MEMS/NEMS Sensors and Actuators, 2nd Edition
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".
Deadline for manuscript submissions: closed (29 February 2024) | Viewed by 24984
Special Issue Editors
Interests: micro/nano manufacturing; MEMS/NEMS sensors; measurements; carbon-based sensors; MoS2-based sensors; atomic simulation
Special Issues, Collections and Topics in MDPI journals
Interests: MEMS; sensors; micro/nano fabrication
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Since the rise of MEMS/NEMS devices in the 1970s, the field of MEMS/NEMS sensors and actuators has grown immensely. Beginning in the 21st century, MEMS/NEMS sensors and actuators have been industrialized and applied not only to consumer markets such as mobile phones and games, but also to intelligent manufacturing, robots, aerospace, and other fields. Compared with traditional machinery, MEMS/NEMS technology has the characteristics of being miniaturized, intelligent, multifunctional, highly integrated, and suitable for mass-manufacturing processes.
Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on: (1) novel structural designs of MEMS/NEMS sensors and actuators, (2) improved fabrication, packaging process, and circuit design based on all kinds of MEMS/NEMS products, (3) new sensitive materials committed to a wider range of applications, such as polysilicon, graphene, carbon nanotubes, etc., and (4) new developments of applying MEMS/NEMS sensors and actuators including but not limited to MEMS/NEMS pressure sensors, accelerometers, gyroscopes, and microphones with capacitive, resonant, piezoelectric, and piezoresistive mechanism.
We look forward to receiving your contributions.
Dr. Qi Zhang
Prof. Dr. Yulong Zhao
Guest Editors
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Keywords
- MEMS/NEMS sensors: based on different principles—capacitive, resonant, piezoelectric, piezoresistive
- MEMS/NEMS sensors: based on different physical quantities—pressure, force, acceleration, flow etc.
- MEMS/NEMS actuators
- MEMS/NEMS applications
- MEMS/NEMS fabrication and packaging process
- novel sensitive materials
- novel structural designs
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