N/MEMS Intelligent Structures: Design, Manufacturing, and Control

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E:Engineering and Technology".

Deadline for manuscript submissions: closed (15 June 2024) | Viewed by 4254

Special Issue Editors


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Guest Editor
Key Laboratory of High-Efficiency and Clean Mechanical Manufacture, School of Mechanical Engineering, Shandong University, Jinan 250061, China
Interests: smart materials and structures; shape memory alloys; soft robotics; chip scale spacecraft; solar sails

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Guest Editor
School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China
Interests: MEMS; flexible devices; microfluidic devices; organ-on-a-chip; strain sensors

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Guest Editor
School of Mechanical Engineering, Shandong University, Jinan 250061, China
Interests: flexible wearable electronic devices in sensing detection, medical diagnosis and other fields; biosensors based on two-dimensional material field effect transistors in the direction of disease diagnosis; micro-nano structure and device (MEMS) processing and manufacturing technology; functional micro–nano structure surface technology
Special Issues, Collections and Topics in MDPI journals

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Guest Editor
Materials Science and Engineering, New York State College of Ceramics, Alfred University, Alfred, NY 14802, USA
Interests: nanomaterials; nanomanufacturing; advanced manufacturing; nanocomposites; flexible electronics

Special Issue Information

Dear Colleagues,

The past few decades have witnessed revolutionary progress in N/MEMS technologies and applications; one of the most promising directions is the wider uses of intelligent structures in such fields as actuators, sensors, energy harvesters, and versatile micro robots for diverse applications in the future. As a result, emerging issues in the design, manufacturing and control of N/MEMS devices partially or wholly composed of smart materials and structures have attracted huge amounts of attention. Finite element analysis, analytical method analysis and experimental validation of intelligent structures have proven to be effective approaches to comprehensively understanding the physical and mechanical behaviors of these N/MEMS devices.

The aim of this Special Issue is to explore the recent advances in the field of N/MEMS intelligent structures and systems for medical devices, micro robots, flexible electronics, chip-scale spacecraft/aircraft, etc. Full papers, reviews and communications on the design, modeling, manufacturing, experimentation and control of N/MEMS intelligent structures are all welcome.

Dr. Zhongjing Ren
Prof. Dr. Li Wang
Prof. Dr. Ziran Wang
Dr. Junjun Ding
Guest Editors

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Keywords

  • N/MEMS
  • nano/microstructures
  • actuators
  • sensors
  • flexible electronics
  • energy harvesters
  • micro robotics
  • robotic e-skin
  • finite element analysis
  • analytical method analysis
  • microfabrication
  • manufacturing
  • mechanics
  • statics and dynamics
  • control

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Published Papers (3 papers)

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Research

14 pages, 4983 KiB  
Article
Design, Modeling, and Experimental Validation of an Active Microcatheter Driven by Shape Memory Effects
by Chengyang Li, Xu Zhang, Zhongjing Ren, Jingkai Wang, Shouyu Sun, Jian Fu, Yang Xu and Wu Duan
Micromachines 2024, 15(5), 603; https://doi.org/10.3390/mi15050603 - 30 Apr 2024
Viewed by 1299
Abstract
Microcatheters capable of active guidance have been proven to be effective and efficient solutions to interventional surgeries for cardiovascular and cerebrovascular diseases. Herein, a novel microcatheter made of two biocompatible materials, shape memory alloy (SMA) and polyethylene (PE), is proposed. It consists of [...] Read more.
Microcatheters capable of active guidance have been proven to be effective and efficient solutions to interventional surgeries for cardiovascular and cerebrovascular diseases. Herein, a novel microcatheter made of two biocompatible materials, shape memory alloy (SMA) and polyethylene (PE), is proposed. It consists of a reconfigurable distal actuator and a separate polyethylene catheter. The distal actuator is created via embedding U-shape SMA wires into the PE base, and its reconfigurability is mainly dominated by the shape memory effect (SME) of SMA wires, as well as the effect of thermal mismatch between the SMA and PE base. A mathematical model was established to predict the distal actuator’s deformation, and the analytical solutions show great agreement with the finite element results. Structural optimization of such microcatheters was carried out using the verified analytical model, followed by fabrication of some typical prototypes. Experimental testing of their mechanical behaviors demonstrates the feasibility of the structural designs, and the reliability and accuracy of the mathematical model. The active microcatheter, together with the prediction model, will lay a solid foundation for rapid development and optimization of active navigation strategies for vascular interventions. Full article
(This article belongs to the Special Issue N/MEMS Intelligent Structures: Design, Manufacturing, and Control)
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26 pages, 4038 KiB  
Article
Nonlinear Thermal/Mechanical Buckling of Orthotropic Annular/Circular Nanoplate with the Nonlocal Strain Gradient Model
by Mostafa Sadeghian, Arvydas Palevicius and Giedrius Janusas
Micromachines 2023, 14(9), 1790; https://doi.org/10.3390/mi14091790 - 19 Sep 2023
Cited by 3 | Viewed by 1088
Abstract
This article presents the nonlinear investigation of the thermal and mechanical buckling of orthotropic annular/circular single-layer/bilayer nanoplate with the Pasternak and Winkler elastic foundations based on the nonlocal strain gradient theory. The stability equations of the graphene plate are derived using higher-order shear [...] Read more.
This article presents the nonlinear investigation of the thermal and mechanical buckling of orthotropic annular/circular single-layer/bilayer nanoplate with the Pasternak and Winkler elastic foundations based on the nonlocal strain gradient theory. The stability equations of the graphene plate are derived using higher-order shear deformation theory (HSDT) and first-order shear deformation theory (FSDT) considering nonlinear von Karman strains. Furthermore, this paper analyses the nonlinear thermal and mechanical buckling of the orthotropic bilayer annular/circular nanoplate. HSDT provides an appropriate distribution for shear stress in the thickness direction, removes the limitation of the FSDT, and provides proper precision without using a shear correction coefficient. To solve the stability equations, the differential quadratic method (DQM) is employed. Additionally, for validation, the results are checked with available papers. The effects of strain gradient coefficient, nonlocal parameter, boundary conditions, elastic foundations, and geometric dimensions are studied on the results of the nondimensional buckling loads. Finally, an equation is proposed in which the thermal buckling results can be obtained from mechanical results (or vice versa). Full article
(This article belongs to the Special Issue N/MEMS Intelligent Structures: Design, Manufacturing, and Control)
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13 pages, 6602 KiB  
Article
Design Guidelines for Thin Diaphragm-Based Microsystems through Comprehensive Numerical and Analytical Studies
by Vinod Belwanshi, Kedarnath Rane, Vibhor Kumar and Bidhan Pramanick
Micromachines 2023, 14(9), 1725; https://doi.org/10.3390/mi14091725 - 1 Sep 2023
Viewed by 1207
Abstract
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is used in a variety of microsystems, including microphones and pressure sensors. It highlights the empirical relations that can be utilized for the design of thin diaphragm-based microsystems [...] Read more.
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is used in a variety of microsystems, including microphones and pressure sensors. It highlights the empirical relations that can be utilized for the design of thin diaphragm-based microsystems (TDMS). Design guidelines developed through a Finite Element Analysis (FEA) limit the iterative efforts to fabricate TDMS. These design guidelines are validated analytically, with the assumption that the material properties are isotropic, and the deviation from anisotropic material is calculated. In the FEA simulations, a large deflection theory is taken into account to incorporate nonlinearity, such that a critical dimensional ratio of a/h or 2r/h can be decided to have the linear response of a thin diaphragm. The observed differences of 12% in the deflection and 13% in the induced stresses from the analytical calculations are attributed to the anisotropic material consideration in the FEA model. It suggests that, up to a critical ratio (a/h or 2r/h), the thin diaphragm shows a linear relationship with a high sensitivity. The study also presents a few empirical relations to finalize the geometrical parameters of the thin diaphragm in terms of its edge length or radius and thickness. Utilizing the critical ratio calculated in the static FEA analysis, the basic conventional geometries are considered for harmonic analyses to understand the frequency response of the thin diaphragms, which is a primary sensing element for microphone applications and many more. This work provides a solution to microelectromechanical system (MEMS) developers for reducing cost and time while conceptualizing TDMS designs. Full article
(This article belongs to the Special Issue N/MEMS Intelligent Structures: Design, Manufacturing, and Control)
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