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Keywords = large-area metasurfaces

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32 pages, 8754 KB  
Review
Plasmonics Meets Metasurfaces: A Vision for Next Generation Planar Optical Systems
by Muhammad A. Butt
Micromachines 2026, 17(1), 119; https://doi.org/10.3390/mi17010119 - 16 Jan 2026
Cited by 2 | Viewed by 1224
Abstract
Plasmonics and metasurfaces (MSs) have emerged as two of the most influential platforms for manipulating light at the nanoscale, each offering complementary strengths that challenge the limits of conventional optical design. Plasmonics enables extreme subwavelength field confinement, ultrafast light–matter interaction, and strong optical [...] Read more.
Plasmonics and metasurfaces (MSs) have emerged as two of the most influential platforms for manipulating light at the nanoscale, each offering complementary strengths that challenge the limits of conventional optical design. Plasmonics enables extreme subwavelength field confinement, ultrafast light–matter interaction, and strong optical nonlinearities, while MSs provide versatile and compact control over phase, amplitude, polarization, and dispersion through planar, nanostructured interfaces. Recent advances in materials, nanofabrication, and device engineering are increasingly enabling these technologies to be combined within unified planar and hybrid optical platforms. This review surveys the physical principles, material strategies, and device architectures that underpin plasmonic, MS, and hybrid plasmonic–dielectric systems, with an emphasis on interface-mediated optical functionality rather than long-range guided-wave propagation. Key developments in modulators, detectors, nanolasers, metalenses, beam steering devices, and programmable optical surfaces are discussed, highlighting how hybrid designs can leverage strong field localization alongside low-loss wavefront control. System-level challenges including optical loss, thermal management, dispersion engineering, and large-area fabrication are critically examined. Looking forward, plasmonic and MS technologies are poised to define a new generation of flat, multifunctional, and programmable optical systems. Applications spanning imaging, sensing, communications, augmented and virtual reality, and optical information processing illustrate the transformative potential of these platforms. By consolidating recent progress and outlining future directions, this review provides a coherent perspective on how plasmonics and MSs are reshaping the design space of next-generation planar optical hardware. Full article
(This article belongs to the Special Issue Photonic and Optoelectronic Devices and Systems, 4th Edition)
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15 pages, 2703 KB  
Article
Fabrication and Plasmonic Characterization of Metasurfaces Patterned via Tunable Pyramidal Interference Lithography
by Saim Bokhari, Yazan Bdour and Ribal Georges Sabat
Micromachines 2026, 17(1), 104; https://doi.org/10.3390/mi17010104 - 13 Jan 2026
Viewed by 598
Abstract
Large-area metasurfaces were fabricated via a tunable pyramidal interference lithography (PIL) technique, which uses custom-built 2-faced, 3-faced, and 4-faced pyramidal prisms to create metasurfaces with customizable nano- and micro-scale surface feature periodicities. The 2-faced prism produced linear surface relief diffraction gratings, while the [...] Read more.
Large-area metasurfaces were fabricated via a tunable pyramidal interference lithography (PIL) technique, which uses custom-built 2-faced, 3-faced, and 4-faced pyramidal prisms to create metasurfaces with customizable nano- and micro-scale surface feature periodicities. The 2-faced prism produced linear surface relief diffraction gratings, while the 3-faced prism produced metasurfaces with triangular lattices and the 4-faced prism produced metasurfaces with square lattices, all on azobenzene thin films. A double inline prism set-up enabled control over the metasurface feature periodicity, allowing systematic increase in the pattern size. Additional tunability was achieved by placing a prism inline with a lens, allowing precise control over the metasurface feature periodicity. A theoretical model was derived and successfully matched to the experimental results. The resulting metasurfaces were coated with gold and exhibited distinct surface plasmon resonance (SPR) and surface plasmon resonance imaging (SPRi) responses, confirming their functionality. Overall, this work establishes PIL as a cost-effective and highly adaptable metasurface fabrication method for producing customizable periodic metasurfaces for photonic, plasmonic, and sensing applications. Full article
(This article belongs to the Special Issue Metasurface-Based Devices and Systems)
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16 pages, 13233 KB  
Article
Robotized Fabrication Strategy for Large-Scale 3D Conformal Electronics
by Jiaying Ge, Hao Wu, Hongyang Wang and Dong Ye
Materials 2025, 18(21), 5015; https://doi.org/10.3390/ma18215015 - 4 Nov 2025
Cited by 1 | Viewed by 1367
Abstract
Conformal electronics are distinguished by their unique characteristics, such as the integration of structure and function and their conformability with complex geometries. These features unlock a broad spectrum of applications, including structural health monitoring and the creation of metasurfaces. However, the current landscape [...] Read more.
Conformal electronics are distinguished by their unique characteristics, such as the integration of structure and function and their conformability with complex geometries. These features unlock a broad spectrum of applications, including structural health monitoring and the creation of metasurfaces. However, the current landscape of large-scale curved electronic fabrication is characterized by a significant gap in specialized equipment and standardized strategies. In this context, we introduce a pioneering strategy that leverages robotized electrohydrodynamic (EHD) printing for the conformal fabrication of large-scale curved electronics on 3D surfaces. This comprehensive multi-robot EHD conformal printing strategy integrates several critical components, including plasma surface treatment, EHD conformal printing, and near-infrared (NIR) sintering processes. These are supported by enabling technologies such as 3D surface reconstruction and precise hybrid positioning. Notably, our strategy achieves 5 µm printing resolution via EHD lithography and 35 µm repeatable positioning accuracy. After plasma treatment, conductive patterns on FR4 substrates reach 5B-level adhesion strength. NIR sintering enables high-efficiency sintering within only 125 s. Seamless integration of these processes into multi-robot collaborative equipment enables the fabrication of large-area conformal electronics, such as 400 mm × 1000 mm unmanned aerial vehicle wings and 650 mm × 350 mm satellite shells, and supports multi-layer systems including wires, LED arrays, antennas, and sensors. This strategy possesses substantial potential to transcend the limitations inherent in traditional fabrication methods, paving the way for new frontiers in conformal electronics across a variety of applications, including smart wings and satellite surfaces. Full article
(This article belongs to the Section Manufacturing Processes and Systems)
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14 pages, 2211 KB  
Communication
Large-Area Nanostructure Fabrication with a 75 nm Half-Pitch Using Deep-UV Flat-Top Laser Interference Lithography
by Kexin Jiang, Mingliang Xie, Zhe Tang, Xiren Zhang and Dongxu Yang
Sensors 2025, 25(18), 5906; https://doi.org/10.3390/s25185906 - 21 Sep 2025
Cited by 3 | Viewed by 1599
Abstract
Micro- and nanopatterning is crucial for advanced photonic, electronic, and sensing devices. Yet achieving large-area periodic nanostructures with a 75 nm half-pitch on low-cost laboratory systems remains difficult, because conventional near-ultraviolet laser interference lithography (LIL) suffers from Gaussian-beam non-uniformity and a narrow exposure [...] Read more.
Micro- and nanopatterning is crucial for advanced photonic, electronic, and sensing devices. Yet achieving large-area periodic nanostructures with a 75 nm half-pitch on low-cost laboratory systems remains difficult, because conventional near-ultraviolet laser interference lithography (LIL) suffers from Gaussian-beam non-uniformity and a narrow exposure latitude. Here, we report a cost-effective deep-ultraviolet (DUV) dual-beam LIL system based on a 266 nm laser and diffractive flat-top beam shaping, enabling large-area patterning of periodical nanostructures. At this wavelength, a moderate half-angle can be chosen to preserve a large beam-overlap region while still delivering 150 nm period (75 nm half-pitch) structures. By independently tuning the incident angle and beam uniformity, we pattern one-dimensional (1D) gratings and two-dimensional (2D) arrays over a Ø 1.0 cm field with critical-dimension variation < 5 nm (1σ), smooth edges, and near-vertical sidewalls. As a proof of concept, we transfer a 2D pattern into Si to create non-metal-coated nanodot arrays that serve as surface-enhanced Raman spectroscopy (SERS) substrates. The arrays deliver an average enhancement factor of ~1.12 × 104 with 11% intensity relative standard deviation (RSD) over 65 sampling points, a performance near the upper limit of all-dielectric SERS substrates. The proposed method overcomes the uneven hotspot distribution and complex fabrication procedures in conventional SERS substrates, enabling reliable and large-area chemical sensing. Compared to electron-beam lithography, the flat-top DUV-LIL approach offers orders-of-magnitude higher throughput at a fraction of the cost, while its centimeter-scale uniformity can be scaled to full wafers with larger beam-shaping optics. These attributes position the method as a versatile and economical route to large-area photonic metasurfaces and sensing devices. Full article
(This article belongs to the Section Nanosensors)
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18 pages, 7417 KB  
Article
An Efficient Optimization Method for Large-Solution Space Electromagnetic Automatic Design
by Lingyan He, Fengling Peng and Xing Chen
Materials 2025, 18(5), 1159; https://doi.org/10.3390/ma18051159 - 5 Mar 2025
Viewed by 1293
Abstract
In the field of electromagnetic design, it is sometimes necessary to search for the optimal design solution (i.e., the optimal solution) within a large solution space to complete the optimization. However, traditional optimization methods are not only slow in searching for the solution [...] Read more.
In the field of electromagnetic design, it is sometimes necessary to search for the optimal design solution (i.e., the optimal solution) within a large solution space to complete the optimization. However, traditional optimization methods are not only slow in searching for the solution space but are also prone to becoming trapped in local optima, leading to optimization failure. This paper proposes a dual-population genetic algorithm to quickly find the optimal solution for electromagnetic optimization problems in large solution spaces. The method involves two populations: the first population uses the powerful dynamic decision-making ability of reinforcement learning to adjust the crossover probability, making the optimization process more stable and enhancing the global optimization capability of the algorithm. The second population accelerates the convergence speed of the algorithm by employing a “leader dominance” mechanism, allowing the population to quickly approach the optimal solution. The two populations are integrated through an immigration operator, improving optimization efficiency. The effectiveness of the proposed method is demonstrated through the optimization design of an electromagnetic metasurface material. Furthermore, the method designed in this paper is not limited to the electromagnetic field and has practical value in other engineering optimization areas, such as vehicle routing optimization, energy system optimization, and fluid dynamics optimization, etc. Full article
(This article belongs to the Special Issue Metamaterials and Metasurfaces: From Materials to Applications)
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14 pages, 11360 KB  
Article
Efficient Inverse Design of Large-Scale, Ultrahigh-Numerical-Aperture Metalens
by Yongle Zhou, Yikun Liu, Haowen Liang and Juntao Li
Photonics 2024, 11(10), 940; https://doi.org/10.3390/photonics11100940 - 6 Oct 2024
Cited by 5 | Viewed by 3730
Abstract
Efficient design methods for large-scale metalenses are crucial for various applications. The conventional phase-mapping method shows a weak performance under large phase gradients, thus limiting the efficiency and quality of large-scale, high-numerical-aperture metalenses. While inverse design methods can partially address this issue, existing [...] Read more.
Efficient design methods for large-scale metalenses are crucial for various applications. The conventional phase-mapping method shows a weak performance under large phase gradients, thus limiting the efficiency and quality of large-scale, high-numerical-aperture metalenses. While inverse design methods can partially address this issue, existing solutions either accommodate only small-scale metalenses due to high computational demands or compromise on focusing performance. We propose an efficient large-scale design method based on an optimization approach combined with the adjoint-based method and the level-set method, which first forms a one-dimensional metalens and then extends it to two dimensions. Taking fabrication constraints into account, our optimization method for large-area metalenses with a near-unity numerical aperture (NA = 0.99) has improved the focusing efficiency from 42% to 60% in simulations compared to the conventional design method. Additionally, it has reduced the deformation of the focusing spot caused by the ultrahigh numerical aperture. This approach retains the benefits of the adjoint-based method while significantly reducing the computational burden, thereby advancing the development of large-scale metalenses design. It can also be extended to other large-scale metasurface designs. Full article
(This article belongs to the Special Issue Micro-Nano Optical Devices)
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17 pages, 12065 KB  
Communication
Adjoint Algorithm Design of Selective Mode Reflecting Metastructure for BAL Applications
by Zean Li, Xunyu Zhang, Cheng Qiu, Yingshuai Xu, Zhipeng Zhou, Ziyuan Wei, Yiman Qiao, Yongyi Chen, Yubing Wang, Lei Liang, Yuxin Lei, Yue Song, Peng Jia, Yugang Zeng, Li Qin, Yongqiang Ning and Lijun Wang
Nanomaterials 2024, 14(9), 787; https://doi.org/10.3390/nano14090787 - 1 May 2024
Viewed by 1819
Abstract
Broad-area lasers (BALs) have found applications in a variety of crucial fields on account of their high output power and high energy transfer efficiency. However, they suffer from poor spatial beam quality due to multi-mode behavior along the waveguide transverse direction. In this [...] Read more.
Broad-area lasers (BALs) have found applications in a variety of crucial fields on account of their high output power and high energy transfer efficiency. However, they suffer from poor spatial beam quality due to multi-mode behavior along the waveguide transverse direction. In this paper, we propose a novel metasurface waveguide structure acting as a transverse mode selective back-reflector for BALs. In order to effectively inverse design such a structure, a digital adjoint algorithm is introduced to adapt the considerably large design area and the high degree of freedom. As a proof of the concept, a device structure with a design area of 40 × 20 μm2 is investigated. The simulation results exhibit high fundamental mode reflection (above 90%), while higher-order transverse mode reflections are suppressed below 0.2%. This is, to our knowledge, the largest device structure designed based on the inverse method. We exploited such a device and the method and further investigated the device’s robustness and feasibility of the inverse method. The results are elaborately discussed. Full article
(This article belongs to the Section Theory and Simulation of Nanostructures)
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15 pages, 4451 KB  
Article
High Q-Factor, High Contrast, and Multi-Band Optical Sensor Based on Plasmonic Square Bracket Dimer Metasurface
by Bin Ni, Guanghu Chu, Zheyang Xu, Lianping Hou, Xuefeng Liu and Jichuan Xiong
Nanomaterials 2024, 14(5), 421; https://doi.org/10.3390/nano14050421 - 25 Feb 2024
Cited by 8 | Viewed by 3220
Abstract
A high-performance resonant metasurface is rather promising for diverse application areas such as optical sensing and filtering. Herein, a metal–insulator–metal (MIM) optical sensor with merits of a high quality-factor (Q-factor), multiple operating bands, and high spectrum contrast is proposed using plasmonic square bracket [...] Read more.
A high-performance resonant metasurface is rather promising for diverse application areas such as optical sensing and filtering. Herein, a metal–insulator–metal (MIM) optical sensor with merits of a high quality-factor (Q-factor), multiple operating bands, and high spectrum contrast is proposed using plasmonic square bracket dimer metasurface. Due to the complex square bracket itself, a dimer structure of two oppositely placed square brackets, and metasurface array configuration, multiple kinds of mode coupling can be devised in the inner and outer elements within the metasurface, enabling four sensing channels with the sensitivities higher than 200 nm/RIU for refractive index sensing. Among them, the special sensing channel based on the reflection-type surface lattice resonance (SLR) mechanism has a full width at half maximum (FWHM) of only 2 nm, a high peak-to-dip signal contrast of 0.82, a high Q-factor of 548, and it can also behave as a good sensing channel for the thickness measurement of the deposition layer. The multi-band sensor can work normally in a large refractive index or thickness range, and the number of resonant channels can be further increased by simply breaking the structural symmetry or changing the polarization angle of incident light. Equipped with unique advantages, the suggested plasmonic metasurface has great potential in sensing, monitoring, filtering, and other applications. Full article
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12 pages, 5489 KB  
Article
UV-Nanoimprint and Deep Reactive Ion Etching of High Efficiency Silicon Metalenses: High Throughput at Low Cost with Excellent Resolution and Repeatability
by Christopher A. Dirdal, Karolina Milenko, Anand Summanwar, Firehun T. Dullo, Paul C. V. Thrane, Oana Rasoga, Andrei M. Avram, Adrian Dinescu and Angela M. Baracu
Nanomaterials 2023, 13(3), 436; https://doi.org/10.3390/nano13030436 - 20 Jan 2023
Cited by 17 | Viewed by 8733
Abstract
As metasurfaces begin to find industrial applications there is a need to develop scalable and cost-effective fabrication techniques which offer sub-100 nm resolution while providing high throughput and large area patterning. Here we demonstrate the use of UV-Nanoimprint Lithography and Deep Reactive Ion [...] Read more.
As metasurfaces begin to find industrial applications there is a need to develop scalable and cost-effective fabrication techniques which offer sub-100 nm resolution while providing high throughput and large area patterning. Here we demonstrate the use of UV-Nanoimprint Lithography and Deep Reactive Ion Etching (Bosch and Cryogenic) towards this goal. Robust processes are described for the fabrication of silicon rectangular pillars of high pattern fidelity. To demonstrate the quality of the structures, metasurface lenses, which demonstrate diffraction limited focusing and close to theoretical efficiency for NIR wavelengths λ ∈ (1.3 μm, 1.6 μm), are fabricated. We demonstrate a process which removes the characteristic sidewall surface roughness of the Bosch process, allowing for smooth 90-degree vertical sidewalls. We also demonstrate that the optical performance of the metasurface lenses is not affected adversely in the case of Bosch sidewall surface roughness with 45 nm indentations (or scallops). Next steps of development are defined for achieving full wafer coverage. Full article
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14 pages, 4415 KB  
Article
Fabrication of Metasurfaces on Building Construction Materials for Potential Electromagnetic Applications in the Microwave Band
by Zacharias Viskadourakis, Konstantinos Grammatikakis, Klytaimnistra Katsara, Argyri Drymiskianaki and George Kenanakis
Materials 2022, 15(20), 7315; https://doi.org/10.3390/ma15207315 - 19 Oct 2022
Cited by 6 | Viewed by 3040
Abstract
Energy self-sufficiency, as well as optimal management of power in buildings is gaining importance, while obtaining power from traditional fossil energy sources is becoming more and more expensive. In this context, millimeter-scale metasurfaces can be employed to harvest energy from microwave sources. They [...] Read more.
Energy self-sufficiency, as well as optimal management of power in buildings is gaining importance, while obtaining power from traditional fossil energy sources is becoming more and more expensive. In this context, millimeter-scale metasurfaces can be employed to harvest energy from microwave sources. They can also be used as sensors in the microwave regime for efficient power management solutions. In the current study, a simple spray printing method is proposed to develop metasurfaces in construction materials, i.e., plasterboard and wood. Such materials are used in the interior design of buildings; therefore, the implementation of metasurfaces in large areas, such as walls, doors and floors, is realized. The fabricated metasurfaces were characterized regarding their electromagnetic performance. It is hereby shown that the investigated metasurfaces exhibit an efficient electromagnetic response in the frequency range (4–7 GHz), depending on the MS. Thus, spray-printed metasurfaces integrated on construction materials can potentially be used for electromagnetic applications, for buildings’ power self-efficiency and management. Full article
(This article belongs to the Special Issue Theory and Applications of Metamaterials)
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11 pages, 658 KB  
Article
Floquet Spectral Almost-Periodic Modulation of Massive Finite and Infinite Strongly Coupled Arrays: Dense-Massive-MIMO, Intelligent-Surfaces, 5G, and 6G Applications
by Hamdi Bilel and Aguili Taoufik
Electronics 2022, 11(1), 36; https://doi.org/10.3390/electronics11010036 - 23 Dec 2021
Cited by 5 | Viewed by 5310
Abstract
In this study, we introduce a new formulation based on Floquet (Fourier) spectral analysis combined with a spectral modulation technique (and its spatial form) to study strongly coupled sublattices predefined in the infinite and large finite extent of almost-periodic antenna arrays (e.g., metasurfaces). [...] Read more.
In this study, we introduce a new formulation based on Floquet (Fourier) spectral analysis combined with a spectral modulation technique (and its spatial form) to study strongly coupled sublattices predefined in the infinite and large finite extent of almost-periodic antenna arrays (e.g., metasurfaces). This analysis is very relevant for dense-massive-MIMO, intelligent-surfaces, 5G, and 6G applications (used for very small areas with a large number of elements such as millimeter and terahertz waves applications). The numerical method that is adopted to model the structure is the method of moments simplified by equivalent circuits MoM GEC. Other numerical methods (such as the ASM-array scanning method and the windowing Fourier method) used this analysis in their kernel to treat periodic and pseudo-periodic (or quasi-periodic) arrays. Full article
(This article belongs to the Topic Antennas)
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11 pages, 3226 KB  
Article
Endless Single-Mode Photonics Crystal Fiber Metalens for Broadband and Efficient Focusing in Near-Infrared Range
by Qiancheng Zhao, Jiaqi Qu, Gangding Peng and Changyuan Yu
Micromachines 2021, 12(2), 219; https://doi.org/10.3390/mi12020219 - 21 Feb 2021
Cited by 18 | Viewed by 5099
Abstract
The advent of the ‘lab-on-fiber’ concept has boosted the prosperity of optical fiber-based platforms integrated with nanostructured metasurface technology which are capable of controlling the light at the nanoscale for multifunctional applications. Here, we propose an endless single-mode large-mode-area photonic crystal fiber (LMA-PCF) [...] Read more.
The advent of the ‘lab-on-fiber’ concept has boosted the prosperity of optical fiber-based platforms integrated with nanostructured metasurface technology which are capable of controlling the light at the nanoscale for multifunctional applications. Here, we propose an endless single-mode large-mode-area photonic crystal fiber (LMA-PCF) integrated metalens for broadband and efficient focusing from 800 to 1550 nm. In the present work, the optical properties of the substrate LMA-PCF were investigated, and the metalens, consisting of dielectric TiO2 nanorods with varying radii, was elaborately designed in the fiber core region with a diameter of 48 μm to cover the required phase profile for efficient focusing with a high transmission. The focusing characteristics of the designed metalens were also investigated in detail over a wide wavelength range. It is shown that the in-fiber metalens is capable of converging the incident beams into the bright, symmetric, and legible focal spots with a large focal length of 315–380 μm depending on the operating wavelength. A high and average focusing efficiency of 70% was also obtained with varying wavelengths. It is believed the proposed fiber metalens may show great potential in applications including fiber laser configuration, machining, and fiber communication. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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10 pages, 2154 KB  
Article
Active Surface with Dynamic Microstructures and Hierarchical Gradient Enabled by in situ Pneumatic Control
by Jian-Nan Wang, Benfeng Bai, Qi-Dai Chen and Hong-Bo Sun
Micromachines 2020, 11(11), 992; https://doi.org/10.3390/mi11110992 - 4 Nov 2020
Cited by 2 | Viewed by 3260
Abstract
An active surface with an on-demand tunable topography holds great potential for various applications, such as reconfigurable metasurfaces, adaptive microlenses, soft robots and four-dimensional (4D) printing. Despite extensive progress, to achieve refined control of microscale surface structures with large-amplitude deformation remains a challenge. [...] Read more.
An active surface with an on-demand tunable topography holds great potential for various applications, such as reconfigurable metasurfaces, adaptive microlenses, soft robots and four-dimensional (4D) printing. Despite extensive progress, to achieve refined control of microscale surface structures with large-amplitude deformation remains a challenge. Moreover, driven by the demand of constructing a large area of microstructures with increased complexity—for instance, biomimetic functional textures bearing a three-dimensional (3D) gradient—novel strategies are highly desired. Here, we develop an active surface with a dynamic topography and three-tier height gradient via a strain-tunable mismatching-bonding process. Pneumatic actuation allows for rapid, reversible and uniform regulation of surface microstructures at the centimeter scale. The in-situ modulation facilitates large-amplitude deformation with a maximum tuning range of 185 μm. Moreover, the structural gradient can be modulated by programming the strain value of the bonding process. With our strategy, another two types of surfaces with a four-tier gradient and without gradient were also prepared. By providing active modulation and design flexibility of complicated microstructures, the proposed strategy would unlock more opportunities for a wealth of novel utilizations. Full article
(This article belongs to the Special Issue Additive Nano-Manufacturing)
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33 pages, 3916 KB  
Review
Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces
by Taejun Lee, Chihun Lee, Dong Kyo Oh, Trevon Badloe, Jong G. Ok and Junsuk Rho
Sensors 2020, 20(15), 4108; https://doi.org/10.3390/s20154108 - 23 Jul 2020
Cited by 47 | Viewed by 13152
Abstract
Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces [...] Read more.
Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods. Full article
(This article belongs to the Collection Advances in Metamaterials or Plasmonics-Based Sensors)
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30 pages, 10898 KB  
Review
Nonlinear Optics in Dielectric Guided-Mode Resonant Structures and Resonant Metasurfaces
by Varun Raghunathan, Jayanta Deka, Sruti Menon, Rabindra Biswas and Lal Krishna A.S
Micromachines 2020, 11(4), 449; https://doi.org/10.3390/mi11040449 - 24 Apr 2020
Cited by 26 | Viewed by 9352
Abstract
Nonlinear optics is an important area of photonics research for realizing active optical functionalities such as light emission, frequency conversion, and ultrafast optical switching for applications in optical communication, material processing, precision measurements, spectroscopic sensing and label-free biological imaging. An emerging topic in [...] Read more.
Nonlinear optics is an important area of photonics research for realizing active optical functionalities such as light emission, frequency conversion, and ultrafast optical switching for applications in optical communication, material processing, precision measurements, spectroscopic sensing and label-free biological imaging. An emerging topic in nonlinear optics research is to realize high efficiency optical functionalities in ultra-small, sub-wavelength length scale structures by leveraging interesting optical resonances in surface relief metasurfaces. Such artificial surfaces can be engineered to support high quality factor resonances for enhanced nonlinear optical interaction by leveraging interesting physical mechanisms. The aim of this review article is to give an overview of the emerging field of nonlinear optics in dielectric based sub-wavelength periodic structures to realize efficient harmonic generators, wavelength mixers, optical switches etc. Dielectric metasurfaces support the realization of high quality-factor resonances with electric field concentrated either inside or in the vicinity of the dielectric media, while at the same time operate at high optical intensities without damage. The periodic dielectric structures considered here are broadly classified into guided-mode resonant structures and resonant metasurfaces. The basic physical mechanisms behind guided-mode resonances, electromagnetically-induced transparency like resonances and bound-states in continuum resonances in periodic photonic structures are discussed. Various nonlinear optical processes studied in such structures with example implementations are also reviewed. Finally, some future directions of interest in terms of realizing large-area metasurfaces, techniques for enhancing the efficiency of the nonlinear processes, heterogenous integration, and extension to non-conventional wavelength ranges in the ultra-violet and infrared region are discussed. Full article
(This article belongs to the Special Issue Nonlinear Photonics Devices)
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