Flexible Micromanipulators and Micromanipulation

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E:Engineering and Technology".

Deadline for manuscript submissions: closed (30 September 2022) | Viewed by 31562

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Department of Civil Engineering and Architecture (DICAR), University of Catania, 95125 Catania, Italy
Interests: parallel robots; flexible multibody dynamics; compliant mechanisms; reduced order models
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Special Issue Information

Dear Colleagues,

Micromanipulation is becoming essential in many applications such as micromechanics and medicine. In microsurgery, micromanipulation is employed to repair nerves and ligaments or manipulate cells and biological samples. Microgrippers and micromanipulators are MEMS-based devices fabricated using surface micromachining. These microsystems are required to grip and move micro-objects with precision and without causing damage. The movement capability comes from compliant structures that deform under the application of actuation forces. Depending on the application, micromanipulators are required to have a wide range of motion, the right stiffness to grasp an object without damaging it, and the ability to translate and orientate an object controlling one or more degrees of freedom of its end-effector. All these features are challenging and need advanced solutions in terms of design and manufacturing. Accordingly, this Special Issue seeks to collect research papers, short communications, and review articles that focus on novel planar and spatial compliant micromanipulators.

Prof. Dr. Alessandro Cammarata
Guest Editor

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Keywords

  • microgripper
  • microactuation
  • microassembly
  • comb drives
  • flexure hinge
  • compliant mechanism

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Related Special Issue

Published Papers (13 papers)

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Editorial

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3 pages, 178 KiB  
Editorial
Editorial for the Special Issue on Flexible Micromanipulators and Micromanipulation
by Alessandro Cammarata
Micromachines 2023, 14(3), 597; https://doi.org/10.3390/mi14030597 - 4 Mar 2023
Viewed by 914
Abstract
The field of micromanipulation is rapidly growing and evolving thanks to advancements in microfabrication technologies and the increased demand for precise and accurate manipulation of microscale objects [...] Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)

Research

Jump to: Editorial

16 pages, 5607 KiB  
Article
Precise Position Control of Holonomic Inchworm Robot Using Four Optical Encoders
by Kengo Tanabe, Masato Shiota, Eiji Kusui, Yohei Iida, Hazumu Kusama, Ryosuke Kinoshita, Yohei Tsukui, Rintaro Minegishi, Yuta Sunohara and Ohmi Fuchiwaki
Micromachines 2023, 14(2), 375; https://doi.org/10.3390/mi14020375 - 2 Feb 2023
Cited by 6 | Viewed by 1988
Abstract
In this study, an XYθ position sensor is designed/proposed to realize the precise control of the XYθ position of a holonomic inchworm robot in the centimeter to submicrometer range using four optical encoders. The sensor was designed to be sufficiently compact for mounting [...] Read more.
In this study, an XYθ position sensor is designed/proposed to realize the precise control of the XYθ position of a holonomic inchworm robot in the centimeter to submicrometer range using four optical encoders. The sensor was designed to be sufficiently compact for mounting on a centimeter-sized robot for closed-loop control. To simultaneously measure the XYθ displacements, we designed an integrated two-degrees-of-freedom scale for the four encoders. We also derived a calibration equation to decrease the crosstalk errors among the XYθ axes. To investigate the feasibility of this approach, we placed the scale as a measurement target for a holonomic robot. We demonstrated closed-loop sequence control of a star-shaped trajectory for multiple-step motion in the centimeter to micrometer range. We also demonstrated simultaneous three-axis proportional–integral–derivative control for one-step motion in the micrometer to sub-micrometer range. The close-up trajectories were examined to determine the detailed behavior with sub-micrometer and sub-millidegree resolutions in the MHz measurement cycle. This study is an important step toward wide-range flexible control of precise holonomic robots for various applications in which multiple tools work precisely within the limited space of instruments and microscopes. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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15 pages, 3425 KiB  
Article
Relationship between the Young’s Moduli of Whole Microcapsules and Their Shell Material Established by Micromanipulation Measurements Based on Diametric Compression between Two Parallel Surfaces and Numerical Modelling
by Daniele Baiocco, Zhihua Zhang, Yanping He and Zhibing Zhang
Micromachines 2023, 14(1), 123; https://doi.org/10.3390/mi14010123 - 1 Jan 2023
Cited by 8 | Viewed by 4065
Abstract
Micromanipulation is a powerful technique to measure the mechanical properties of microparticles including microcapsules. For microparticles with a homogenous structure, their apparent Young’s modulus can be determined from the force versus displacement data fitted by the classical Hertz model. Microcapsules can consist of [...] Read more.
Micromanipulation is a powerful technique to measure the mechanical properties of microparticles including microcapsules. For microparticles with a homogenous structure, their apparent Young’s modulus can be determined from the force versus displacement data fitted by the classical Hertz model. Microcapsules can consist of a liquid core surrounded by a solid shell. Two Young’s modulus values can be defined, i.e., the one is that determined using the Hertz model and another is the intrinsic Young’s modulus of the shell material, which can be calculated from finite element analysis (FEA). In this study, the two Young’s modulus values of microplastic-free plant-based microcapsules with a core of perfume oil (hexyl salicylate) were calculated using the aforementioned approaches. The apparent Young’s modulus value of the whole microcapsules determined by the classical Hertz model was found to be EA = 0.095 ± 0.014 GPa by treating each individual microcapsule as a homogeneous solid spherical particle. The previously obtained simulation results from FEA were utilised to fit the micromanipulation data of individual core–shell microcapsules, enabling to determine their unique shell thickness to radius ratio (h/r)FEA = 0.132 ± 0.009 and the intrinsic Young’s modulus of their shell (EFEA = 1.02 ± 0.13 GPa). Moreover, a novel theoretical relationship between the two Young’s modulus values has been derived. It is found that the ratio of the two Young’s module values (EA/EFEA) is only a function on the ratio of the shell thickness to radius (h/r) of the individual microcapsule, which can be fitted by a third-degree polynomial function of h/r. Such relationship has proven applicable to a broad spectrum of microcapsules (i.e., non-synthetic, synthetic, and double coated shells) regardless of their shell chemistry. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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26 pages, 1645 KiB  
Article
Direct Kinetostatic Analysis of a Gripper with Curved Flexures
by Alessandro Cammarata, Pietro Davide Maddio, Rosario Sinatra and Nicola Pio Belfiore
Micromachines 2022, 13(12), 2172; https://doi.org/10.3390/mi13122172 - 8 Dec 2022
Cited by 10 | Viewed by 1625
Abstract
Micro-electro-mechanical-systems (MEMS) extensively employed planar mechanisms with elastic curved beams. However, using a curved circular beam as a flexure hinge, in most cases, needs a more sophisticated kinetostatic model than the conventional planar flexures. An elastic curved beam generally allows its outer sections [...] Read more.
Micro-electro-mechanical-systems (MEMS) extensively employed planar mechanisms with elastic curved beams. However, using a curved circular beam as a flexure hinge, in most cases, needs a more sophisticated kinetostatic model than the conventional planar flexures. An elastic curved beam generally allows its outer sections to experience full plane mobility with three degrees of freedom, making complex non-linear models necessary to predict their behavior. This paper describes the direct kinetostatic analysis of a planar gripper with an elastic curved beam is described and then solved by calculating the tangent stiffness matrix in closed form. Two simplified models and different contributions to derive their tangent stiffness matrices are considered. Then, the Newton–Raphson iterative method solves the non-linear direct kinetostatic problem. The technique, which appears particularly useful for real-time applications, is finally applied to a case study consisting of a four-bar linkage gripper with elastic curved beam joints that can be used in real-time grasping operations at the microscale. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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22 pages, 6264 KiB  
Article
A Substructure Condensed Approach for Kinetostatic Modeling of Compliant Mechanisms with Complex Topology
by Shilei Wu, Zhongxi Shao and Hongya Fu
Micromachines 2022, 13(10), 1734; https://doi.org/10.3390/mi13101734 - 13 Oct 2022
Cited by 5 | Viewed by 1756
Abstract
Compliant mechanisms with complex topology have previously been employed in various precision devices due to the superiorities of high precision and compact size. In this paper, a substructure condensed approach for kinetostatic analysis of complex compliant mechanisms is proposed to provide concise solutions. [...] Read more.
Compliant mechanisms with complex topology have previously been employed in various precision devices due to the superiorities of high precision and compact size. In this paper, a substructure condensed approach for kinetostatic analysis of complex compliant mechanisms is proposed to provide concise solutions. In detail, the explicit relationships between the theoretical stiffness matrix, element stiffness matrix, and element transfer matrix for the common flexible beam element are first derived based on the energy conservation law. The transfer matrices for three types of serial–parallel substructures are then developed by combining the equilibrium equations of nodal forces with the transfer matrix approach, so that each branch chain can be condensed into an equivalent beam element. Based on the derived three types of transfer matrices, a kinetostatic model describing only the force-displacement relationship of the input/output nodes is established. Finally, two typical precision positioning platforms with complex topology are employed to demonstrate the conciseness and efficiency of this modeling approach. The superiority of this modeling approach is that the input/output stiffness, coupling stiffness, and input/output displacement relations of compliant mechanisms with multiple actuation forces and complex substructures can be simultaneously obtained in concise and explicit matrix forms, which is distinct from the traditional compliance matrix approach. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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20 pages, 11118 KiB  
Article
Optimal Design for 3-PSS Flexible Parallel Micromanipulator Based on Kinematic and Dynamic Characteristics
by Jun Ren, Qiliang Li, Hanhai Wu and Qiuyu Cao
Micromachines 2022, 13(9), 1457; https://doi.org/10.3390/mi13091457 - 2 Sep 2022
Cited by 9 | Viewed by 1817
Abstract
This paper proposes two optimal design schemes for improving the kinematic and dynamic performance of the 3-PSS flexible parallel micromanipulator according to different application requirements and conditions. Firstly, the workspace, dexterity, frequencies, and driving forces of the mechanism are successively analyzed. Then, a [...] Read more.
This paper proposes two optimal design schemes for improving the kinematic and dynamic performance of the 3-PSS flexible parallel micromanipulator according to different application requirements and conditions. Firstly, the workspace, dexterity, frequencies, and driving forces of the mechanism are successively analyzed. Then, a progressive optimization design is carried out, in which the scale parameters of this mechanism are firstly optimized to maximize the workspace, combining the constraints of the minimum global dexterity of the mechanism. Based on the optimized scale parameters, the minimum thickness and the cutting radius of the flexure spherical hinge are further optimized for minimizing the required driving forces, combined with constraints of the minimum first-order natural frequency of the mechanism and the maximum stress of the flexure spherical hinge during the movement of the mechanism. Afterward, a synchronous optimization design is proposed, in which the scale parameters are optimized to maximize the first-order natural frequency of the mechanism, combined with the constraints of a certain inscribed circle of the maximum cross-section of the workspace, the maximum stroke of the selected piezoelectric stages, and the maximum ultimate angular displacement of the flexure spherical hinge. The effectiveness of both optimization methods is verified by the comparison of the kinematic and dynamic characteristics of the original and optimized mechanism. The advantage of the progressive optimization method is that both the workspace and the driving forces are optimized and the minimum requirements for global dexterity and first-order natural frequency are ensured. The merit of the synchronous optimization method is that only the scale parameters of the mechanism need to be optimized without changing the structural parameters of the flexible spherical hinge. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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13 pages, 7665 KiB  
Article
Vision Feedback Control for the Automation of the Pick-and-Place of a Capillary Force Gripper
by Takatoshi Ito, Eri Fukuchi, Kenta Tanaka, Yuki Nishiyama, Naoto Watanabe and Ohmi Fuchiwaki
Micromachines 2022, 13(8), 1270; https://doi.org/10.3390/mi13081270 - 7 Aug 2022
Cited by 2 | Viewed by 1909
Abstract
In this paper, we describe a newly developed vision feedback method for improving the placement accuracy and success rate of a single nozzle capillary force gripper. The capillary force gripper was developed for the pick-and-place of mm-sized objects. The gripper picks up an [...] Read more.
In this paper, we describe a newly developed vision feedback method for improving the placement accuracy and success rate of a single nozzle capillary force gripper. The capillary force gripper was developed for the pick-and-place of mm-sized objects. The gripper picks up an object by contacting the top surface of the object with a droplet formed on its nozzle and places the object by contacting the bottom surface of the object with a droplet previously applied to the place surface. To improve the placement accuracy, we developed a vision feedback system combined with two cameras. First, a side camera was installed to capture images of the object and nozzle from the side. Second, from the captured images, the contour of the pre-applied droplet for placement and the contour of the object picked up by the nozzle were detected. Lastly, from the detected contours, the distance between the top surface of the droplet for object release and the bottom surface of the object was measured to determine the appropriate amount of nozzle descent. Through the experiments, we verified that the size matching effect worked reasonably well; the average placement error minimizes when the size of the cross-section of the objects is closer to that of the nozzle. We attributed this result to the self-alignment effect. We also confirmed that we could control the attitude of the object when we matched the shape of the nozzle to that of the sample. These results support the feasibility of the developed vision feedback system, which uses the capillary force gripper for heterogeneous and complex-shaped micro-objects in flexible electronics, micro-electro-mechanical systems (MEMS), soft robotics, soft matter, and biomedical fields. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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21 pages, 2008 KiB  
Article
Dynamic Model of a Conjugate-Surface Flexure Hinge Considering Impacts between Cylinders
by Alessandro Cammarata, Pietro Davide Maddìo, Rosario Sinatra, Andrea Rossi and Nicola Pio Belfiore
Micromachines 2022, 13(6), 957; https://doi.org/10.3390/mi13060957 - 16 Jun 2022
Cited by 3 | Viewed by 2140
Abstract
A dynamic model of a Conjugate-Surface Flexure Hinge (CSFH) has been proposed as a component for MEMS/NEMS Technology-based devices with lumped compliance. However, impacts between the conjugate surfaces have not been studied yet and, therefore, this paper attempts to fill this gap by [...] Read more.
A dynamic model of a Conjugate-Surface Flexure Hinge (CSFH) has been proposed as a component for MEMS/NEMS Technology-based devices with lumped compliance. However, impacts between the conjugate surfaces have not been studied yet and, therefore, this paper attempts to fill this gap by proposing a detailed multibody system (MBS) model that includes not only rigid-body dynamics but also elastic forces, friction, and impacts. Two models based on the Lankarani-Nikravesh constitutive law are first recalled and a new model based on the contact of cylinders is proposed. All three models are complemented by the friction model proposed by Ambrosìo. Then, the non-smooth Moreau time-stepping scheme with Coulomb friction is described. The four models are compared in different scenarios and the results confirm that the proposed model outcomes comply with the most reliable models. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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19 pages, 4565 KiB  
Article
Micromanipulation and Automatic Data Analysis to Determine the Mechanical Strength of Microparticles
by Zhihua Zhang, Yanping He and Zhibing Zhang
Micromachines 2022, 13(5), 751; https://doi.org/10.3390/mi13050751 - 10 May 2022
Cited by 9 | Viewed by 1825
Abstract
Microparticles are widely used in many industrial sectors. A micromanipulation technique has been widely used to quantify the mechanical properties of individual microparticles, which is crucial to the optimization of their functionality and performance in end-use applications. The principle of this technique is [...] Read more.
Microparticles are widely used in many industrial sectors. A micromanipulation technique has been widely used to quantify the mechanical properties of individual microparticles, which is crucial to the optimization of their functionality and performance in end-use applications. The principle of this technique is to compress single particles between two parallel surfaces, and the force versus displacement data are obtained simultaneously. Previously, analysis of the experimental data had to be done manually to calculate the rupture strength parameters of each individual particle, which is time-consuming. The aim of this study is to develop a software package that enables automatic analysis of the rupture strength parameters from the experimental data to enhance the capability of the micromanipulation technique. Three algorithms based on the combination of the “three-sigma rule”, a moving window, and the Hertz model were developed to locate the starting point where onset of compression occurs, and one algorithm based on the maximum deceleration was developed to identify the rupture point where a single particle is ruptured. Fifty microcapsules each with a liquid core and fifty porous polystyrene (PS) microspheres were tested in order to produce statistically representative results of each sample, and the experimental data were analysed using the developed software package. It is found that the results obtained from the combination of the “3σ + window” algorithm or the “3σ + window + Hertz” algorithm with the “maximum-deceleration” algorithm do not show any significant difference from the manual results. The data analysis time for each sample has been shortened from 2 to 3 h manually to within 20 min automatically. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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18 pages, 5936 KiB  
Article
Omnidirectional Manipulation of Microparticles on a Platform Subjected to Circular Motion Applying Dynamic Dry Friction Control
by Sigitas Kilikevičius, Kristina Liutkauskienė, Ernestas Uldinskas, Ribal El Banna and Algimantas Fedaravičius
Micromachines 2022, 13(5), 711; https://doi.org/10.3390/mi13050711 - 30 Apr 2022
Cited by 5 | Viewed by 1933
Abstract
Currently used planar manipulation methods that utilize oscillating surfaces are usually based on asymmetries of time, kinematic, wave, or power types. This paper proposes a method for omnidirectional manipulation of microparticles on a platform subjected to circular motion, where the motion of the [...] Read more.
Currently used planar manipulation methods that utilize oscillating surfaces are usually based on asymmetries of time, kinematic, wave, or power types. This paper proposes a method for omnidirectional manipulation of microparticles on a platform subjected to circular motion, where the motion of the particle is achieved and controlled through the asymmetry created by dynamic friction control. The range of angles at which microparticles can be directed, and the average velocity were considered figures of merit. To determine the intrinsic parameters of the system that define the direction and velocity of the particles, a nondimensional mathematical model of the proposed method was developed, and modeling of the manipulation process was carried out. The modeling has shown that it is possible to direct the particle omnidirectionally at any angle over the full 2π range by changing the phase shift between the function governing the circular motion and the dry friction control function. The shape of the trajectory and the average velocity of the particle depend mainly on the width of the dry friction control function. An experimental investigation of omnidirectional manipulation was carried out by implementing the method of dynamic dry friction control. The experiments verified that the asymmetry created by dynamic dry friction control is technically feasible and can be applied for the omnidirectional manipulation of microparticles. The experimental results were consistent with the modeling results and qualitatively confirmed the influence of the control parameters on the motion characteristics predicted by the modeling. The study enriches the classical theories of particle motion on oscillating rigid plates, and it is relevant for the industries that implement various tasks related to assembling, handling, feeding, transporting, or manipulating microparticles. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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15 pages, 2236 KiB  
Article
Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure
by Yanlin Xie, Yangmin Li and Chifai Cheung
Micromachines 2022, 13(5), 678; https://doi.org/10.3390/mi13050678 - 27 Apr 2022
Cited by 3 | Viewed by 2625
Abstract
Compliant mechanisms are popular to the applications of micro/nanoscale manipulations. This paper proposes a novel triaxial parallel-kinematic compliant manipulator inspired by the Tripteron mechanism. Compared to most conventional triaxial compliant mechanisms, the proposed manipulator has the merits of structure compactness and being free [...] Read more.
Compliant mechanisms are popular to the applications of micro/nanoscale manipulations. This paper proposes a novel triaxial parallel-kinematic compliant manipulator inspired by the Tripteron mechanism. Compared to most conventional triaxial compliant mechanisms, the proposed manipulator has the merits of structure compactness and being free of assembly error due to its unique configuration and the utilize of 3D printing technology. The compliance matrix modeling method is employed to determine the input stiffness of the compliant manipulator, and it is verified by finite-element analysis (FEA). Results show that the deviations between simulation works and the derived analytical models are in an acceptable range. The simulation results also reveal that the compliant manipulator can achieve a 16 μm × 16 μm × 16 μm cubic workspace. In this motion range, the observed maximum stress is much lower than the yield strength of the material. Moreover, the dynamic characteristics of the manipulator are investigated via the simulations as well. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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19 pages, 4683 KiB  
Article
Development of an Electromagnetic Micromanipulator Levitation System for Metal Additive Manufacturing Applications
by Parichit Kumar, Saksham Malik, Ehsan Toyserkani and Mir Behrad Khamesee
Micromachines 2022, 13(4), 585; https://doi.org/10.3390/mi13040585 - 9 Apr 2022
Cited by 10 | Viewed by 3642
Abstract
Magnetism and magnetic levitation has found significant interest within the field of micromanipulation of objects. Additive manufacturing (AM), which is the computer-controlled process for creating 3D objects through the deposition of materials, has also been relevant within the academic environment. Despite the research [...] Read more.
Magnetism and magnetic levitation has found significant interest within the field of micromanipulation of objects. Additive manufacturing (AM), which is the computer-controlled process for creating 3D objects through the deposition of materials, has also been relevant within the academic environment. Despite the research conducted individually within the two fields, there has been minimal overlapping research. The non-contact nature of magnetic micromanipulator levitation systems makes it a prime candidate within AM environments. The feasibility of integrating magnetic micromanipulator levitation system, which includes two concentric coils embedded within a high permeability material and carrying currents in opposite directions, for additive manufacturing applications is presented in this article. The working principle, the optimization and relevant design decisions pertaining to the micromanipulator levitation system are discussed. The optimized dimensions of the system allow for 920 turns in the inner coil and 800 turns in the outer coil resulting in a Ninnercoil:Noutercoil ratio of 1.15. Use of principles of free levitation, which is production of levitation and restoration forces with the coils, to levitate non-magnetic conductive materials with compatibility and applications within the AM environment are discussed. The Magnetomotive Force (MMF) ratio of the coils are adjusted by incorporation of an resistor in parallel to the outer coil to facilitate sufficient levitation forces in the axial axis while producing satisfactory restoration forces in the lateral axes resulting in the levitation of an aluminum disc with a levitation height of 4.5 mm. An additional payload of up to 15.2 g (59% of mass of levitated disc) was added to a levitated aluminum disk of 26 g showing the system capability coping with payload variations, which is crucial in AM process to gradually deploy masses. The final envisioned system is expected to have positional stability within the tolerance range of a few μm. The system performance is verified through the use of simulations (ANSYS Maxwell) and experimental analyses. A novel method of using the ratio of conductivity (σ) of the material to density (ρ) of the material to determine the compatibility of the levitation ability of non-magnetic materials with magnetic levitation application is also formulated. The key advantage of this method is that it does not rely on experimental analyses to determine the levitation ability of materials. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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20 pages, 17345 KiB  
Article
Design and Fabrication of a Magnetic Actuator for Torque and Force Control Estimated by the ANN/SA Algorithm
by Pooriya Kazemzadeh Heris and Mir Behrad Khamesee
Micromachines 2022, 13(2), 327; https://doi.org/10.3390/mi13020327 - 19 Feb 2022
Cited by 12 | Viewed by 3887
Abstract
Magnetic manipulation has the potential to recast the medical field both from an operational and drug delivery point of view as it can provide wireless controlled navigation over surgical devices and drug containers inside a human body. The presented system in this research [...] Read more.
Magnetic manipulation has the potential to recast the medical field both from an operational and drug delivery point of view as it can provide wireless controlled navigation over surgical devices and drug containers inside a human body. The presented system in this research implements a unique eight-coil configuration, where each coil is designed based on the characterization of the working space, generated force on a milliscale robot, and Fabry factor. A cylindrical iron-core coil with inner and outer diameters and length of 20.5, 66, and 124 mm is the optimized coil. Traditionally, FEM results are adopted from simulation and implemented into the motion logic; however, simulated values are associated with errors; 17% in this study. Instead of regularizing FEM results, for the first time, artificial intelligence has been used to approximate the actual values for manipulation purposes. Regression models for Artificial Neural Network (ANN) and a hybrid method called Artificial Neural Network with Simulated Annealing (ANN/SA) have been created. ANN/SA has shown outstanding performance with an average R2, and a root mean square error of 0.9871 and 0.0153, respectively. Implementation of the regression model into the manipulation logic has provided a motion with 13 μm of accuracy. Full article
(This article belongs to the Special Issue Flexible Micromanipulators and Micromanipulation)
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