Search Results (50)

This paper presents a three-degrees-of-freedom origami parallel robot that is free from parasitic motion. This robot is designed to achieve one translational and two rotational motions within its workspace, enabling precise orientation about a fixed point—a capability unattainable for parallel robots with parasitic motion. The elimination of parasitic motion is critical, allowing the use of this device in applications requiring high precision. The robot’s key kinematic features include a parasitic motion-free workspace, large orientational capability, compactness, decoupled motion, simplicity in manufacturing and control, mechanically pivoted rotation of the moving platform, and scalability. These characteristics make the robot particularly well-suited for micromanipulation tasks in both manufacturing and medical applications. In manufacturing, it can enable high-precision operations such as micro-assembly, optical fiber alignment, and semiconductor packaging. In medicine, it can support delicate procedures such as microsurgery and cell injection, where sub-micron accuracy, high stability, and precise motion decoupling are critical requirements. The use of nearly identical limbs simplifies the architecture, facilitating easier design, manufacture, and control. The kinematics of the robot is analyzed using reciprocal screw theory for an analytic constraint-embedded Jacobian. To further enhance operational accuracy and robustness, particularly in the presence of uncertainties or disturbances, a deep neural network (DNN)-based state estimation method is integrated, providing accurate forward kinematic predictions. The construction of the robot utilizes origami-inspired limbs and joints, enhancing miniaturization, manufacturing simplicity, and foldability. Although capable of being scaled up or further miniaturized, its current size is 66 mm × 68 mm × 100 mm. The robot’s moving platform is theoretically and experimentally proven to be free of parasitic motion and possesses a large orientation capability. Its unique features are demonstrated, and its potential for high-precision applications is thoroughly discussed. Full article

This study presents a topological design and modeling framework for 3D-printed robotic grippers, tailored for combined precision and coarse robotics assembly. The proposed methodology leverages topology optimization to develop multi-scale-compliant mechanisms, comprising a symmetrical continuum structure of five beams. The proposed methodology centers on the hybrid kinematics for precision and coarse operations of the gripper, parametrizing beam deformations in response to a defined set of boundary conditions and varying input loads. The research employs topology analysis to draw a clear correlation between input load and resultant motion, with a particular emphasis on the mechanism’s capacity to integrate both fine and coarse movements efficiently. Additionally, the paper pioneers an innovative solution to the ubiquitous point-contact problem encountered in grasping, intricately weaving it with the stiffness matrix. The overarching aim remains to provide a streamlined design methodology, optimized for manufacturability, by harnessing the capabilities of contemporary 3D fabrication techniques. This multifaceted approach, underpinned by the multiscale grasping method, promises to significantly advance the domain of robotic gripping and manipulation across applications such as micro-assembly, biomedical manipulation, and industrial robotics. Full article

With the ongoing journey of automation advancements and a trend towards miniaturization, the choice of actuator plays a crucial role. Over recent years, soft actuators have demonstrated their usefulness in various applications, especially where light weight and high strain are required. Dielectric elastomer actuators (DEAs) are a class of soft actuators that provide high-strain actuation possibilities in applications like biomedicine, logistics, or consumer electronics. A variety of work featuring DEAs for actuation has been carried out in recent years, but a single work detailing the design conception, fabrication, modeling and experimental validation is lacking, especially in the context of achieving high strains with the integration of multiple electrodes and their interaction. This work discusses these issues with an equibiaxial DEA, enabling optimized equibiaxial strain patterns due to full use of the available actuation area. The developed DEA can achieve an equibiaxial strain of 12.75% for actuation at 60 V μm⁻¹ over an active area of 7 cm² which is an improvement of 1.3 times compared to traditional dot actuators. These properties position the device as a promising alternative for various applications like cell cultures or microassembly and provide an advantage of optimized use of passive regions within the actuator. Full article

A skin friction sensor is a three-dimensional MEMS sensor specially designed for measuring the skin friction of hypersonic vehicle models. The accuracy of skin friction measurement under hypersonic laminar flow conditions is closely related to the fabrication and micro-assembly accuracy of MEMS skin friction sensors. In order to achieve accurate skin friction measurement, high-precision linear laser scanning ranging, multi-axis precision drive, and 3D reconstruction algorithms are investigated; a MEMS skin friction sensor micro-assembly height error measurement system is developed; and the MEMS skin friction sensor micro-assembly height error control method is carried out. The results show that the micro-assembly height error measurement of MEMS skin friction sensors achieves an accuracy of up to 2 μm. The height errors of the MEMS skin friction sensor were controlled within −8 μm to +10 μm after error control. The angular errors were controlled within the range of 0.05–0.25°, significantly improving micro-assembly accuracy in the height direction of the MEMS skin friction sensor. The results of hypersonic wind tunnel tests indicate that the deviation in the accuracy of the MEMS skin friction sensors after applying height error control is about 5%, and the deviation from the theoretical value is 8.51%, which indicates that height error control lays the foundation for improving the accuracy of skin friction measurement under hypersonic conditions. Full article

MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple Sm₂Co₁₇ micromagnets in a ferromagnetic core is presented. We experimentally demonstrate the feasibility of a multipolar micrometric magnetic rotor with 11 magnetic dipoles made of N35 Sm₂Co₁₇ micromagnets (length below 250 μm and thickness of 65 μm), integrated on a ferromagnetic core. We explain the micromanufacturing methods and the multistep microassembly process. The core is manufactured on ferromagnetic alloy Fe₄₉Co₄₉V₂ and has an external diameter of 800 μm and a thickness of 200 μm. Magnetic and geometric measurements show good geometric fitting and planarity. The manufactured microrotor also shows good agreement among the magnetic measurements and the magnetic simulations which means that there is no magnetic degradation of the permanent magnet during the manufacturing and assembly process. This technique enables new design possibilities to significantly increase the performance of micromotors or MEMS. Full article

A transportation system requires an asymmetry to achieve objects’ motion on an oscillating surface. Transportation methods based on vibrational techniques usually employ different types of asymmetries, such as temporal (time) asymmetry, kinematic asymmetry, wave asymmetry or power asymmetry. However, transporting an object on an inclined angle requires a relatively high net frictional force over each period of vibrational cycles due to the gravitational potential energy exerted on the object. This paper investigates the transportation of an object upward on an inclined plane that harmonically oscillates in its longitudinal direction. The novelty of this research is attributed to the upward motion of the object on the inclined plane, which is achieved by creating an additional asymmetry of the system through dry friction dynamic manipulations. For this reason, periodic dynamic dry friction manipulations have been employed to create the asymmetry of frictional conditions, resulting in a net frictional force that outweighs the gravitational force. A mathematical model has been developed using the Lagrange method, which describes the moving object’s motion. Moreover, the theoretical findings and results confirmed that the object’s velocity and direction can be controlled by dynamic dry friction manipulations. To demonstrate the technical feasibility of the proposed method, an experimental investigation was carried out where the results demonstrated that the control parameters significantly influence the characteristics of the directional motion of the moving object. This transportation method is beneficial for various modern industries engaged in transportation and manipulation tasks with objects spanning a broad range of sizes, including those operating at small scales for applications in lab-on-a-chip technology, micro-assembly lines, micro-feeder systems and other delicate component manipulation systems. The presented research advances the classical theories of vibrational transportation on inclined surfaces. Full article

The presented study demonstrates the capability of the template-based electrokinetic assembly (TEA) and guidance to manipulate and capture individual biological cells within a microfluidic platform. Specifically, dielectrophoretic (DEP) focusing of K-562 cells towards lithographically-defined “wells” on the microelectrodes and positioning singles cells withing these “wells” was demonstrated. K-562 lymphoblast cells, are widely used in immunology research. The DEP guidance, particularly involving positive DEP (pDEP), enables the controlled guidance and positioning of conductive and dielectric particles, including biological cells, opening new directions for the accurate and efficient microassembly of biological entities, which is crucial for single cell analysis and other applications in biotechnology. The investigation explores the use of glassy carbon and gold as electrode materials. It was established previously that undiluted physiological buffer is unsuitable for inducing positive DEP (pDEP); therefore, the change of media into a lower ionic concentration is necessary. After pDEP was observed, the cells are resubmerged in the Iscove’s modified Dulbecco’s medium (IMEM), a cell culturing media, and incubated. A dead/alive staining assay was performed on the cells to determine their survival in the diluted buffer for the period required to capture them. The staining assay confirmed the cells’ survival after being immersed in the diluted biological buffer necessary for electrokinetic handling. The results indicate the promise of the proposed electrokinetic bio-sorting technology for applications in tissue engineering, lab-on-a-chip devices, and organ-on-a-chip models, as well as contributing to the advancement of single cell analysis. Full article

We designed a 3D geometrical model of a metal-oxide gas sensor and its custom packaging and used it in finite element modeling (FEM) analysis for obtaining temperature and heat flux distribution. The 3D computer simulation, performed with GetDP software (version 3.5.0, 13 May 2022), accurately predicted the temperature distribution variation across the entire assembly. Knowing the temperature variation and the location of the hot spots allowed us to select the best electrical interconnect method and to choose the optimal materials combination and optimal geometry. The thermal modeling also confirmed the need to use a low thermal conductivity material to insulate the MOX sensor since the latter is heated to its operational temperature of 250 °C. For that purpose, we used the in-house formulated xerogel–epoxy composite of thermal conductivity of 0.108 W m⁻¹ K⁻¹, which is at least 30% less compared to the best-in-class among commercially available materials. Based on the 3D FEM outputs, we designed, assembled, and characterized a fully functional packaged MOX gas sensor in several configurations. We measured the temperature distribution on all parts of the MOX gas sensor assembly using a thermal imaging infrared (IR) microscope. The results of 3D FEM are in good agreement with the temperature distribution obtained by the non-contact IR thermal characterization. Full article

Biomimetic switchable adhesion interfaces (BSAIs) with dynamic adhesion states have demonstrated significant advantages in micro-manipulation and bio-detection. Among them, gecko-inspired adhesives have garnered considerable attention due to their exceptional adaptability to extreme environments. However, their high adhesion strength poses challenges in achieving flexible control. Herein, we propose an elegant and efficient approach by fabricating three-dimensional mushroom-shaped polydimethylsiloxane (PDMS) micropillars on a flexible PDMS substrate to mimic the bending and stretching of gecko footpads. The fabrication process that employs two-photon polymerization ensures high spatial resolution, resulting in micropillars with exquisite structures and ultra-smooth surfaces, even for tip/stem ratios exceeding 2 (a critical factor for maintaining adhesion strength). Furthermore, these adhesive structures display outstanding resilience, enduring 175% deformation and severe bending without collapse, ascribing to the excellent compatibility of the micropillar’s composition and physical properties with the substrate. Our BSAIs can achieve highly controllable adhesion force and rapid manipulation of liquid droplets through mechanical bending and stretching of the PDMS substrate. By adjusting the spacing between the micropillars, precise control of adhesion strength is achieved. These intriguing properties make them promising candidates for various applications in the fields of microfluidics, micro-assembly, flexible electronics, and beyond. Full article

In the realm of automatic wire-traction micromanipulation systems, the alignment of the central axis of the coil with the rotation axis of the rotary stage can be a challenge, which leads to the occurrence of eccentricity during rotation. The wire-traction is conducted at a micron-level of manipulation precision on micron electrode wires; eccentricity has a significant impact on the control accuracy of the system. To resolve the problem, a method for measuring and correcting the coil eccentricity is proposed in this paper. First, models of radial and tilt eccentricity are established respectively based on the eccentricity sources. Then, measuring eccentricity is proposed by an eccentricity model and microscopic vision; the model is used to predict eccentricity, and visual image processing algorithms are used to calibrate model parameters. In addition, a correction based on the compensation model and hardware is designed to compensate for the eccentricity. The experimental results demonstrate the accuracy of the models in predicting eccentricity and the effectiveness of correction. The results show that the models have an accurate prediction for eccentricity that relies on the evaluation of the root mean square error (RMSE); the maximal residual error after correction was within 6 μm, and the compensation was approximately 99.6%. The proposed method, which combines the eccentricity model and microvision for measuring and correcting eccentricity, offers improved wire-traction micromanipulation accuracy, enhanced efficiency, and an integrated system. It has more suitable and wider applications in the field of micromanipulation and microassembly. Full article

This paper presents the design, fabrication and testing of a shape memory alloy (SMA)-actuated monolithic compliant gripping mechanism that enables translational motion of the gripper tips for grasping operation suitable for micromanipulation and microassembly. The design is validated using a finite element analysis (FEA), and a prototype is created for experimental testing. The reported gripping structure is simple and easy to build and design. The gripper is demonstrated to have a displacement amplification gain of 3.7 that allows maximum tip displacement up to 1.2 cm to possess good handling range and geometric advantage which cannot be accomplished by conventional grippers. The position of the gripper tip is predicted from the variation in the electrical resistance of the SMA wire based on the self-sensing phenomena. Self-sensing actuation of the SMA allows the design of a compact and lightweight structure; moreover, it supports the control loop/scheme to use the same SMA element both as an actuator and sensor for position control. The geometrical dimensions of the SMA wire-actuated monolithic compliant gripper is 0.09 m × 0.04 m and can be operated to handle objects with a maximum size of 0.012 m weighing up to 35 g. Full article

For assembly of trans-scale micro-device capsule fill tube assemblies (CFTA) for inertial confinement fusion (ICF) targets, a high-precision space assembly approach based on micro-vision is proposed in this paper. The approach consists of three modules: (i) a posture alignment module based on a multi-vision monitoring model that is designed to align two trans-scale micro-parts in 5DOF while one micro-part is in ten microns and the other one is in hundreds of microns; (ii) an insertion depth control module based on a proposed local deformation detection method to control micro-part insertion depth; (iii) a glue mass control module based on simulation research that is designed to control glue mass quantitatively and to bond micro-parts together. A series of experiments were conducted and experimental results reveal that attitude alignment control error is less than ±0.3°, position alignment control error is less than ±5 µm, and insertion depth control error is less than ±5 μm. Deviation of glue spot diameter is controlled at less than 15 μm. A CFTA was assembled based on the proposed approach, the position error in 3D space measured by computerized tomography (CT) is less than 5 μm, and glue spot diameter at the joint is 56 μm. Through volume calculation by the cone calculation formula, the glue mass is about 23 PL when the cone height is half the diameter. Full article

Microassembly is one of the key techniques in various advanced industrial applications. Meanwhile, high success rates for axial hole assembly of thin-walled deep-cavity-type items remain a challenging issue. Hence, the flexible assembly approach of thin-walled deep-cavity parts is investigated in this study using the assembly of the key components, the microtarget component TMP (thermomechanical package) and the hohlraum in ICF (inertial confinement fusion) research, as examples. A clamping force-assembly force mapping model based on multisource microforce sensors was developed to overcome the incapacity of microscopic vision to properly identify the condition of components after contact. The ICF microtarget flexible assembly system, which integrates multisource microforce sensing and a six degrees of freedom micromotion sliding table, is presented to address the constraint that the standard microassembly approach is difficult to operate once the parts contact. This method can detect contact force down to the mN level, modify deviation of the component posture efficiently, and achieve nondestructive ICF microtarget assembly at the end. Full article

Capillary forces are shown to be extremely effective for micro-assembly and pick-and-place processes, especially for their ability to self-align the handled objects. However, in today’s machines, micro-objects are submitted to high loads, such as compressions for the electrical testing of the micro-components, or inertial forces coming from the high accelerations of the machines. There, capillary grippers may show some limits. These issues, as well as the difficulty to perform precise visual inspections (due to the tilt of the handled micro-object that can occur after a perturbation, such as the displacement of the gripper), can all be solved by temporarily removing the liquid meniscus. Therefore, we present a novel volume-tuning capillary gripper that provides a solution to these limitations without adding additional significant complexities or changes to the existing pick-and-place machines. A multi-scale prototype was dimensioned and produced by using fast prototyping methods, such as a femtosecond laser-assisted chemical etching process for fused silica. Models bringing a deeper understanding of the subsystems are presented. The proof of concept was extensively tested. Its picking capabilities and enhancements of the handling capabilities during horizontal motions, as well as the repeatability of the tuning of the volume of liquid, are presented. Full article

As the basic tools for neuroscience research, invasive neural recording devices can obtain high-resolution neuronal activity signals through electrodes connected to the subject’s brain. Existing wireless neural recording devices are large in size or need external large-scale equipment for wireless power supply, which limits their application. Here, we developed an ultra-low-noise, low power and miniaturized dual-channel wireless neural recording microsystem. With the full-differential front-end structure of the dual operational amplifiers (op-amps), the noise level and power consumption are notably reduced. The hierarchical microassembly technology, which integrates wafer-level packaged op-amps and the miniaturized Bluetooth module, dramatically reduces the size of the wireless neural recording microsystem. The microsystem shows a less than 100 nV/$\sqrt{\mathrm{Hz}}$ ultra-low noise level, about 10 mW low power consumption, and 9 × 7 × 5 mm${}^3$ small size. The neural recording ability was then demonstrated in saline and a chronic rat model. Because of its miniaturization, it can be applied to freely behaving small animals, such as rats. Its features of ultra-low noise and high bandwidth are conducive to low-amplitude neural signal recording, which may help advance neuroscientific discovery. Full article