributed mainly to the shielding of oxygen by Pt from the carbon shells and less heating due to the work function lowering by Pt. Full article
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19 pages, 5643 KB  
Article
3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes
by Lukas Matthias Seewald, Jürgen Sattelkow, Michele Brugger-Hatzl, Gerald Kothleitner, Hajo Frerichs, Christian Schwalb, Stefan Hummel and Harald Plank
Nanomaterials 2022, 12(24), 4477; https://doi.org/10.3390/nano12244477 - 17 Dec 2022
Cited by 8 | Viewed by 3078
Abstract
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in [...] Read more.
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in the sub-10 nm regime to allow for high-resolution imaging during morphological imaging, conductive AFM (CAFM) and electrostatic force microscopy (EFM). The study starts with design aspects to motivate the proposed HC architecture, followed by detailed fabrication characterization to identify and optimize FEBID process parameters. To arrive at desired material properties, e-beam assisted purification in low-pressure water atmospheres was applied at room temperature, which enabled the removal of carbon impurities from as-deposited structures. The microstructure of final HCs was analyzed via scanning transmission electron microscopy—high-angle annular dark field (STEM-HAADF), whereas electrical and mechanical properties were investigated in situ using micromanipulators. Finally, AFM/EFM/CAFM measurements were performed in comparison to non-functional, high-resolution tips and commercially available electric probes. In essence, we demonstrate that the proposed all-metal HCs provide the resolution capabilities of the former, with the electric conductivity of the latter onboard, combining both assets in one design. Full article
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20 pages, 2945 KB  
Article
Towards Improved Humidity Sensing Nanomaterials via Combined Electron and NH3 Treatment of Carbon-Rich FEBID Deposits
by Hannah Boeckers, Petra Swiderek and Markus Rohdenburg
Nanomaterials 2022, 12(24), 4455; https://doi.org/10.3390/nano12244455 - 15 Dec 2022
Cited by 3 | Viewed by 2404
Abstract
Focused Electron Beam Induced Deposition (FEBID) is a unique tool to produce nanoscale materials. The resulting deposits can be used, for instance, as humidity or strain sensors. The humidity sensing concept relies on the fact that FEBID using organometallic precursors often yields deposits [...] Read more.
Focused Electron Beam Induced Deposition (FEBID) is a unique tool to produce nanoscale materials. The resulting deposits can be used, for instance, as humidity or strain sensors. The humidity sensing concept relies on the fact that FEBID using organometallic precursors often yields deposits which consist of metal nanoparticles embedded in a carbonaceous matrix. The electrical conductivity of such materials is altered in the presence of polar molecules such as water. Herein, we provide evidence that the interaction with water can be enhanced by incorporating nitrogen in the deposit through post-deposition electron irradiation in presence of ammonia (NH3). This opens the perspective to improve and tune the properties of humidity sensors fabricated by FEBID. As a proof-of-concept experiment, we have prepared carbonaceous deposits by electron irradiation of adsorbed layers of three different precursors, namely, the aliphatic hydrocarbon n-pentane, a simple alkene (2-methyl-2-butene), and the potential Ru FEBID precursor bis(ethylcyclopentadienyl)ruthenium(II). In a subsequent processing step, we incorporated C-N bonds in the deposit by electron irradiation of adsorbed NH3. To test the resulting material with respect to its potential humidity sensing capabilities, we condensed sub-monolayer quantities of water (H2O) on the deposit and evaluated their thermal desorption behavior. The results confirm that the desorption temperature of H2O decisively depends on the degree of N incorporation into the carbonaceous residue which, in turn, depends on the chemical nature of the precursor used for deposition of the carbonaceous layer. We thus anticipate that the sensitivity of a FEBID-based humidity sensor can be tuned by a precisely timed post-deposition electron and NH3 processing step. Full article
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13 pages, 6552 KB  
Article
Controlled Morphological Bending of 3D-FEBID Structures via Electron Beam Curing
by Anna Weitzer, Robert Winkler, David Kuhness, Gerald Kothleitner and Harald Plank
Nanomaterials 2022, 12(23), 4246; https://doi.org/10.3390/nano12234246 - 29 Nov 2022
Cited by 6 | Viewed by 2123
Abstract
Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in [...] Read more.
Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in a targeted manner by local irradiation without precursor gas present. This process diminishes the volumes of exposed regions and alters nano-grain sizes, which was comprehensively characterized by SEM, TEM and AFM and complemented by Monte Carlo simulations. For obtaining controlled and reproducible conditions for smooth, stable morphological bending, a wide range of parameters were varied, which will here be presented as a first step towards using local EBC as a tool to realize even more complex nano-architectures, beyond current 3D-FEBID capabilities, such as overhanging structures. We thereby open up a new prospect for future applications in research and development that could even be further developed towards functional imprinting. Full article
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