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Keywords = tunnel magnetoresistance sensor

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17 pages, 4437 KiB  
Article
A Positioning System Design Based on Tunnel Magnetoresistance Sensors for Rapid Zoom Optical Lens
by Junqiang Gong, Dameng Liu and Jianbin Luo
Sensors 2025, 25(6), 1820; https://doi.org/10.3390/s25061820 - 14 Mar 2025
Viewed by 481
Abstract
In response to the accurate positioning issue for high-speed moving lens groups in rapid zoom optical lenses with voice coil motors (VCMs), we demonstrate a positioning system design based on tunnel magnetoresistance sensors. The equivalent magnetic charge method and finite element method (FEM) [...] Read more.
In response to the accurate positioning issue for high-speed moving lens groups in rapid zoom optical lenses with voice coil motors (VCMs), we demonstrate a positioning system design based on tunnel magnetoresistance sensors. The equivalent magnetic charge method and finite element method (FEM) simulations were utilized to compute the magnetic field distribution of the magnetic grating encoder. Based on analytical computation, the optimal air gap δS between the sensor and magnetic grating is determined to be δS = 0.15 mm, which balances magnetic flux density amplitude and total harmonic distortion. In addition, a simplified fitting model is proposed to reduce computational complexity. We quantify the magnetic interference of VCM through three-dimensional flux leakage mapping by FEM analysis, deriving an optimal sensor position OS, with a 24 mm y-offset and 20 mm z-offset relative to the VCM’s origin OV. The position error caused by interference remains below 5 μm with maximum deviations at trajectory endpoints of the moving group. The original signal output is processed and corrected, and eventually, the measured displacement exhibits a linear relationship with actual displacement. Our study provides a comprehensive framework for the design and optimization of magnetic positioning systems in optical applications with electromagnetic motors. Full article
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16 pages, 1923 KiB  
Article
A High-Sensitivity, Low-Noise, and Low-Hysteresis Tunneling Magnetoresistance Sensor Based on Structural Optimization of Magnetic Tunnel Junctions
by Ran Bi, Ruiying Chen, Shilin Wu, Haoyu Ma, Huiquan Zhang, Xinting Liu, Jinliang He and Jun Hu
Sensors 2025, 25(6), 1730; https://doi.org/10.3390/s25061730 - 11 Mar 2025
Viewed by 545
Abstract
Accurate measurement of magnetic fields holds immense significance across various disciplines, such as IC circuit measurement, geological exploration, and aerospace. The sensitivity and noise parameters of magnetic field sensors play a vital role in detecting minute fluctuations in magnetic fields. However, the current [...] Read more.
Accurate measurement of magnetic fields holds immense significance across various disciplines, such as IC circuit measurement, geological exploration, and aerospace. The sensitivity and noise parameters of magnetic field sensors play a vital role in detecting minute fluctuations in magnetic fields. However, the current detection capability of tunneling magnetoresistance (TMR) is insufficient to meet the requirements for weak magnetic field measurement. This study investigates the impact of structural and fabrication parameters on the performance of TMR sensors. We fabricated series-connected TMR sensors with varying long-axis lengths of the elliptical cross-section and adjusted their performance by modifying annealing magnetic fields and magnetic field bias along the easy axis. The results demonstrate that TMR sensitivity decreases with increasing long-axis length, increases initially and then decreases with an annealing magnetic field, and decreases with a higher bias magnetic field along the easy axis. The voltage noise level of TMR sensors decreases as the long-axis length increases. Notably, the detection capability of TMR sensors exhibits a non-monotonic dependence on long-axis length. Moreover, we optimized the hysteresis of TMR sensors by applying a magnetic field bias along the easy axis. When the bias along the easy axis reached 16 Oe or −40 Oe, the hysteresis level was reduced to below 0.5 Oe. After encapsulating the TMR devices into a full Wheatstone bridge structure, we achieved a detection capability of 17 nT/Hz@1Hz. This study highlights that the detection capability of TMR devices is jointly influenced by fabrication parameters. By optimizing parameter configuration, this work provides theoretical guidance for further enhancing the performance of TMR devices in magnetic field measurements. Full article
(This article belongs to the Section Physical Sensors)
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12 pages, 3613 KiB  
Article
Design and Simulation of Magnetic Shielding Structure Based on Closed-Loop TMR Current Sensor
by Qiuyang Li, Suqin Xiong, Shuo Wang, Xianguang Dong and Haifeng Zhang
Micromachines 2025, 16(3), 272; https://doi.org/10.3390/mi16030272 - 27 Feb 2025
Viewed by 489
Abstract
With the rapid development of current sensor technology, tunnel magnetoresistance (TMR) current sensors have been widely adopted in industrial detection due to their high sensitivity, excellent linearity, and broad measurement range. This study focuses on closed-loop TMR current sensors, utilizing COMSOL Multiphysics 6.2 [...] Read more.
With the rapid development of current sensor technology, tunnel magnetoresistance (TMR) current sensors have been widely adopted in industrial detection due to their high sensitivity, excellent linearity, and broad measurement range. This study focuses on closed-loop TMR current sensors, utilizing COMSOL Multiphysics 6.2 software and the finite element method to conduct an in-depth analysis of structural parameters affecting sensor sensitivity. A novel magnetic shielding package architecture is proposed and designed. Simulation results demonstrate that the shielding efficiency of this structure improves by 44.3% compared to a single magnetic ring under a stray magnetic field of 0.1 mT along the sensing axis. At the same time, the measurement accuracy is 2.1 times higher than that of traditional structures. Current detection experiments conducted in a strong magnetic field environment further validate that the shielding package effectively suppresses external electromagnetic interference, significantly enhancing sensor stability and measurement accuracy. This research provides important theoretical and practical insights for applying high-precision TMR current sensors in complex electromagnetic environments. Full article
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12 pages, 4100 KiB  
Article
High-Precision Tunneling Magnetoresistance (TMR) Current Sensor for Weak Current Measurement in Smart Grid Applications
by Yong Xu, Zhenhu Jin and Jiamin Chen
Micromachines 2025, 16(2), 136; https://doi.org/10.3390/mi16020136 - 24 Jan 2025
Viewed by 1030
Abstract
To meet the demand for high-precision, high-resolution measurement of weak currents in smart grids, this article presents the design of a current sensor based on the tunneling magnetoresistance (TMR) effect. To improve the detection accuracy of the sensor, this design adopts a low-noise, [...] Read more.
To meet the demand for high-precision, high-resolution measurement of weak currents in smart grids, this article presents the design of a current sensor based on the tunneling magnetoresistance (TMR) effect. To improve the detection accuracy of the sensor, this design adopts a low-noise, high-sensitivity TMR chip as its chip selection; in the sensor circuit, a high-linearity interface circuit is used to eliminate fixed bias; and a magnetic flux concentrator is used to improve sensitivity and anti-interference capability. Experimental results indicate that the sensor achieves a sensitivity of 29.4 mV/V/mA, a linearity of 0.19%, and an accuracy of 0.045% within a ±100 mA range, supporting current measurement from DC up to 10.5 kHz. The proposed sensor demonstrates several advantages, including a wide measurement range, high accuracy, high resolution, and non-invasive measurement capability, making it well suited for weak current detection in smart grid applications. Full article
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12 pages, 6474 KiB  
Article
A Novel Magnetic Flux Leakage Method Incorporating TMR Sensors for Detecting Zinc Dross Defects on the Surface of Hot-Dip Galvanized Sheets
by Bo Wang, San Zhang, Jie Wang, Liqin Jing and Feilong Mao
Magnetochemistry 2024, 10(12), 101; https://doi.org/10.3390/magnetochemistry10120101 - 10 Dec 2024
Viewed by 802
Abstract
Surface quality control of hot-dip galvanized sheets is a critical research topic in the metallurgical industry. Zinc dross, the most common surface defect in the hot-dip galvanizing process, significantly affects the sheet’s service performance. In this manuscript, a novel magnetic flux leakage (MFL) [...] Read more.
Surface quality control of hot-dip galvanized sheets is a critical research topic in the metallurgical industry. Zinc dross, the most common surface defect in the hot-dip galvanizing process, significantly affects the sheet’s service performance. In this manuscript, a novel magnetic flux leakage (MFL) detection method was proposed to detect zinc dross defects on the surface of hot-dip galvanized steel sheets. Instead of using exciting coils in traditional methods, a tiny permanent magnet with a millimeter magnitude was employed to reduce the size and weight of the equipment. Additionally, a high-precision tunnel magnetoresistance (TMR) sensor with a sensitivity of 300 mV/V/Oe was selected to achieve higher detection accuracy. The experimental setup was established, and the x-axis direction (sample movement direction) was determined as the best measurement axis by vector analysis through experiments and numerical simulation. The detection results indicate that this novel MFL detection method could detect industrial zinc dross with an equivalent size of 400 μm, with high signal repeatability and signal-to-noise ratio. In the range of 0–1200 mm/s, the detection speed has almost no effect on the measurement signal, which indicates that this novel method has higher adaptability to various conditions. The multi-path scanning method with a single probe was used to simulate the array measurement to detect a rectangular area of 30 × 60 mm. Ten zinc dross defects were detected across eight measurement paths with 4 mm intervals, and the positions of these zinc dross defects were successfully reconstructed. The research results indicate that this novel MFL detection method is simple and feasible. Furthermore, the implementation of array measurements provides valuable guidance for subsequent in-depth research and potential industrial applications in the future. Full article
(This article belongs to the Section Applications of Magnetism and Magnetic Materials)
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17 pages, 3550 KiB  
Article
A High-Precision Temperature Compensation Method for TMR Weak Current Sensors Based on FPGA
by Jie Wu, Ke Zhou, Qingren Jin, Baihua Lu, Zhenhu Jin and Jiamin Chen
Micromachines 2024, 15(12), 1407; https://doi.org/10.3390/mi15121407 - 22 Nov 2024
Cited by 2 | Viewed by 3004
Abstract
Tunnel magnetoresistance (TMR) sensors, known for their high sensitivity, efficiency, and compact size, are ideal for detecting weak currents, particularly leakage currents in smart grids. However, temperature variations can negatively impact their accuracy. This work investigates the effects of temperature variations on measurement [...] Read more.
Tunnel magnetoresistance (TMR) sensors, known for their high sensitivity, efficiency, and compact size, are ideal for detecting weak currents, particularly leakage currents in smart grids. However, temperature variations can negatively impact their accuracy. This work investigates the effects of temperature variations on measurement accuracy. We analyzed the operating principles and temperature characteristics of TMR sensors and proposed a high-precision, software-based temperature compensation method using cubic spline interpolation combined with polynomial regression and zero-point self-calibration. Additionally, a field-programmable gate array (FPGA)-based temperature compensation circuit was designed and implemented. An experimental platform was established to comprehensively evaluate the sensor’s performance under various temperature conditions. Experimental results demonstrate that this method significantly enhances the sensor’s temperature stability, reduces the sensitivity temperature drift coefficient, and improves zero-point drift stability, outperforming other compensation methods. After compensation, the sensor’s measurement accuracy in complex temperature environments is substantially improved, enabling effective weak current detection in smart grids across diverse environments. Full article
(This article belongs to the Section A:Physics)
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14 pages, 4403 KiB  
Article
Temperature Compensation Method for Tunnel Magnetoresistance Micro-Magnetic Sensors Through Reference Magnetic Field
by Tao Kuai, Qingfa Du, Jiafei Hu, Shilong Shi, Peisen Li, Dixiang Chen and Mengchun Pan
Micromachines 2024, 15(10), 1271; https://doi.org/10.3390/mi15101271 - 20 Oct 2024
Cited by 1 | Viewed by 1395
Abstract
The sensitivity of Tunnel Magnetoresistance (TMR) sensors is characterized by significant temperature drift and poor sensitivity drift repeatability, which severely impairs measurement accuracy. Conventional temperature compensation techniques are often hindered by low compensation precision, inadequate real-time performance, and an inability to effectively address [...] Read more.
The sensitivity of Tunnel Magnetoresistance (TMR) sensors is characterized by significant temperature drift and poor sensitivity drift repeatability, which severely impairs measurement accuracy. Conventional temperature compensation techniques are often hindered by low compensation precision, inadequate real-time performance, and an inability to effectively address the issue of poor repeatability in temperature drift characteristics. To overcome these challenges, this paper introduces a novel method for suppressing temperature drift in TMR sensors. In this method, an alternating reference magnetic field is applied to TMR sensors, and the output amplitude at the frequency of the reference magnetic field is calculated to compensate the sensitivity temperature drift in real time. Temperature characteristic tests were conducted in a non-magnetic temperature test chamber, and the results revealed that the proposed method significantly reduced the TMR sensitivity drift coefficient from 985.39 ppm/°C to 59.08 ppm/°C. Additionally, the repeatability of sensitivity temperature characteristic curves was enhanced, with a reduction in root mean square error from 0.84 to 0.21. This approach effectively mitigates temperature-induced sensitivity drift without necessitating the use of a temperature sensor, and has the advantages of real-time performance and repeatability, providing a new approach for the high-precision temperature drift suppression of TMR. Full article
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14 pages, 3350 KiB  
Article
A Wide-Bandwidth Inexpensive Current Sensor Based on the Signal Fusion of Tunneling Magnetoresistance and a Current Transformer
by Kun Wang, Bin Li, Lixin Wang, Jiafu Wang, Chuansheng Li, Zhiwen Ding and Haiming Shao
Sensors 2024, 24(18), 6071; https://doi.org/10.3390/s24186071 - 19 Sep 2024
Viewed by 1058
Abstract
In technology and industrial production, many applications require wide-bandwidth current measurements. In this paper, a signal fusion scheme for a current sensor comprising tunneling magnetoresistance and a current transformer is proposed, achieving a flat frequency response in the DC to MHz range. The [...] Read more.
In technology and industrial production, many applications require wide-bandwidth current measurements. In this paper, a signal fusion scheme for a current sensor comprising tunneling magnetoresistance and a current transformer is proposed, achieving a flat frequency response in the DC to MHz range. The measurement principles in different cases of the scheme are introduced, and the total transfer function of the entire scheme is derived by analyzing each section separately. Furthermore, the feasibility and selected parameters of the scheme are verified through a systematic simulation utilizing the MATLAB software. Based on the proposed scheme, a group of principal prototypes are built to experimentally evaluate the bandwidth, amplitude and phase flatness, accuracy, sensitivity, and impulse response. The relative amplitude variation in the passband of the fusion sensor is less than 4%, and the estimated bandwidth of the fusion sensor is close to 17 MHz. The accuracy is better than 0.6%, even when measuring the current at 1 MHz, and the relative standard deviation is 5% when measuring the impulse signal. The sensors developed using this scheme, with a low financial cost, have advantages in many wide-bandwidth current measuring scenarios. Full article
(This article belongs to the Section Electronic Sensors)
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15 pages, 4483 KiB  
Article
High-Resolution Rotation-Measuring System for MEMS Ultrasonic Motors Using Tunneling Magnetoresistance Sensors
by Jiangbo He, Qiuyue Feng, Yu Chen, Tianyu Yang, Xiaoshi Li and Wu Zhou
Micromachines 2024, 15(8), 1028; https://doi.org/10.3390/mi15081028 - 12 Aug 2024
Viewed by 3978
Abstract
This study proposes a high-resolution rotation-measuring system for miniaturized MEMS ultrasonic motors using tunneling magnetoresistance (TMR) sensors for the first time. Initially, the architecture and principle of the rotation-measuring system are described in detail. Then, the finite element simulation is implemented to determine [...] Read more.
This study proposes a high-resolution rotation-measuring system for miniaturized MEMS ultrasonic motors using tunneling magnetoresistance (TMR) sensors for the first time. Initially, the architecture and principle of the rotation-measuring system are described in detail. Then, the finite element simulation is implemented to determine the miniaturized permanent magnet’s residual magnetization, dimensions, and TMR sensor position. Finally, the experiments are implemented to evaluate the performance. Using calibration based on a high-precision servo motor, it is found that the relationship between the output and rotational angle is highly linear and immune to the rotor’s out-of-plane movement. Meanwhile, the angle-detecting resolution is higher than 0.1°. After the calibration, the continuous rotation of the MEMS ultrasonic motor is tested. It is found that the angle testing result varies with a period close to 360°, which indicates that the rotation-measuring system has successfully detected the motor’s rotation. Full article
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17 pages, 4907 KiB  
Article
Rapid and Precise Zoom Lens Design Based on Voice Coil Motors with Tunnel Magnetoresistance Sensors
by Junqiang Gong and Jianbin Luo
Appl. Sci. 2024, 14(16), 6990; https://doi.org/10.3390/app14166990 - 9 Aug 2024
Cited by 1 | Viewed by 1785
Abstract
In response to the zooming delay issue during the transition from a wide-area search to high-resolution target identification in high-magnification zoom lenses, we propose a drive technology based on voice coil motors. The linear motion of the motor is directly converted into the [...] Read more.
In response to the zooming delay issue during the transition from a wide-area search to high-resolution target identification in high-magnification zoom lenses, we propose a drive technology based on voice coil motors. The linear motion of the motor is directly converted into the linear movement of the zoom lens group, significantly enhancing the zoom speed. Additionally, we introduce a high-precision closed-loop control technology utilizing a magnetic scale to achieve the rapid and precise positioning of the zoom lens group. The magnetic scale detection technology achieves precise positioning by detecting periodic changes in the magnetic field, working in conjunction with tunnel magnetoresistance sensors. Demonstrated with a 40× zoom lens example, this study elaborates on the motion trajectory planning and structural dimension design process of a voice coil motor, culminating in the assembly of a physical prototype. Practical validation experiments show that the full zoom time of the lens utilizing our technology is less than 0.3 s, where the full zoom time refers to the time required for the lens to zoom from the wide-angle end to the telephoto end. In positioning accuracy test experiments, lenses using our technology achieved a positioning deviation of less than 5 μm. Full article
(This article belongs to the Special Issue Advanced Optoelectronic Devices and Systems)
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16 pages, 6177 KiB  
Article
Magnetoresistive Shunt as an Alternative to Wheatstone Bridge Sensors in Electrical Current Sensing
by Diego Ramírez-Muñoz, Rafael García-Gil, Sandra Soriano-Díaz, Susana Cardoso and Paulo P. Freitas
Electronics 2024, 13(15), 2991; https://doi.org/10.3390/electronics13152991 - 29 Jul 2024
Viewed by 1335
Abstract
The main objective of the work is to investigate the capacity of a single magnetoresistance (MR) element to measure AC electrical currents. An instrumentation system is presented to characterize individually the four active elements of an MR bridge current sensor preserving their internal [...] Read more.
The main objective of the work is to investigate the capacity of a single magnetoresistance (MR) element to measure AC electrical currents. An instrumentation system is presented to characterize individually the four active elements of an MR bridge current sensor preserving their internal connections. The system suggests the possibility to sense electrical currents using only one element of the bridge opening the way to design new MR sensors based on this concept. Sensitivity, offset and non-linearity deviation were obtained using bridges of tunnel (TMR)- and giant (GMR)-based MR technologies. The single element embedded in a Wheatstone bridge configuration is used for practical current measurements in a 50 Hz line. An electronic circuitry is proposed to measure alternating (AC) currents with a single MR element, including a lock-in amplifier and an interface to properly convert the signal to its root mean square (rms) value with a resolution of 250 mA peak in the 125 A range. Full article
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13 pages, 6527 KiB  
Article
Residual Magnetic Field Testing System with Tunneling Magneto-Resistive Arrays for Crack Inspection in Ferromagnetic Pipes
by Shuxiang Zhao, Junqi Gao, Jiamin Chen and Lindong Pan
Sensors 2024, 24(11), 3259; https://doi.org/10.3390/s24113259 - 21 May 2024
Cited by 1 | Viewed by 1556
Abstract
Ferromagnetic pipes are widely used in the oil and gas industry. They are subject to cracks due to corrosion, pressure, and fatigue. It is significant to detect cracks for the safety of pipes. A residual magnetic field testing (RMFT) system is developed for [...] Read more.
Ferromagnetic pipes are widely used in the oil and gas industry. They are subject to cracks due to corrosion, pressure, and fatigue. It is significant to detect cracks for the safety of pipes. A residual magnetic field testing (RMFT) system is developed for crack detection in ferromagnetic pipes. Based on this background, a detection probe based on an array of tunneling magneto-resistive (TMR) sensors and permanent magnets is exploited. The probe is able to partially magnetize the pipe wall and collect magnetic signals simultaneously. First, a theoretical analysis of RMFT is presented. The physics principle of RMFT is introduced, and a finite element model is built. In the finite element simulations, the effects of the crack length and depth on the RMFT signal are analyzed, and the signal characteristics are selected to represent the crack size. Next, the validated experiments are conducted to demonstrate the feasibility of the proposed RMFT method in this paper. Full article
(This article belongs to the Special Issue Sensors in Nondestructive Testing)
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21 pages, 8129 KiB  
Article
Development and Application of a High-Precision Portable Digital Compass System for Improving Combined Navigation Performance
by Songhao Zhang, Min Cui and Peng Zhang
Sensors 2024, 24(8), 2547; https://doi.org/10.3390/s24082547 - 16 Apr 2024
Cited by 1 | Viewed by 1798
Abstract
There are not many high-precision, portable digital compass solutions available right now that can enhance combined navigation systems’ overall functionality. Additionally, there is a dearth of writing about these products. This is why a tunnel magnetoresistance (TMR) sensor-based high-precision portable digital compass system [...] Read more.
There are not many high-precision, portable digital compass solutions available right now that can enhance combined navigation systems’ overall functionality. Additionally, there is a dearth of writing about these products. This is why a tunnel magnetoresistance (TMR) sensor-based high-precision portable digital compass system is designed. First, the least-squares method is used to compensate for compass inaccuracy once the ellipsoid fitting method has corrected manufacturing and installation errors in the digital compass system. Second, the digital compass’s direction angle data is utilized to offset the combined navigation system’s mistake. The final objective is to create a high-performing portable TMR digital compass system that will enhance the accuracy and stability of the combined navigation system (abbreviated as CNS). According to the experimental results, the digital compass’s azimuth accuracy was 4.1824° before error compensation and 0.4580° after it was applied. The combined navigation system’s path is now more accurate overall and is closer to the reference route than it was before the digital compass was added. Furthermore, compared to the combined navigation route without the digital compass, the combined navigation route with the digital compass included is more stable while traveling through the tunnel. It is evident that the digital compass system’s design can raise the integrated navigation system’s accuracy and stability. The integrated navigation system’s overall performance may be somewhat enhanced by this approach. Full article
(This article belongs to the Section Navigation and Positioning)
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14 pages, 4569 KiB  
Article
Magnetoelectric Sensor Operating in d15 Thickness-Shear Mode for High-Frequency Current Detection
by Fuchao Li, Jingen Wu, Sujie Liu, Jieqiang Gao, Bomin Lin, Jintao Mo, Jiacheng Qiao, Yiwei Xu, Yongjun Du, Xin He, Yifei Zhou, Lan Zeng, Zhongqiang Hu and Ming Liu
Sensors 2024, 24(8), 2396; https://doi.org/10.3390/s24082396 - 9 Apr 2024
Cited by 2 | Viewed by 1645
Abstract
For the application of high-frequency current detection in power systems, such as very fast transient current, lightning current, partial discharge pulse current, etc., current sensors with a quick response are indispensable. Here, we propose a high-frequency magnetoelectric current sensor, which consists of a [...] Read more.
For the application of high-frequency current detection in power systems, such as very fast transient current, lightning current, partial discharge pulse current, etc., current sensors with a quick response are indispensable. Here, we propose a high-frequency magnetoelectric current sensor, which consists of a PZT piezoelectric ceramic and Metglas amorphous alloy. The proposed sensor is designed to work under d15 thickness-shear mode, with the resonant frequency around 1.029 MHz. Furthermore, the proposed sensor is fabricated as a high-frequency magnetoelectric current sensor. A comparative experiment is carried out between the tunnel magnetoresistance sensor and the magnetoelectric sensor, in the aspect of high-frequency current detection up to 3 MHz. Our experimental results demonstrate that the d15 thickness-shear mode magnetoelectric sensor has great potential for high-frequency current detection in smart grids. Full article
(This article belongs to the Special Issue Feature Papers in Physical Sensors 2024)
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23 pages, 5029 KiB  
Review
Magnetic Micro and Nano Sensors for Continuous Health Monitoring
by Tomasz Blachowicz, Ilda Kola, Andrea Ehrmann, Karoline Guenther and Guido Ehrmann
Micro 2024, 4(2), 206-228; https://doi.org/10.3390/micro4020015 - 6 Apr 2024
Cited by 5 | Viewed by 2808
Abstract
Magnetic micro and nano sensors can be used in a broad variety of applications, e.g., for navigation, automotives, smartphones and also for health monitoring. Based on physical effects such as the well-known magnetic induction, the Hall effect, tunnel magnetoresistance and giant magnetoresistance, they [...] Read more.
Magnetic micro and nano sensors can be used in a broad variety of applications, e.g., for navigation, automotives, smartphones and also for health monitoring. Based on physical effects such as the well-known magnetic induction, the Hall effect, tunnel magnetoresistance and giant magnetoresistance, they can be used to measure positions, flow, pressure and other physical properties. In biomedicine and healthcare, these miniaturized sensors can be either integrated into garments and other wearables, be directed through the body by passive capsules or active micro-robots or be implanted, which usually necessitates bio-functionalization and avoiding cell-toxic materials. This review describes the physical effects that can be applied in these sensors and discusses the most recent micro and nano sensors developed for healthcare applications. Full article
(This article belongs to the Section Microscale Physics)
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