Next Issue
Volume 2, June
Previous Issue
Volume 1, December
 
 

Actuators, Volume 2, Issue 1 (March 2013) – 1 article , Pages 1-18

  • Issues are regarded as officially published after their release is announced to the table of contents alert mailing list.
  • You may sign up for e-mail alerts to receive table of contents of newly released issues.
  • PDF is the official format for papers published in both, html and pdf forms. To view the papers in pdf format, click on the "PDF Full-text" link, and use the free Adobe Reader to open them.
Order results
Result details
Section
Select all
Export citation of selected articles as:
369 KiB  
Article
State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration
by Yu Cao and Xiongbiao Chen
Actuators 2013, 2(1), 1-18; https://doi.org/10.3390/act2010001 - 08 Mar 2013
Cited by 5 | Viewed by 8386
Abstract
Due to their fast response, high accuracy and non-friction force, piezo-actuators have been widely employed in multiple degree-of-freedom (DOF) stages for various nano-positioning applications. The use of flexible hinges in these piezo-actuator-driven stages allows the elimination of the influence of friction and backlash [...] Read more.
Due to their fast response, high accuracy and non-friction force, piezo-actuators have been widely employed in multiple degree-of-freedom (DOF) stages for various nano-positioning applications. The use of flexible hinges in these piezo-actuator-driven stages allows the elimination of the influence of friction and backlash clearance, as observed in other configurations; meanwhile it also causes more complicated stage performance in terms of dynamics and the cross-coupling effect between different axes. Based on the system identification technique, this paper presents the development of a model for the 3-DOF piezo-actuator-driven stages with unknown configuration, with its parameters estimated from the Hankel matrix by means of the maximum a posteriori (MAP) online estimation. Experiments were carried out on a commercially-available piezo-actuator-driven stage to verify the effectiveness of the developed model, as compared to other methods. The results show that the developed model is able to predict the stage performance with improved accuracy, while the model parameters can be well updated online by using the MAP estimation. These capabilities allow investigation of the complicated stage performance and also provide a starting point from which the mode-based control scheme can be established for improved performance. Full article
(This article belongs to the Special Issue Human Centered Actuators)
Show Figures

Figure 1

Previous Issue
Next Issue
Back to TopTop