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MEMS/NEMS Sensors and Actuators, 2nd Edition

This special issue belongs to the section “A：Physics“.

Special Issue Information

Dear Colleagues,

Since the rise of MEMS/NEMS devices in the 1970s, the field of MEMS/NEMS sensors and actuators has grown immensely. Beginning in the 21st century, MEMS/NEMS sensors and actuators have been industrialized and applied not only to consumer markets such as mobile phones and games, but also to intelligent manufacturing, robots, aerospace, and other fields. Compared with traditional machinery, MEMS/NEMS technology has the characteristics of being miniaturized, intelligent, multifunctional, highly integrated, and suitable for mass-manufacturing processes.

Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on: (1) novel structural designs of MEMS/NEMS sensors and actuators, (2) improved fabrication, packaging process, and circuit design based on all kinds of MEMS/NEMS products, (3) new sensitive materials committed to a wider range of applications, such as polysilicon, graphene, carbon nanotubes, etc., and (4) new developments of applying MEMS/NEMS sensors and actuators including but not limited to MEMS/NEMS pressure sensors, accelerometers, gyroscopes, and microphones with capacitive, resonant, piezoelectric, and piezoresistive mechanism.

We look forward to receiving your contributions.

Dr. Qi Zhang
Prof. Dr. Yulong Zhao
Guest Editors

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Keywords

MEMS/NEMS sensors: based on different principles—capacitive, resonant, piezoelectric, piezoresistive
MEMS/NEMS sensors: based on different physical quantities—pressure, force, acceleration, flow etc.
MEMS/NEMS actuators
MEMS/NEMS applications
MEMS/NEMS fabrication and packaging process
novel sensitive materials
novel structural designs

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